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Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

Maximum operating pressure 100 kPa Operating vacuum pressure Proof pressure Ambient and fluid temperature 3.0 MPa 0 to 40C Uni thread JIS B 0209 Class 2 (Metric coarse thread) Gasket Thread Seal (Thread portion) Brass parts are all electroless nickel plated.

In the case of base mounting, 2(A) port of 3 port valve should be 2(B) port of manifold base.

Nil F 0.05 to 0.85 MPa 0.05 to 0.30 MPa 0 1 ARX21 Nil F Note 1) Thread type (2) G Pressure gauge ARX20N Rc NPT G Nil N F ARX21N P Port size Panel nut 01 02 1/8 1/4 Option combination numbers Panel nut is also included with B.

(PNP) 2-wire IC circuit 5 V, 12 V Solid state switch Reed switch 12 V Diagnostic indication (2-color indication) IC circuit 5 V, 12 V Relay, PLC Grommet 24 V Yes 12 V Water resistant (2-color indication) IC circuit 5 V, 12 V 12 V 3-wire (NPN equivalent) A96 A96V IC circuit 5 V Yes 24 V Grommet A93 A90 A93V A90V 100 V Relay, PLC 2-wire 12 V IC circuit No 100 V or less DNil M L Z (Example

A 3.0 D Specification Element Model A B SCFM Nm3/h C D In/Out Side Bottom Lbs Dimensions (in) Connections (NPT female) Flow Rate Weight Model Number 5.5 1/4 1/8 male 1 1.25 6 14 4.5 AFW150-N10DG-[a] 255 EL-AFW150-[a] 150 12 1/2 1/4 1-1/2 1.5 6.5 19 5.75 AFW225-N14DG-[a] 382 EL-AFW150-[a] 225 12 1/2 1/4 1-1/2 1.5 6.5 19 5.75 AFW300-N14DG-[a] 510 EL-AFW150-[a] 300 B 12 1/2 1/4 2 1.5 6.5 19

O P T I O N S L Mounting Brackets R O TAT I O N B O R E ( M M) 90 90 180 180 270 270 b h Model A B C D E F N Q R G H J K L M P l 50 2 80 3.14 100 4 0.16 0.16 NCRB50 2.64 3.38 0.77 1.55 0.47 0.98 1.18 M6x1x10 NPT 1/8 0.79 0.12 0.39 0.51 0.20 0.53 1.34 1.97 0.20 0.20 NCRB80 3.74 4.06 0.93 2.11 0.67 1.18 1.77 M8x1.25x13 NPT 1/4 1.42 0.12 0.51 0.63 0.20 0.75 1.57 2.75 0.28 0.28 NCRB100 4.92 4.92

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

Specifications Fluid Air 1.0 MPa 100 kPa 3.0 MPa 5 to 60C (No freezing) JIS B 0203 (Taper thread for piping), JIS B 0209, class 2 (Metric coarse thread) Maximum operating pressure Operating vacuum pressure Proof pressure Ambient and fluid temperature Thread Rotating Torque/Allowable Number of Rotations Applicable tubing O.D. 8 0.014 6.7 20 4 0.006 8.4 25 6 0.012 8.4 20 10 0.020 5 16.7 12

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% PS port 2(B) Vacuum pad port Flow Characteristics Response Time Flow Characteristics (When restrictor is fully open) 2(B)3/5(E) 1(P)2(B) b 0.19 Cv 0.05 C [dm3/(sbar)] 0.40 b 0.18 Cv 0.10 C [dm3/(sbar)] 0.24 Valve model Fluid passage 2(B) Port size M5 Valve model Response time ms (at 0.5 MPa) SJ3A6-ll-l

cores, 5.1, 3 m Conductor area: 0.2 mm2 Insulator O.D.: 1.12 mm Mass With sensor cable 200 g 108 g 194 g 102 g 201 g 109 g Without sensor cable 187 g 95 g 203 g 111 g 193 g 101 g -12No.PS-OMG0006-D Analogue output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -100 to 100 kPa -100 kPa 100 kPa 0 to 1 MPa 0 1 MPa -0.1 MPa For positive pressure 0 to

In principle, this function counts each time there is a rise or fall in either of the A or B phase pulses. 2 1 Amplification/ Interpolation circuit Counter A phase B phase Magnetic resistance element Piston rod Magnet Count 1 2 3 4 5 6 7 8 9 10 .

IS10E-4004 IS10E-4006 + 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 AC20m AR20m, AW20m AWM20, AWD20 Nil Set pressure 0.1 to 0.4 MPa 0.1 to 0.6 MPa V V V V V V 30 66 52 28 16 a 6 Note 2) range + AC25m, AC30m AR25m, AR30m, AW30m AWM30, AWD30 Nil 0.5 m V V V V V V V V V Semi-standard Lead wire 32 73 56 30 13 L Z b 3 m 5 m length r V + Note 2) AC40m AR40m, AW40m AWM40, AWD40 Nil Scale plate MPa

I$ODEL NO. 2 , 1 3 (s4) S P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s 2 MTNG HOLES I .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?