High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

LJ1H

-032 A1 A2 B1 B2 200 L2 Not required.

Electric Actuator

LECSB1/LECSC1/LECSS1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2/LECSC2/LECSS2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Do not connect. L1 Main circuit power supply L2 L2 L3 L3 N P1 P2 N Connect between P1 and P2. (Connected at time of shipping.)

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 46 Non-standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101NB(X10) Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread

Basic type / Direct mount type Series CY3B/CY3R

Me max is the allowable moment. cDynamic moment XVD Va Calculation Example XGT m Operating Conditions Cylinder: CYV32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of the arm section) L1 = 50 [mm] L2 = 50 [mm] CYV L2 L1 Item Load factor n Note zMaximum load mass m 1 = m/m max = 1/5 = 0.20 L2 Review m.

LG1H

600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

LX

Allowable Moment (Nm) Allowable dynamic moment Allowable static moment Pitching Rolling Yawing 4 3 4 LXF Model Load movement direction a = 1000 2000 a Mep a = 2000 L1 (mm) Pitching Rolling Yawing a = 3000 m : Transfer load (kg) L : Overhang to work piece center of gravity (mm) a : Work piece acceleration (mm/sec) Me: Dynamic moment 1000 m L1 3 0 1 2 Transfer load m (kg) a = 1000 300 L2 (mm

Step Motor Controller

LECSB1/LECSC1/LECSS1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2/LECSC2/LECSS2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Do not connect. L1 Main circuit power supply L2 L2 L3 L3 N P1 P2 N Connect between P1 and P2. (Connected at time of shipping.)

LG1H

-032 A1 A2 B1 B2 200 L2 Not required.

Environment

L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 LER Y 400 400 400 400 Mer m LEH 200 200 200 200 LEY -X5 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 11LEFS 2000 2000 2000 2000 11LEJS Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 25AL3 Z 500 500 500 500 LEC 0

Battery-less

L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 2 4 6 8 10 12 14 0 10 20 30 40 50 0 10 20 30 40 50 60 0 5 10 15 20 25 30 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mep 1500 1500 1500 1500 L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 L3 Z 500 500 500 500 0 0 0 0 0 5 10 15 20 25 30 0 2 4 6 8 10

Electric Actuator

LECSB1/LECSC1/LECSS1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2/LECSC2/LECSS2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 L1 Main circuit L2 L2 power supply L3 L3 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Do not connect. N N P1 P2 Connect between P1 and P2. (Connected at time of shipping.)

Single Axis Electric Actuator Serriies LJ1S Slider Guide

20 L2 (mm) Mer m Rolling Yawing 10 L2 0 1 2 3 4 5 Mer Transfer load m (kg) m 30 a = 1000 a = 500 20 L3 (mm) a = 2000 L3 10 m Mey a 0 1 2 3 4 5 Transfer load m (kg) Refer to page 145 for deflection data. 88 Standard Motor/Horizontal Mount Specification Series LJ1S10 Dimensions/LJ1S101SC Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

As a guide, adjust it within the smaller range than the values of L2 dimension in Table (3). Turning the bottom screw is not allowed. Piston rod Table (2) MXP6 MXP10/12/16 L2 L2 L2 (mm) 10 (One side only) 10 (One side only) 9 8 8 8 8 8 Model MXP6-5C MXP6-10C MXP10-10C MXP10-20C MXP12-15C MXP12-25C MXP16-20C MXP16-30C Damage is not allowed. 3.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

E B1 B2 B3 L1 TG1 T l1 (Min.) l2 FL H (Max.) d1 d2 d3 CN SR (Max.)

Stainless Steel 316

Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

E B1 B2 B3 L1 TG1 T l1 (Min.) l2 FL H (Max.) d1 d2 d3 CN SR (Max.)

2 Phase Stepper Motor/Without Motor Brake Series LXS

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through Refer to Cross section C-C, bottom view.

Compact

200 200 200 200 L2 [mm] L2 [mm] L2 [mm] L2 [mm] m Y 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 400 400 400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load

15

Width across flats B1 MM [mm] Size B1 C1 H1 L1 L2 MM 25 22 20.5 8 36 23.5 M14 x 1.5 32 22 20.5 8 40 23.5 M14 x 1.5 63 27 26 11 72.4 39 M18 x 1.5 L1 L2 C1 H1 * The L1 measurement is when the unit is at the retracted stroke end position.