VNH

8(10A), 1/2(15A) 3/4(20A), 1(25A) Smooth valve operation 3.5 MPa 3 Port LVQ Reduced valve switching resistance due to balance structure 2 port (Large flow type) 3/8(10A), 1/2(15A) 3/4(20A), 1(25A) 3 Port 7.0 MPa LQ 3(B) port LVN Application Example TI/ TIL Ex. 1) 3 port valve: Reducing load to pump Ex.1) 2 port valve: Nozzle ON/OFF 3 port valve (3.5 MPa, 7.0 MPa) 2 port valve (7.0 MPa) VNH

OMS0020

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

12.5 10 3.5 AS2001F-03-3 AS2001F-06-3 44.8 6.3 21.8 49.1 43.6 13.5 5/32" 9.3 40.7 5.2 20.7 48 42.5 12.7 11.6 6 AS2001F-05-3 AS2051F-06-3 12.5 53.2 6.7 25.7 53.5 48.1 17 3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16"

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

8 Note) 3/16", 3/8" and 1/2" are made of stainless steel 303.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

12.5 10 3.5 AS2001F-03-3 AS2001F-06-3 44.8 6.3 21.8 49.1 43.6 13.5 5/32" 9.3 40.7 5.2 20.7 48 42.5 12.7 11.6 6 AS2001F-05-3 AS2051F-06-3 12.5 53.2 6.7 25.7 53.5 48.1 17 3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16"

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

130 178 209 268 3 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal Series XMC, XYC How to Order XMC XYC M9N A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4 7 2.

S Couplers

Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Speed Controller with Uni One-touch Fitting AS Series

2 q o !7 r !3 o r !0 w u t y !2 !3 !1 q i !4 e Meter-in type Meter-in type Component Parts: Elbow Type Component Parts: Universal Type No. Description Material Note Body A Handle Body B Needle Needle guide Seat ring No.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Note 3) Locking type is optional specification.

Compact and Lightweight

(When using the 3 port valve, seal the R port of the release valve.) Supply valve (3 port valve) + Variable throttle + Suction filter Ex. 2 Supply/Release valve (5 port valve with 3-position) + Variable throttle Ex. 5 3 port valve 5 port valve with 3-position closed center Silencer 3 port valve is used to generate and release the vacuum.

VVXA21/22

# " $ < " $ /3 1 !" Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"

3 Position Cylinder Series RZQ

(2-color indication) 2-wire (Non-polar) RHC 3-wire (NPN Equiv.)

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

25

X16 Liquid contact seals SF7000 (Perfluoropolyether rubber) 1 3 01 X16 PB101 A Actuation Symbol 3 Actuation Air operated X16 Made to Order Liquid contact seals SF7000 Thread type Option Symbol Type Rc NPT G Symbol Nil B Option None With foot Nil N F q With bracket which can be mounted to the back of the previous type e C With bracket which can be mounted to the foot at the back of the previous

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Escapements Series MIW/MIS

7 q y r !3 !2 t o w e !0 !5 !6 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) Description Material Note Component parts Description Material Note No. No.