EX510-GMJ1.eng

Safety Instructions 2 Product Summary 6 Name of Parts/ Accessories 7 Dimensions 8 Settings 9 Specifications 11 Wiring 12 Display/ Switch Setting 19 Troubleshooting 23 OPERATOR This operation manual has been written for those who have knowledge of machinery and apparatuses that use fieldbus system and have full knowledge of assembly, operation and maintenance of such equipment.

EXxx-OMZ0016

circuit of US1 or US2 6 or 7 2 Detection of the range upper limit 3 3 Detection of the range lower limit 2 System diagnostic 1 6 Detection of unconnected load 5 7 User setting upper limit detection 1 8 User setting lower level detection 0 9 Detection of the upper limit of the ON/OFF cycles 4 16 Detection of US1 power supply voltage drop 9 17 Detection of US2 power supply voltage drop 8 19

EXxx-OMV0017-D

Setting of the wireless unit system . 18 3.1 Flow of setting operation . 18 3.2 Reading and obtaining device information . 19 3.2.1 Entry of individual identification (Edit TAG) . 20 3.3 Remote setting . 21 3.4 Base setting . 23 3.5 Pairing . 29 3.5.1 Pairing procedure . 30 3.6 Dummy Remote . 35 3.7 Software Control . 36 3.8 Using a setting file . 38 3.9 Reading of factory data . 42 3.10

Air Cylinder/Low Friction Type: Non-lube Type Series CS1Q

Grease pack part no.: GR-L-020 (20 g) Piston seal 19, 24 and 26 are non-replaceable parts, so they are not included in the seal kit. NBR Valve seal Tube gasket Piston gasket Retaining plate gasket Guide gasket It is used only in the case of w/ cushion type. 45

Air Cylinder/Double Rod

8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.

Smooth Cylinder

8 19 @0 21 Without cushion Consists of component part numbers !6, !8, and @0. Rod seal NBR CS2Y140A-PS Cushion seal Urethane 19 and 21 are non-replaceable parts, so they are not included in the seal kit. CS2Y160A-PS Piston seal NBR CS2Y125AA-PS 125 140 160 CS2Y125AA-PS CS2Y140AA-PS CS2Y160AA-PS With single-side cushion Consists of component part numbers !6, !7 (two), !8, and @0.

Double Power Cylinder/Without Non-rotating Mechanism Series MGZR

6 17 Rod seal A MGZ25-PS Rod seal B 17, 18, 19 and 20 are non-replaceable parts, so they are not included in the seal kit. MGZ32-PS Piston seal 18 MGZ40-PS Set of left nos. !6, @1 NBR Piston gasket 19 MGZ50-PS MGZ63-PS MGZ80-PS Tube rod gasket 20 @1 Cylinder tube gasket Seal kits consist of items !

Air Preparation Equipment

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

4

0.28 0.089 0.34 0.22 0.082 0.36 0.28 0.091 0.34 0.18 0.080 0.15 kg 0.30 0.18 0.070 0.30 0.15 0.072 0.32 0.20 0.075 0.30 0.15 0.069 5 Series VT307 Dimensions: Common Exhaust VV307-01-2-01-F P R P R 56.7 G: 300 H: 600 50.6 Applicable cable O.D. 6 to 8 DIN terminal (D, DZ) Pg9 Grommet (G, H) Manual override (Non-locking) For 4 x M4 (For mounting) 83 111 29 4.6 43.5 39.3 26.7 21.6 38 20 9 1 19

Title not found

.: 19 (NPT threads: 3/4 inch) B Width across flats 19 OUT Purge air for dehumidification IDG 30, 50, 60, 75, 100 Dimensions (mm) A IDG3, 5, 10, 20 A IN IDG1 Series IDG Series IDG Comes with pre-filter as detailed left + regulator AR. Weight Bracket Weight Bracket Weight Bracket BM65 BM64 BM65 BM59 BM61 BM63 BM64 BM65 1.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

Clean Rodless Cylinder Series CYP

19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position "Nil".

Turntable Cylinder Series MGT

16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24

Low Friction Cylinders Metal Seal Type

Series Bore size (mm) Operating pressure range (MPa) Actuation speed (mm/s) MQML Standard type 6(Standard only) 10 16 20 25 6: 0.02 to 0.7 10 to 25: 0.005 to 0.7 0.5 to 1000 5 to 3000 MQMLH High speed/frequency 0.01 to 0.7 NEW NEW Low Friction Cylinder (Single Acting) Series MQP Bore size (mm) 4 6 10 16 20 Operating pressure range (MPa) Thrust control standard (N) Series 0.01 to 8 0.03 to 19

Rotary Gripper Series MRHQ

Side B Scale: 45% 10 Rotary Gripper Series MRHQ Dimensions (mm) 1in = 25.4mm Scale: 50% MRHQ20 A B 48 59 78 38.5 4-M6 x 1 Depth 10 0 0.074 54h9 26.3 opened + 2.2 0.2 8 0 0.1 M5 x 0.8 0 0.05 10 16.3 closed 0 0.7 4-M4 x 0.7 Finger closing port (mounting screw attachment ) 5 24.5 9 Max. 9.2 51 4-M6x1 Depth 9 (two on opposite side) M5 x 0.8 Finger opening port 3-R2.5 24 3.4 62 16.5 27 19

Parallel Type Air Gripper Series MHZ

14 Aluminum alloy C type snap ring Piston Brass Electroless nickel plated 2 15 Stainless steel Exhaust plug Lever Heat treated Polyvinyl formal 3 16 Stainless steel Exhaust filter Guide Heat treated Stainless steel spring wire 4 17 Stainless steel N.O. spring Finger Heat treated Stainless steel spring wire 5 18 Stainless steel N.C. spring Roller stopper Electroless nickel plated Brass 6 19

Low Profile Air Gripper Series MHF2

Height: A Bore 8 12 16 20 Dimension A (mm) 19 25 33 41 MHZ2-16 Series MHF2 Holding force and stroke can be selected to suit the work piece.

Modular Type Regulator Series AR

176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18 25 26 31 35.5 37 T 18.5 28.5 32.5 38.5 42.5 42.5 U 14 16 19

End Lock Cylinder Series CBJ2

2-M5 x 0.8 20 M5 x 0.8 20.3 6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19