Solid State Vacuum Regulator

1.0 100 80 60 40 20 50 100 150 VAC side pressure (supply pressure) (kPa) Flow rate (l/min) (ANR) SMC Pneumatics, Inc.

ALB900

To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no. A 3 4 , 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 1 1 3 4 ALBA90-10 ALBA90-20 14-13-19

Soft Start-up Valve AV2000/3000/4000/5000 1

Voltage AC and 100 VDC 24 VDC or less Terminal no. 1 + () With indicator light With indicator light Terminal no. 1 (+) F.R.L.

VCS

Thread type Rc NPT G Nil N F OUT(2) 1 IN(1) Port size Voltage Port size 1/8 (6A) Class 3 Class 2 Class 4 Symbol 01 02 03 04 06 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Please consult with SMC regarding other voltages.

MRQ

MRQ Mass Rotating angle Size Basic mass (g) Flange (g) Add'l stroke mass (g/mm) 80 to 100 1400 500 4 32 170 to 190 1500 80 to 100 2100 40 500 5 2300 170 to 190 Calculation: (Example) MRQBS32-50CA Basic mass 1400 g 4 x 50 = 200 g Stroke additional mass Total 1600 g For the mass of auto switch alone, refer to pages 767 to 809.

2-Layer Soft Fluoropolymer Tubing Series TQ

Fix one end and bend the loop gradually at 100 mm/min. Measure 2R when the tube breaks or is crushed.

AWM20 to AWM40

0 0 100 200 150 300 0 0 500 1000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AWD20 Rc 1/4 AWD30 Rc 3/8 AWD40 Rc 1/2 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 100 200 300 400 500 0 0 50 100 0 0 100 200 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/

AWM20 to AWM40

0 0 100 200 150 300 0 0 500 1000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AWD20 Rc 1/4 AWD30 Rc 3/8 AWD40 Rc 1/2 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 100 200 300 400 500 0 0 50 100 0 0 100 200 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

HRX-OM-R026

Table 8-1 Quality standard for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Thermoelectric Bath

Signal contents HEBC002-WA10 RS-485 T/R (A) RS-485 T/R (B) Unused Unused Unused Unused HEBC002-WB10 Unused RS-232C RX RS-232C TX Unused RS-232C SG Unused AWG14 Male connector 1 2 3 4 5 6-9 Signal contents 100 to 240 VAC (L) 100 to 240 VAC (N) PE Male connector Hirose Electric Co., Ltd.: CDA-15P Holding screw M2.6 Black 1 Black 2 Nanaboshi Electric Mfg. Co., Ltd.

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available for special order upon request.

WRF100

110 107 Note 3) 2 x 4 x M10 x 1.5 depth 12 70 0 2 x 2 x 8H7( ) depth 12 0.015 1 193 25 52 380 (58.7) 95 133 70 0.05 (70) 85 75 270 0.3 (173) Rc1/ 4 (10) 100 100 Unclamp side port (30.2) (30.2) 306 139 360 Limit switch Note 1) Rc1/ 4 Clamp side port 0 4 x 8H7( ) through 0.015 82 0.05 143 115 50 4 x 14 through 320 330 0.05 (mm) A B C 200 Arm type S200 S240 340 29 240 360 19 Note 1) This product

EX600-WEN_WSV.eng

Link, No Activity (100 Mbps) Communication status of EtherNet/IPTM ports 1 and 2 Green LED flashes. Link, Activity (100 Mbps) (2) Set the number of occupied I/O points for the module and each parameter of the "base". : Different from the I/O points of the whole system. LINK/ACT1 ROMANIA (40) 213205111 Orange LED is ON.

Digital Flow Switch (Integrated display type)

Part number Description Remarks Weight ZS-37-A Lead wire with connector (Straight) Length: 3 m 100 g ZS-37-B Lead wire with connector (Right angle) Length: 3 m 100 g -10No.PF-OMG0010-H Summary of Product parts Body Connector pin numbers (On the product) 1 DC(+) 2 Analogue output 3 DC(-) 4 OUT1 Item Description Monitor part See below.

4-channel Flow Monitor (Remote type monitor unit)

PF2A20 series 1 to 5 to 10 L/min type (PF2A510) 50 L/min type (PF2A550) [10L]: [50L]: [11L]: [21L]: [51L]: 10 to 20 to 50 to 100 L/min type (PF2A511) 200 L/min type (PF2A521) 500 L/min type (PF2A551) PF2W20 series 0.5 to 4 L/min type (PF2W504) (PF3W504) [04L]: [20L]: [40L]: [11L]: 2 to 5 to 16 L/min type (PF2W520) (PF3W520) 40 L/min type (PF2W540) (PF3W540) 10 to 100 L/min type (PF2W511)

HRX-OM-W038

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HRX-OM-O021

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

HEC-OM-Y008

Read this manual before using the product, to ensure correct handling, 300 300 The production serial number code printed on the label indicates the year and month of production as per the following table: 200 200 Ambient temp. 35 deg.C After shutting down the power supply, ensure a time interval at least and read the manuals of related apparatus before use. 100 Ambient temp. 35 deg.C 100