Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Rotary Actuator NCRA1 Series Single Rack and Pinion

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Delivery Pressure: R [100 to 1000 psig (0.7 to 60 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: Q [10000 psig (70 MPa)], Gauge Port, Outlet: Q [10000 psig (70 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®, Standard

Delivery Pressure: R [100 to 1000 psig (0.7 to 60 MPa)], Relieving: 1 (Self-relieving, Standard), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: Q [10000 psig (70 MPa)], Gauge Port, Outlet: Q [10000 psig (70 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material:

AMX-OM-F005-C

LX2007. 10 SYM BO L J K L M N o P Q R S T U Year 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 2016 SYM BO L o P Q R S T U V W X y Z M ont h J an Feb M ar Apr M ay J un J ul Aug Sep O ct N ov D ec 4-

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5 x 0.8 14 12.5 21.5 19

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Digital Flow Switch ( compatible)

OUT1 OUT2 [3 step setting mode] 30 Default settings 34 Simple Setting Mode 32 Function Setting [Function selection mode] 33 Default settings 34 F0 Selection of reference condition, unit selection function, switch output specifications 36 F1 Setting of OUT1 39 F2 Setting of OUT2 46 F3 Digital filter setting 52 F10 Sub screen setting 53 F14 Zero-cut setting 59 F20 Setting of external input 60

Digital Flow Switch ( compatible)

reference condition, unit selection function, switch output specifications 32 [F 1] Setting of OUT1 35 [F 2] Setting of OUT2 42 [F 3] Digital filter setting 48 [F10] Sub screen setting 49 [F14] Zero-cut setting 55 [F20] Setting of external input 56 [F22] Analogue output setting 57 [F30] Accumulated flow value hold setting 58 [F80] Display OFF mode setting 59 [F81] Setting of security code 60

HEC-OM-Y008

Mar Q yQ ZQ AQ BQ CQ DQ .

Multi-channel Digital Sensor Monitor

[F90] Setting of all functions completed : Setting of each function Every time the SET button is pressed, the display moves to the next function in order of "Setting of each function" on page 60. Set by using the UP and DOWN buttons.

MGZ Series

Minimum strokes for mounting of auto switches 40 50 63 Number of auto switches mounted Auto switch type Auto switch models 60 2 pcs. (same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs.

Air Filter

Dimensions (Port size) Semi-standard specifications With element service indicator Clearance for maintenance Optional specifications With auto Standard specifications Model Bracket mount drain P A B C D E G J M N Q R S T U V B AF20-D 1/8, 1/4 40 87.6 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 104.9 AF30-D 1/4, 3/8 53 115.4 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 157.1 AF40-D 1/4, 3/8

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

N Nil Rc 3 1 0 14 to 60 l/min 20 to 1500 l/min 36 to 2600 l/min NPT Specifications Water/Non corrosive liquid Copper alloy Fluid Stainless steel 304 Liquid, which do not corrode stainless steel 304. Max. pressure 1 MPa 1.75 MPa Water resistance Insulation resistance 100 M (500 DC by megameter) 1500 VAC for one min.

Process Pump

Reference service life (days) = A (reference number of cycles in service life) Operating frequency of solenoid valve (Hz) x Operating time per day (hour) x 60 (min) x 60 (sec) 3. Compressed air with low dew point Using super dry air as the fluid may affect the reliability (service life) of the equipment, because the lubrication characteristics inside the equipment will deteriorate.

Table of Contents - Tubing

How to Use Caution q The multiple tube holder can be cut apart according to the number of tube to be connected.

In-line Air Filter

5 (Filtration efficiency 95%) 0.1 (Vacuum pressure 20 kPa) Operating and ambient temperature range C Filtration m 0.0 0 10 20 30 40 50 60 Operating temperature [C] Element replacement differential pressure MPa Filtration area mm2 1260 750 Applicable tubing material Weight g Internal capacity cm3 Nylon, Soft nylon, Polyurethane 25.0 7.0 79.7 23.6 27.3 20.0 6.0 68.4 10.5 4.5 53.9 19.0 23.0

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Electrical entry MO: M-type plug connector without connector M: M-type plug connector with lead wire L: L-type plug connector with lead wire G: Grommet (DC specification) LO: L-type plug connector without connector With light/ surge voltage suppressor With

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Note) For applicable one-touch fitting and silencer models for this valve series, refer to page 978. Caution Use standard (DC) specification for continuous duty. 913