-B80 F-2815-071-B85 .010 Yellow F-2815-101-B80 F-2815-101-B85 .012 Black F-2815-121-B80 F-2815-121-B85 .016 Grey F-2815-161-B80 F-2815-161-B85 .020 Blue F-2815-201-B80 F-2815-201-B85 .025 Brown F-2815-251-B80 F-2815-251-B85 .030 Beige F-2815-301-B80

-B80 F-2815-071-B85 .010 Yellow F-2815-101-B80 F-2815-101-B85 .012 Black F-2815-121-B80 F-2815-121-B85 .016 Grey F-2815-161-B80 F-2815-161-B85 .020 Blue F-2815-201-B80 F-2815-201-B85 .025 Brown F-2815-251-B80 F-2815-251-B85 .030 Beige F-2815-301-B80

-B80 F-2815-071-B85 .010 Yellow F-2815-101-B80 F-2815-101-B85 .012 Black F-2815-121-B80 F-2815-121-B85 .016 Grey F-2815-161-B80 F-2815-161-B85 .020 Blue F-2815-201-B80 F-2815-201-B85 .025 Brown F-2815-251-B80 F-2815-251-B85 .030 Beige F-2815-301-B80

-B80 F-2815-071-B85 .010 Yellow F-2815-101-B80 F-2815-101-B85 .012 Black F-2815-121-B80 F-2815-121-B85 .016 Grey F-2815-161-B80 F-2815-161-B85 .020 Blue F-2815-201-B80 F-2815-201-B85 .025 Brown F-2815-251-B80 F-2815-251-B85 .030 Beige F-2815-301-B80

-B80 F-2815-071-B85 .010 Yellow F-2815-101-B80 F-2815-101-B85 .012 Black F-2815-121-B80 F-2815-121-B85 .016 Grey F-2815-161-B80 F-2815-161-B85 .020 Blue F-2815-201-B80 F-2815-201-B85 .025 Brown F-2815-251-B80 F-2815-251-B85 .030 Beige F-2815-301-B80

-B80 F-2815-071-B85 .010 Yellow F-2815-101-B80 F-2815-101-B85 .012 Black F-2815-121-B80 F-2815-121-B85 .016 Grey F-2815-161-B80 F-2815-161-B85 .020 Blue F-2815-201-B80 F-2815-201-B85 .025 Brown F-2815-251-B80 F-2815-251-B85 .030 Beige F-2815-301-B80

-B80 F-2815-071-B85 .010 Yellow F-2815-101-B80 F-2815-101-B85 .012 Black F-2815-121-B80 F-2815-121-B85 .016 Grey F-2815-161-B80 F-2815-161-B85 .020 Blue F-2815-201-B80 F-2815-201-B85 .025 Brown F-2815-251-B80 F-2815-251-B85 .030 Beige F-2815-301-B80

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

Type Bore size Nil H Pneumatic Air-hydro Note) 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm 12 16 20 25 32 40 50 63 80 100 Body option Note) Bore sizes available for air-hydro type are 20 to 100.

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Sufx for cylinder (Rod boot) Port thread type Air cushion Rubber bumper Nil Without rod boot J Nylon tarpaulin K Heat resistant tarpaulin Rod end thread M5 x 0.8 20, 25 Rc 32 to 100 NPT 32 to 100 G 32 to 100 Nil Male rod end F Female rod end Nil Rc 20 to 100 TN NPT 20 to 100 In the case of w/rod boot, and a foot bracket or rod ange as a bracket, those parts are to be assembled at the time

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Body option Nil Standard (Rod end female thread) With boss on head end With rubber bumper Note 4) Action D Double acting Bore size F C M 12 16 20 25 32 40 50 63 80 100 Port thread type 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm 12 to 25 M thread Rc NPT G Rod end male thread Combination of body options (CM, FC, FM, FCM) is available.

ITV

0 25 50 75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

A_HEC-OM-J017

STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) HEC 3-2 Communication Format Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK UT CR (Possible to omit) COM indicates communication command.

IR1000/2000/3000

60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate (l/min (ANR)) 14-5

I/O Configurator (NFC version)

Mode 1: Allocation to the right f) Unit address from the end plate. order Mode 1/Mode 2 Mode 1 Available Mode 2: Allocation to the left from the wireless unit.

2/3 Port Valve for Various

476 VVXA21 VVXA22 A 38 49 B 20.5 [17.5] 26.5 [22.5] Model VVXA21 VVXA22 C 10.5 13 D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 The VX series will be revised shortly.

Large Capacity Compressed Air Filters Series AFW

C/F C/F 23 C/F C/F 12 AFW16100-N120FGM-E* 16,100 1) Specify filtration grade by replacing; *: 5 = 5m; 1 = 1m; A = 0.01 m; C = activated carbon Technical Notes Correction Factor Threaded & Flanged Operating pressure Correction factor 1.

Fieldbus system PROFIBUS DP compatible SI unit

GSD file name GSD file SMCA1411.gsd SMCB1411.gsd EX600-SPR SI Unit EX600-SPRA EX600-DXB/C/ D Digital input unit Product nunber EX600-DXE/F EX600-DYB Disital output unit EX600-DYE/F Digital I/O unit EX600-DME/F Analogue input unit EX600-AXA Analogue output unit EX600-AYA Analogue I/O unit EX600-AMB Configuration layout The Unit number is sequentially allotted from the End

HEC-OM-U015

No temperature decrease when 100% cooling output. No temperature increase when 100% heating output. Cooling or heating capacity overload. Abnormal If the volume of circulating fluid system is too large, the change of temperature takes a long time. In this case, change overload judging time setting to avoid this alarm.

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.