Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Bore size 10, 15 Type M thread Rc 1/8 NPT 1/8 G 1/8 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.

3 Port Solenoid Valve Series VQ100 1

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Bore size 10, 15 Type M thread Rc 1/8 NPT 1/8 G 1/8 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.

Digital Pressure Switch ( compatible)

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

MGQ

21 27 33 37 40 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 5 10 10 10 15 15 11 11 12.5 15 18 21 M8 x 1.25 M8 x 1.25 M8 x 1.25 25, 50 75, 100 125, 150 175, 200 124 106 48 122 90 110 M8 x 1.25 M8 x 1.25 M8 x 1.25 140 120 56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166 M12 x 1.75 M12 x 1.75 M12 x 1.75 224 190 108 221 170 200 M14 x

EXxx-OMW0014CN

SI 2 11.4 1x 2x ( 2.5 mm= 1.3 Nm) . 3-3 IP65 15 No.EX-OMW0014CN-A 3.2.

PFxx-OMS0001CN

V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 20 1 atm()[Anr] ripple -13No.PF-OMS0001CN-A 9022545 -14No.PF-OMS0001CN-A 2 0.50.7 Nm M4 (4 ) (71 ) M4 -15No.PF-OMS0001CN-A

4-channel Flow Monitor ( compatible)

For precise flow detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. -94No.PF-OMA1011-A Problem No.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 48 6 22 22 6 25 25 43 15 15 M5 leakage detection port 23 30 22 Part number for sub-base VCC12-S02 02F [Rc1/4] [G1/4] 60 0.5 to 2 Sub-base material is aluminum + hard anodized containing PTFE.

HEC-OM-S008

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0=Pump stop 1=Normal operation (Run) 2=Auto tuning start 3=Learning control 4=External tune control 0-2 Operation mode 3-15 Unused The operation mode with Modbus communication is displayed as the figure on the right (Mode 0 = Operation stopped).

CEx-OMI0064

No. , 15 No.120 No.2131 No. 1 2 3 4 5 1 1 2 3 4 5 2 6 7 8 9 10 3 11 12 13 14 15 4 16 17 18 19 20 20 - ,No.131(OUT 15), No. (:ON:OFF) No. 1 2 3 4 5 No. No.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

LEF-OM006xx

5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 -15- 1 14 2 15 3 16 4 17 5 18 6 19 NBR 7 20 8 21 9 A 22 10 23 11 24 12 25 13 -16- 3. 3.1. 1 I/O LEC-CN5-* / PLC 1 2 DC24V CN5 1 LE-C*-*-* LE-C*-*S-* CN4 CN3 CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 2

Fieldbus system PROFINET compatible SI Unit

ON US2 is present. 41 No.EX-OMW0011-B 6.4.4.

CYV

Laser marking Hexagon wrench Features 2 Rodless Cylinder for Vacuum Series CYV How to Order CYV 15 200 Rodless cylinder for vacuum Standard stroke Bore size 15 32 15mm 32mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 Specifications 15 32 Bore size (mm) Atmosphere to 1.3 x 10Pa (ABS) Operating environment pressure Air and inert gases Operating

VQ

Refer to p.2.9-15 for How to Order for DIN rail.

Process Pump

AIR EXH FLUID IN Automatically operated type Performance Curve SUP: Pilot air pressure Flow Rate Characteristics Air Consumption 0.5 200 Air consumption (L/min [ANR]) SUP = 0.5 MPa Discharge pressure (MPa) SUP = 0.5 MPa 0.4 SUP = 0.4 MPa 150 SUP = 0.4 MPa 0.3 SUP = 0.3 MPa SUP = 0.3 MPa SUP = 0.2 MPa 100 SUP = 0.2 MPa 0.2 50 0.1 0 0 10 15 20 25 5 0 5 0 10 15 20 25 Discharge flow rate (L/

3 Port Solenoid Valve Series VQ100

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the

VM

15 N F.O.F.