5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x

SY

SS5Y5-M45Stations B Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations Order made Manifold spec. sheets 188 Order Made Specifications SY5000/7000/9000/SY500 DIN Connector (DIN 43650C Standard) DIN connector type with conformity

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-140 P.1.10-144 VFS C C3 (3.2) C4 (4) M5 (M5 thread) VS C6 (6) kit VS7 N1 (1/8) N3 (5/32) N7 (1/4) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) kit N1 (1/8) N3 (5/32) N7 (1/4) N9 (5/16) Built-in silencer P.1.10-178 P.1.10-182 P.1.10-186 Terminal block 1.10-115 Cylinder Speed Chart Series VQ0 Cylinder

Enclosure: W (IP67), SI Unit: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: +COM, Stations: 2 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 3 (for 3 Stations; Longer Rail than Total Length of Specified Valve Stations)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 10 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 10 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 14 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 16 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 8 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Enclosure: W (IP67), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: +COM, Stations: 6 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting: D0 (DIN Rail Mount w/o DIN Rail)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 2 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 4 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 10 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

Stations: 10 Stations, SUP/EXH Block Mounting: D (D Side 2~10 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: 0 (w/o SI Unit), Stations: 12 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)

SI Unit: 0 (w/o SI Unit), Stations: 6 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail)