Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

VCHC ASR ASQ ASD230F ASD330F ASD430F 100 200 400 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 07,08,09,10,11 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 12 10,11 10,11,12 08,09 1000 500 06,07 500 0 5 10 0 5 10

CRQ2

plated 20, 30, 40 with cushion Steel wire Hexagon nut with flange Cushion valve assembly 25 11 26 Cushion pad Elastic material 10, 15 Zinc chromated Steel wire Round head No. 0 Phillips screw 12 10, 15 nickel plated 13 Round head No. 0 Phillips screw Steel wire 20, 30, 40 nickel plated Round head Phillips screw Replacement parts Kit number 10 15 20 30 40 Contents Description P473010-1 P473020

Large Size Vacuum Module: Series ZR

ZS-10-5A-50 . 1 pc.

NCA1

Please See Below for How to Order Piston Rod Assembly 7 Rod Bushing Bronze casting Available only as an Assembly Please See Rod/Head Cover NC1A400-10-124 NC1A200-10-124 NC1A250-10-124 NC1A325-10-124 8 Cushion Valve Carbon steel NC1A150-10-124 9 Tie Rod Carbon steel Please See Below for How to Order Tie Rod NCA325-13-Q6311 5008-131 NCA325-31-Q6311 NCA200-13-Q6309 5008-93 NCA250-13-Q6309 5008

RZQ

Confirm the internal stopper strength at extension and retraction ends in the graph on page 10-10-8.

Digital pressure switch for energy-saving control ejector

Normal output Pressure setting Sets the ON or OFF point of the switch output. -70 kPa(P_1) Hysteresis Set the hysteresis to prevent chattering. 10 kPa(H_1) [F 2] Setting of OUT2 Refer to page 25 Same setting as [F 1] OUT1.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Fig.1-3 shows the location of the communication port. 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 1 14 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 Fig.1-3 Communication port 1.3 Communication port HRL Series 1-4 HRX-OM-W069 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

Digital Pressure Switch

We show the temperature characteristics for 0 to 50[oC] or -5 to 50[oC] based on data at 25[oC]. Ex.)

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Direct Solenoid

Mtrual opralor assmbly $llh Odng PA0@1 PBO{01 I 1 Raplacdr3nl coll only-4.C. sol6nold 1Al0 aot@ 1O/@ cl2A{9 cl2A-10 cl2A.1t 10 I Sol6noi, aBsmbly-4,C. conplst wllh coll, 120/ao 24(m0 a0,t0 @14O9 @ta-10 cora-1t At2A{9 412A,10 1 l '| NXT01010 NXT0307.3 12 1 NXTO1G12 NXTO1G12 13 @t|vo scr6w .nd locl wa5hsr xTt)10-21 xT010.21 DIRECTIONAL AIR YALVE MANIFOLD ASSEMBLY SERIES NVS 3115, 3125 NVS 3135

Digital pressure switch for energy-saving control ejector

Normal output Pressure setting Sets the ON or OFF point of the switch output. -70 kPa(P_1) Hysteresis Set the hysteresis to prevent chattering. 10 kPa(H_1) [F 2] Setting of OUT2 Refer to page 25 Same setting as [F 1] OUT1.

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46

CEx-OMI0064

Bit3 22 D15 10 1 Bit3 4 D3 10 Bit0 23 D16 10 2 Bit0 5 D4 10 Bit1 24 D17 10 2 Bit1 6 D5 10 Bit2 25 D18 10 2 Bit2 7 D6 10 Bit3 26 D19 10 2 Bit3 8 D7 10 Bit0 27 D20 10 3 Bit0 9 D8 10 Bit1 28 D21 10 3 Bit1 10 D9 10 Bit2 29 D22 10 3 Bit2 11 D10 10 Bit3 30 D23 10 3 Bit3 12 D11 10 13 (+/-) 31 N.C. 14 DATA VALID 32 N.C. 15 N.C. 33 N.C. 16 COM 34 COM 17 N.C. 35 N.C. 18 COM

Digital Flow Switch (Integrated display type)

Display Display part 5 digits, 7-segments, Colour display: Red Indicator LED (output) LED is ON when output is ON Supply voltage 24 VDC 10% Power consumption (no load) 150 mA or less Enclosure IP65 Operating temperature range Operation: 0 to 50 C, Storage: -25 to 85 C (no freezing or condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H.

MGP-OM0242Q

Minimum mountable stroke for a cylinder with auto switch(es) (mm) Auto switch model Number of auto sw itches 12 16 20 25 32 40 50 63 1pc. D-M9 5Note1) 5 2pcs. 10Note1) 10 1pc. D-M9W 5Note2) 2pcs. 10Note2) 10 1pc. D-A9 5Note1) 5 2pcs. 10Note1) 10 Note1)Confirm that it is possible to secure the minimum bending radius of 10mm of the auto switch lead wirebefore use.

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

VXF

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

Series AK1000

volume Mass 4500 psig (30.7 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 1 x 10-10 Pam3/sec NPT female, Compression 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.4 lbs (1.09 kg) 3) 1) Max 300 psig (2.1 MPa) for PTFE seat. 2) 14 to 194F (10 to 90C) for Vespel and PEEK

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40