Air Slide Table Series MXQ

15 14 Average speed Va mm/s Collision speed V mm/s 13 13 13 13 18 31 31 31 31 36 23 41 42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Sine Rodless Cylinder Series REA

14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500 200 300 300 200 Usable range 100 100 Usable range 20 30 40 50 50 40 30 20 10 0 1

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

25

0.5 0.5 IZD IZE 11 13 8.8 8.8 6.5 7.8 10.2 10.2 IZH 13 14 60 7 7.7 Detection hole 1 6 10.5 2 x R3.3 10 61 (7.5) Auto balance sensor [High accuracy type]/IZS31-DG 2 x 3.4 2 x 3.4 Amplifier Head 3500 1500 0.2 0.2 20 4.8 6.6 4.8 69 95 23 78 98 14.5 5 8.8 7.8 10.2 10.2 13 Sensor 60 7.7 71 12 1 6 14 2 x Counterbore 6.6, Depth 5.7 (Height of thread bearing surface 8.8) 433 IZS40/41/42 Series Dimensions

Multi-Axis Step Motor Controller

Parallel I/O Connector I/O 1 Wiring example NPN JXC73 PNP JXC83 24 VDC Load 24 VDC Load OUT0 10 OUT0 10 1 1 +COM1 +COM1 OUT1 30 OUT1 30 Load Load 21 21 +COM2 +COM2 OUT2 11 OUT2 11 Load Load 2 2 IN0 IN0 OUT3 31 OUT3 31 Load Load 22 22 IN1 IN1 OUT4 12 OUT4 12 Load Load 3 3 IN2 IN2 OUT5 32 OUT5 32 Load Load OUT6 13 OUT6 13 Load Load 23 23 IN3 IN3 OUT7 33 OUT7 33 Load Load 4 4 IN4 IN4 OUT8 14

99

m (Filtration efficiency 99%) FGD High precision filtration: 99% or more FGE FGG FGA FGC High accuracy filtration is achieved by using a HEPO1 1element with filtration accuracy of 2, 4, 6 or 13 m (Filtration efficiency 99%).

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

port] Applicable tubing O.D.: 8 9 For top ported 4 4 4 4 4 4 4 4 3 R 60 37 26 P 1 2 2 2 2 2 2 2 2 29.6 13.1 7.5 58.1 43.5 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable tubing O.D.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (Max. 16 stations) Dimensions 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

IDX-OM-W094

V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFA60/70/80/90 Series 1-2 IDX-OM-W094 1.2.4 IDFA60/70/80/90 Series 1-3 IDX-OM-W094 1.2.5 230VAC 1PH 50Hz SERIAL No.

MGC

11 84 M6 X 1Depth12 6.8 30 103 65 45 16.5 26.5 11Depth8 M8 X 1.25Depth14 120 27 13 15 89 75, 100 125, 150 200, 250 300 M6 X 1Depth12 6.8 35 118 70 50 16.5 26.5 11Depth8 M8 X 1.25Depth14 135 32 13 15 94 8.6 40 140 75 50 34.5 M10 X 1.5Depth18 22 M8 X 1.25Depth16 14Depth10 160 37 16 18 107 45 170 110 80 M12 X 1.75Depth21 22 M10 X 1.5Depth20 17Depth12 37 10.5 194 42 19 23 142 Bore (mm) WH W

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

17 for details regarding the rod end nut and the mounting nut. 13 Lateral Load Resisting Low Friction Cylinder Metal Seal Series MQM Refer to the basic type on page 13 for other dimensions.

Series AS-FM/AS-M/ASD-FM

Port threads AS-FM Elbow type R Metric size P.1 New New NPT Inch size Universal type R Metric size P.1 New New NPT Inch size In-line type New New Metric size Inch size P.9 Speed controller (metal body) Cylinder side Tube side AS-M R R Elbow type P.7 NPT NPT Dual speed controller with One-touch fitting (resin body) Port threads Connecting tube ASD-FM Metric size R Universal type New New P.13

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Male Branch Tee: KPT Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Weight g Connection threads R M L2 D2 L1 2-Applicable tubing M L1 M 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 6 7 8 9 12 13 20 21 24 27 KPT04-01 KPT04-02 KPT06-01 KPT06-02

Series MXP Precision Air Slide Table

10 4 3 5 12 "O" ring NBR 13 Piston seal NBR Replaceable parts list (Seal kit) Bore size (mm) Part no.

Mechanical Valves Series NVM, NVFM, NVZNI

Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

Air Pilot Operated Series NVSA

PC 0111-1 1 1 O-Ring , Operatol Buna N 12 Recessed Non-Locking Operator PB 0103 13 Gasket . Subplate BLrna N AXT 335-12.2 '14 Hold Down Bolts 32 x 1 n.')

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

299 12 348 337.5 315 16.5 360.5 350 331 14.5 373 362.5 347 13 40

OMR0032

Safety Instructions . 6 2 Product Overview . 8 2.1 Features . 8 2.2 How to order . 11 2.3 Structure of the product . 12 2.4 Start up procedure . 13 (1) Check the contents of the package . 13 (2) Setup of pulse train input signal switch . 13 (3)Mounting the controller . 13 (4) Wiring and connection . 13 (5) Power supply ON and alarm check . 14 (6) Basic parameter setup and Step Data setup