CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

BA 0 0.3 CA BA 0 0.3 Drawing of view E MM (mm) Bore size Z A NN S Y LB LC LH LT LX LY LZ X 85.5 6 15 15 17 3 8 12 11 28 16.5 4.5 9 1.6 24 16.5 32 24.5 7 M3 x 0.5 M8 x 1.0 57.5 5 T NA NB BA BB CA CB D F GA GB GC H 3 7 83 82 16 10 54 55 M12 x 1.0 M10 x 1.0 21.5 23 5.5 5.5 14 14 2.3 2.3 33 33 25 25 42 42 20.5 20.5 9.5 9.5 M5 x 0.8 M4 x 0.7 18.3 12 17 20 20 14 5 4 8 8 5 5 5 5 11 11 28 28 15

Process Pump

Max. 0.1 mg/m3 (ANR) Note 2) Downstream oil mist concentration (Before oil saturation, 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) When 2 years passed, or pressure drop reaches 0.1 MPa Element life Refer to Best Pneumatics No. 5 for further details. Note 1) With auto drain is 0.1 MPa (N.O. type), 0.15 MPa (N.C. type).

3 Port Solenoid Valve

Note) Order is accepted in 10 units. 3 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 7 12 18 2-3.4 Mounting hole 5 150 (lead wire AWG#26) 22 6 20.5 19 3 2 1 9.5 6.5 5.5 4.5 12.3 10 10 25 M3 0.5 3 (EXH) port M3 0.5 1 (SUP) port M3 0.5 2 (OUT) port S070B-C-M3 Plug lead type 0.1 W with power saving circuit 150 (lead

ELECTRO-PNEUMATIC POSITIONER

.Attached Drawing 31-37 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Compact Cylinder

26 19 17 16.5 16 M10 x 1.25 6 14 26 19 19 19.5 20 M12 x 1.25 7 17 30 22 19 19.5 20 M12 x 1.25 7 17 30 22 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8

60

E J J 16 22 A A (C) C (C) C 14 2 x H 2 x H Port size Port size 2 x 5.3 2 x 5.3 Mounting hole Mounting hole Width across flats 27 Width across flats 27 14 34 14 34 2 x 5.5 Mounting hole 42 42 B B DIN terminal: D Conduit terminal: T 23 23 (E) G1/2 Cable 6 to 12 K I F I F 34 K D 32 J Width across flats G Width across flats G (E) 14 25 31.5 (44) E E 14 J (L) A (C) C A 2 x H Port size E (E) G1

S070

Note) Order is accepted in 10 units. 4-11-4 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 V100 7 SY 12 18 SYJ 2-3.4 mounting hole VK 150 (Lead wire AWG#26) 5 22 6 VZ VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug

LECP6_C

A-1 1 B-3 2 A-3 2 1 (5.5) 14 18 (6.3) B1 A1 5 6 17.7 14.2 A6 B6 B1 A1 10.2 2 1 B3 A3 (5.7) 15 16 11 30.7 45 - 115 I/O No.

Step Motor Driver （ Pulse input type ）

resistor . 14 2.5 Startup Procedures . 15 (1) Confirmation of the package content . 15 (2) Installation . 15 (3) Wiring and connection . 15 (4) Power ON alarm (error) . 15 (5) Operation pattern setting . 16 (6) Trial run (Electric actuator adjustment) . 16 3.

JXCx-OMT0032CN

JXC-OMT0032CN TM) (GW)(DeviceNet / LEC-GDN1 . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4() . 8 (1) . 8 (2) . 8 (3)(LEC) . 8 (4) . 8 (5) . 8 (6) . 9 (7) . 9 3. . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGDN1) . 13 (2)DIN(LECGDN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (NODE ADDRESS,B RATE) . 15 4.2(CN2SW) . 15 4.3(LEC) . 16 5. . 18 5.2 CN3 . 18 5.3 CN1CONT . 18 5.4 CN2PC/TB . 19 .CN4 . 20

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L

Thermo-dryer

The intersection H is the amount of moisture included in the compressed air 35 ft3 (1 m3) at 102psi (0.7 MPa), and a pressure dew point 77F (25C). The amount of moisture is 0.003 oz./ft3 (3.0 g/m3). 10.

e-Rodless Actuator

M2 M3 m2 m3 16 25 16 25 5 4 3.5 18 16 14 E-MY2C 13 14 10 35 35 30 7 6 7 15 13 13 E-MY2H 28 26 26 32 30 30 The above values are the maximum allowable values for moment and load weight. Refer to each graph regarding the maximum allowable moment and maximum load weight for a particular slide table speed.

MX-OMP0051

15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36 NBR 37 NBR 38 NBR 39 (MXQ6,8(C),12(C)) / 40 (MXQ6,MXQ8(C),MXQ12(C)) 41 NBR (MXQ6,MXQ8(C),MXQ12(C)) 42 (MXQ6,MXQ8(C),MXQ12(C)) 43 20 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax

CVRA1-E

(See Fig. 14.)

Pressure Relief 3 Port Valve With Locking Holes

3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS20 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS30 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS40 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS40-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS50 11 27.5 49.5 90 152.3 71 60 108 70 3.2 4 22 1

AIR SLIDE TABLE

Solid state switch A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20 14 14 21 21 27 46 46 MXQ20(A) 32.2 21.2 21.2 21.2

KS/KX

5.0 3.5 5.0 8 12 24 14 12.8 23 17 6 25.5 26.5 1 8 1 4 17 23 23 29 38 56 64 82 76 93 14 8.6 8.6 4 K 26 26.5 29.5 31 34 35 38 36.5 39.5 30 31 32 37.5 38 39.5 40.5 42 1 8 Applicable tubing M 17 15.2 26 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 8 17 21.6 14.9 Connection thread H 10 22 18.5 31.5 21 22 30.5 25.0 7 D 24 24 20.9 34 22 8 12 35.1 35.1 MS Reference dimensions after R thread installation

Vacuum Gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

Vacuum Gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0