MRQB-OM0002

[mm] 40 170190 41(41.5) 41.5 80190 31.5(32) 32 ( ) : D-A72A7HA80H 25 7. 7. 7. 7. 7.1 7.2 (7.1)A A ON A B A OFFB ON (7.2)A A ON A B A OFFB ON 26 8. 8. 8. 8. 8-1

Air preparation filter

Dimensions H Bracket K L N M D Auto drain (MAX1.6MPa) C I Bracket (accessory) () P E A F J B 1/4 1/4 female Maintenance G OUT IN Drain space Drain guide A A 3/8 female 3/8 G Maintenance Drain space Thread type Rc, G: 10 NPT: 3/8 Rc,G10 NPT3/8" Maintenance space Drain G Auto drain (MAX1.0MPa) Auto drain (MAX1.6MPa) Drain guide B C D E F G Model Port size A AFF,AM,AMD 70D 11 1/2

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

AFF

X17 P.69 Port size X26 P.70 Symbol Size 2C Applicable body size Accessory Option 3 4C 8C 11C 22C Symbol Nil Description Symbol Nil Description 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 B Bracket 2 Rubber material: Fluororubber For medium air pressure (1.6 MPa) Drain guide 1/4 female threaded 4 F H J R S U T V 2 Bracket is included, (but not assembled).

IDX-OM-W038

(B ) N.O.

Series H, DL, L, LL Self-align Fittings

Female union Plug P. 104 DHF Use to pipe from male threaded portion such as pressure gauge. P. 106 DP Use to plug unused fitting Branch tee P. 105 DT Use to branch line from female thread of both sides 90 direction. Swivel elbow P. 106 L Use to pipe at right angle to female thread portion. Swiveled at any direction.

Dedicated Controller Series LC1 Uniaxial Type

input No., State (P-No.) label C-AND OR input time out subroutine call command General-purpose input No., State (P-No.) label C-OR AND input condition jump command General-purpose input No., State (P-No.) label J-AND Condition jump OR input condition jump command General-purpose input No., State (P-No.) label J-OR Program Control Commands Parameter value Mnemonic Classification Function

Self-seal Fittings Series KC

P. 76 KCT Use to branch connection of tubes of both side 90 direction. P. 78 KCL Union Y P. 76 KCU Use to branch connection of tubes in the same direction. 2 branched ports has a self-seal function. Check adaptor P. 77 KCJ Use to add the self-seal mechanism to a usual one-touch fittings, Series KQ. Bulkhead union P. 77 KCE Use to junction connection of tubes for installation of panel.

MGF

+ Stroke Dimensions (mm) A B GB Bore size 40 63 100 58 48.5 36.5 GB 73 61.5 38 78 66.5 38 Dimensions not listed above are the same as the standard model.

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

How to determine the auto switch installation position MHZ2 Step 2) Insert auto switch into the switch installation groove from direction B. "Set up as directed with power connected under no pressure or low pressure." A B MHZJ2 MHQ Step 3) Slide the auto switch in the direction of the arrow until the light illuminates.

DM

Barb cassette creeps into the direction D and the tube will be clamped at the B clamp portion (5) consisting of barb (3) and case.

Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B 12.6 (0.7) A/BR 12.6 (0.7) A, B port piping specifications SY3000 SY5000 SY3000 Operating pressure range External pilot operating pressure range MPa 2 position single Pilot pressure range 2 position double 0.25 to 0.7 Port size 3 position A/B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 SY5000 2 position single, double 3 position Max. operating

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Standard M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 10-V14: 13(27) 10-V14A: 16(30) 10-V14: 12(26) 10-V14A: 15(29) Large flow capacity Standard 10-V124A Note 1) Large flow capacity Valve model 12 [32 Note 3)] Flow characteristics 23 [21 Note 3)] b b Cv Cv C[dm3/(sbar)] 0.054 0.099 0.037 0.076 C[dm3/(sbar)] 0.037 0.076 0.054 0.099 10-V114 10-V114A 10-V124 Note 1) 0.008 0.016 0.015 0.024 0.015 0.024

IDX-OM-W037

Generally, control becomes unstable if P is too small. Response becomes slow if P is too large. [Example] For setting P=10.0%, I=100sec., D=20sec. Display Operation procedure . 1. Make sure that the screen shows PV/SV display. PV SV 2. Press and hold the SEL key to switch to CH1 (PID control parameters). PV 3. Press and hold the SEL key. SV P (Proportion band) is displayed. 4.

VZA200/400

(Value in the initial stage) Model Flow characteristics (2) Type of actuation Port size Pilot port size b Cv b Cv Valve model Pilot C C Body ported Body ported Base mounted VZA212-P-M5 0.13 0.35 0.52 0.15 0.43 0.60 N.C. M5 x 0.8 M5 x 0.8 Body side VZA222-P-M5 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 M5 x 0.8 Body side VZA214-1P-01 0.22 0.35 0.85 0.25 0.30 1.0 N.C.

Fieldbus system Ethernet POWERLINK compatible SI unit

code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m, SPEEDCON compatible PCA-1564969: Cable with M12 connector, B code, Socket, Right angle 6 m, SPEEDCON compatible (8)Ethernet communication cable PCA-1446566: Cable with M12 connector,

High Vacuum L Type Valve

Step 6 Bolt b 3 Tightening torque of bolt b Nm 1 2 Valve Tightening 4 size torque Handle assembly XLH-16 0.7 -25 1.5 -40 2.5 -50 6 Tightening torque of bolt a Nm Bolt a Valve Tightening size torque Body All sizes 0.3 Cover Heater Tighten Bolt b in numerical order to assemble the Body and the Handle assembly with the valve opened a little in numerical order.

IDX-OM-W093

E D G F C P J M N O L K H mm A B C D E F G H J K L M N O P IDF60 R1 307 745 605 161 405 681 71 330 704 355 126 46 12. 94 5 IDF70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDF80 R2 438 957 863 169 480 958 219 78 100 11. 0 463 916 485 170 IDF90 13 IDF80 IDF90 mm IDF60 745 957 () () 704 916 () 355 () 330 485 463 IDF70 890 849 () 390 365 IDF60/70/80/90 Series 7-3 IDX-OM-W093 7.4

SY3000-OMH0002

IP65 30N 2) IP65 (V100-49-11) 0.1mm 2) 0.1mm 3) +0.15mm -0.2mm SY3000 M2 0.16Nm SY5000 M3 0.8Nm SY7000 M4 1.4Nm SY9000 M3 0.8Nm 13 No.SY3000-OMH0002 SY series 1) P 2) P 3) (2 ) 1 0.5MP 4) 5) AB (P AB )0.25MPa (PB PA)(Cv ) 14 No.SY3000-OMH0002 () (E) () () (PE) 15 No.SY3000-OMH0002 No. 1(ISO VG 32) (R) E 16 No.SY3000-OMH0002