REA/REB

F2 D 1.6 x ---P F3 D 1.6 x ---P F1 D 1.6 x ---P WB Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable Driving Force (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos + sin) Inclined (For vertical operation, refer to page 10-2-18.)

Aluminum High Vacuum Angle Valve

magnet) Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-7 1.3 x 10-9 (FKM) None A B C Note 1) Standard lead wire length is 0.5 m.

CL

1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41 167 24 29 24 75 3.2 55 213 7

3 Port Solenoid Valve Series SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 one-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" one-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

MGP

MX 4-NN depth NL XX section Z WA 4-OB counter bore depth OL 4-MM depth ML L HA HA : T slot for hexagon socket head cap screw MXU MXS MXQ X 0.02 MXF X 0.02 DA VB VA X X T H U MXW PW MXP MG DB MGP PB GC PXAH7 depth XL PXAH7 depth XL 2-P (Plug) Q J K GA GB S MGQ G FB 2-P PA+Stroke FA C+Stroke MGG E B+Stroke A+Stroke MGC *Intermediate strokes, except standard stroke, can be manufactured by using

5 Port Air Operated Valve

) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (

Intrinsically Safe Valve

0.8 (Pilot EXH port) Manual override 4 x 4.5 (Mounting hole) 125.6 42.2 EB P EA A A A A X PE 26.6 26 21 21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n x 1/4" {A(4), B(2) port} (Pitch) P = 19 24 L-type plug connector

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions

Model Selection 1

Density 100 ppm or less Ozone x x x x x Gas Parachloroetylene Phenol Phosphoric acid Picric acid aqueous solution Potassium dichromate aqueous solution Potassium chloride aqueous solution Potassium cyanide aqueous solution Potassium permanganate aqueous solution P x x x x x x x x x x x x x Liquid Crystal Liquid Crystal Solid (Crystal) Used for solvent of dry cleaning.

VQ7-6/7-8

R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 10 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

of P and R port Type 40R Applicable solenoid valve SYJ514R-SYJ524R-How to Order SS3YJ5-40R-05 -01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8

REC

9 2 NBR Cushion seal P-10AE P-12E P-16E P-18E @0 1 Resin Wear ring CM-20-07-301A CM-025-07-302A CM-032-07-304A C1A040-07-305A @1 1 NBR Piston gasket 5.79 X 1.02 6.50 X 1.0 8.50 X 1.0 10.4 X 1.0 @2 2 NBR Holder gasket 17.1 X 1.6 22.1 X 1.6 27.6 X 2.4 SO-031-4 @3 Operation Principles 1. In-rush 4.

Applicable Auto Switch Model

Refer to p.5.3-6 for the details of contact protection box. Caution -X Precautions qFix the switch with appropriate screw installed on the switch body.

7

VXD2 with port size of 04 (1/2) has threads on the bottom of the body. 2 x P Port size F L K J I (D) 2 x M4 x 0.7 Thread depth 8 18 Flat terminal C 11 U E OUT T OUT IN M 2 x P Port size J K L F I (D) (mm) Electrical entry M Model Flat terminal Conduit terminal Conduit C37, Stainless steel body Port size P A B C E F I J K L D Aluminum body T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U 49.5 (55) V U

CM2

1/8 1/8 1/8 1/4 G N1 WA P WB Q 20 20 62 107 5 116 M8 X 1.25 15 20 24 M20 X 1.5 17.5 8 13 6 8.5 23 25 25 62 111 5.5 120 M10 X 1.25 15 25 30 M26 X 1.5 17.5 8 13 6 10.5 26 32 32 64 113 5.5 122 M10 X 1.25 15 32 34.5 M26 X 1.5 17.5 8 13 6 11.5 28.5 40 40 88 143 7 154 M14 X 1.5 21.5 40 42.5 M32 X 2 21.5 11 16 8 15 32.5 With rod boot (mm) ZZ Symbol h l Stroke f e 1 to 50 1 to 50 1 to 50 Bore 51

CL

1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41 167 24 29 24 75 3.2 55 213 7

KR

M5 For soft nylon tube M5 female x M5 male Body rotates at 360 around the stud axis MS-5AU-3 For polyurethane tube 3.18, 2 x M5 P . 27 Universal tee MS-5UT M5 female x M5 female x M5 male P . 27 Body rotates at 360 around the stud axis 4, 2.5 x M5 MS-5AU-4 For soft nylon and polyurethane tube Push For reducing Rc 1/8 female to M5 female R x M5 female 1 8 6, 4 x M5 MS-5B MS-5AU-6 P . 28 P

•

Entry Vertical ~ _~ Connection Male thread Female thread Vacuum ~2~8 Ms x O.8,M6 x l M4 X O.7,MS X O.8 entry Thread 11O ~16 MS X O.8,M6 x l M5 X O.8,M6 x l ,Ys dia. 120-~32 M6 X l ,M8 x l MsxO.8,M6x I ,M8 x l .2S,Y, -140'1S0 M6 X l ,M8 x l M6 Xl,M8 x 1.25, Va Mounting Use connection for vacuum entry NBR(Black!

2/3 Port Valve

T H N P T Stainless steel H B Brass or BC6, copper X Brass or BC6, copper Polyacetal B H X Stainless steel Note 1) The option code with "" stands for non-lube treatment.

VQZ1000/2000/3000

1.6 M5 Cross section 0.34 mm2 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc 1/8 3(R2), 5(R1) port 15 16.5 16.5 15.5 15.5 33 57 7 (30.5) 2-Rc 1/8 2-M5 x 0.8 external pilot port 1(P) port 54 6.5 External pilot specifications The broken lines indicate the DIN rail mounting style [-D].