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(Use a hexagon wrench.) (3) Fit an auto switch into the auto switch mounting groove to set it roughly to the mounting position for an auto switch. (4) After confirming the detecting position, tighten up the mounting screw (M2.5) attached to an auto switch, and secure the auto switch. (5) When changing the detecting position, carry out in the state of 3.

An injury can result. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation. Otherwise malfunction can result, causing an accident. Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result.

02-07PA 1/4" 11.2 23.4 32.7 (32.8) 20 (20) AS22m1F-02-09PA 5/16" 13.2 23.9 33.2 (33.3) 14.2 20 (21) AS22m1F-02-11PA 3/8" 15.5 26.4 35.7 (35.8) 15.6 21 (22) AS32m1F-03-07PA 1/4" 3/8 21 (21.7) 7.2 20.9 30.2 (30.3) 1/4 17 (17.5) 22.6 36.6 35 29 (28.5) 27.4 (26.9) 13 13.3 38 (39) AS32m1F-03-09PA 5/16" 13.2 22.7 33.9 (34.3) 14.2 38 (40) AS32m1F-03-11PA 3/8" 15.5 26.7 37.9 (38.3) 28.2 15.6 39 (

22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) AK1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Note 5) Spare part for auto drain INA-20-41-04 is AD44-x445. Operation Principles Compressed air inlet Compressed air outlet IDU11D, 11C, 15C Humid hot air entering the air dryer is cooled in the after-cooler. It then enters the reheater to creat an initial condensation with cooled and dehumidified air.

Also, during an emergency stop or a power outage, no current will be applied to the valve, and the pressure in the cylinder will be sealed. Manual valve (Built-in base) When an emergency stop is input or a power outage lasting longer than 5 minutes occurs, the set data will be erased.

Stroke 25 36.5 5 22.5 10 14 20 10 20 10 (All dimensions but A and CL are identical to those of the basic style.)

For the auto switch mounting position and its mounting height, refer to page 69-20.

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32

1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

Bore size(mm) 12 12mm 32 32mm Port thread type Auto switch 16 16mm 40 40mm Nill M5X0.8 12,16 Nill Without auto switch 20 20mm 50 50mm Rc Solid state M9B , M9BW 20 to63 25 25mm 63 63mm TN NPT Read switch A93 TF G *The minimum stroke autoswich Mounting and operating range are the same as standerd product. 2.

In the case of adsorption on a small work piece of only a few millimeters, if an ejector is selected which has a high suction flow rate, the pressure difference when adsorbing and releasing the work piece is small. Since setting of the vacuum switch may become difficult, an appropriate ejector should be selected. 5.

20 Power supply 100-240 VAC 100-240 VAC 24 VDC 100-240 VAC 24 VDC + 10% 15 % + 10% 15% + 20% 15% + 10% 15% + 20% 15% 50/60 Hz 50/60 Hz 50/60 Hz Maximum micro power cut 10ms 10ms 5ms 10ms 5ms Maximum inrush current 0.7A 1.5A 0.7A 1.5A 7A 0.7A 1.5A 7A Maximum power 3W 4W 3W 8W 6W consumption ANALOGUE INPUT CHARACTERISTICS AC INPUT CHARACTERISTICS 10 6 inputs from I01 to I06 Input voltage 100

) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 0 20 40 100 60 80 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 50 mm stroke 13 CXSJM CXSJL Graph V = up to 400 mm/s; up to 50 mm stroke 12 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 15 15 10 10 0.01 0 20 40 100 60 80 0.01 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 5 Compact

Note 6: Products other than Option R are not equipped with an earth leakage breaker. Purchase an appropriate earth leakage breaker separately. Use an earth leakage breaker with a leak current sensitivity of 30mA. Note 7: This is the value specified by IPCC4 AR4. The value specified by Class 1 Act on Rational Use and Proper Management of Fluorocarbons JAPAN is R410A GWP: 2090.

(Bracket for centralized lead wire) 28 46 14 16 16 20 19 8 (1.6) 5.5 6 12 22 60 48 2 x 3 6.5 2 x 3.4 4 19.2 2 x 5.5 2 20 ISA3 Series Error Indication Main screen Name Description Measures Supply rated pressure (100 kPa to 200 kPa).

16-10 stroke 56 43 89*2 20 36 22 25 25 42 26 30 32 48 32 38 40 54 41 50 64 51 63 78 56 80 91.5 69 100 111.5 84 20-20 stroke 73 58 114 25-20 stroke 73.5 59.5 116 32-25 stroke 100 69.5 137 40-25 stroke 100 79 50-25 stroke 113.5 88 63-25 stroke 113.5 92.5 80-25 stroke 129.5 110.5 100-25 stroke 151.5 119.5 *1: Bore size 10 *2: Bore size 15 *1: Bore size 10 *2: Bore size 15 Internal