REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

HEC-OM-S008

] :01 06 0050 0 A9 [CR][LF] Stop 0050 Control operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

Rotary One-touch Fittings Manifold Series KM

D2 L1 L2 L3 P Q1 Q2 A MB MA tube O.D.

Series KC Self-seal Fittings

L4 Weight (g) A L3 L1 L2 D1 D2 D3 Part No.

Short Stroke Electric Actuator Series LX

) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BC Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 G 28 58 5H9 +0.030 0 depth 5 (5.5)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

Rated Flow Range: 0.5 to 50 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: Rc1/8, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input, Lead Wire: Lead Wire w/Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: Compatible with Argon and Carbon Dioxide Mixed

ZP

(for Heavy-duty) Buffer assembly model Applicable pad model Series ZP Page ZP40H ZP50H ZP40HB ZP50HB P. 80 P. 81 ZPB-T1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 80 P. 81 ZPB-T2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB P. 80 P. 81 ZPB-T3 (J/JB/JF)01 ZP40H ZP50H ZP40HB ZP50HB P. 82 P. 83 ZPB-X1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 82 P. 83 ZPB-X2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB

S Couplers Series KKA

-1 KKA6P-06M-1 R3 / 4 R3 / 4 W ithout check valve / Female thread W ithout check valve / Female thread Part No.

Vacuum Pad: Ball Joint Type

Adapter z c Pad x W Pad W Horizontal lifting Vertical lifting This type of application should basically be avoided. 726

IDX-OM-U022

B V IDFA100F V IDFA125F V IDFA150F B IDFA100F150F 1 4 1.3 IDX-OM-U022 1. 3.7 5.2 (IDFA100F, 125F) R OFF 5.2 L1 L2 L3 1,2 3,4 5,6 M5 9.5mm 3.5mm 2 1 3 2 4 5 6 M3 6.5mm 1.25mm 2 L1,L2,L3 PE: L2 L3 PE L1 M4 9.5mm 5.5mm 2 IDFA100F150F 1 5 1.3 IDX-OM-U022 1. 5.2 3.7 5.2 (IDFA150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 L1,L2,L3 PE: L2 L3 PE L1 1,2 3,4 5,6 1 3 2 4 5 6

ZSE2/ISE2

ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

NVZseies

-l-rormaV open 'Consult lactory ior availability 'Body Optio.l a Port Size OIT:With/8NPTF O2T:W|Ih%NPTF subDlate subolate -,*^w'" w For type 4031,41R manifold -:lndividual pilot exhaust (Std.)

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

S Couplers Series KKH

10.9 19 25.4 1/4 KKH4S-03F 54.8 51.1 R3/8 47.5 42.7 14.4 Nut fitting type (for urethane hose with fiber reinforcement) Applicable hose H2 H1 D M L1 L2 (mm) Applicable hose I.D.

IDX-OM-U021

L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 5 IDX-OM-U021 1 3.6 5.2 5.2 (IDF150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm 5.5mm 2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 6 IDX-OM-U021 2 2 2-1 45 45 45 2-1 IDF100150F 2 1 IDX-OM-U021 2 2-

IDX-OM-W029

IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ON/OFF 3 3 5 ( ) 11-1 IDU Series 11 1 IDX-OM-W029 11 T 11-4 1) 2) 3) 4) 1 2 3 PE L.N: PE: L2 1 2 3 PE L3 L1 LN Alarm Running LN PE PE:Ground LN L1,L2,L3: PE PE M3 6.5mm 2 :1.25mm :17 11-5 3 5-2 IDU55E/75E-23 11-4 IDU Series 11 2 IDX-OM-W029 11 T 11-6 IDU22E-23-T IDU37E-23-T GFCI For Option R GFCI R Operation