AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Trace the arrow mark, starting with the intersection B to obtain the intersection D on the curved line for the 0.7 MPa pressure characteristics. 3. Trace the intersection D to obtain the intersection E. 4. The intersection E is the dew point under pressure 0.7 MPa with the ambient temperature of 30C and the relative humidity of 60%. Value for E is at 62C. 5.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

LEF-D-2-1 For details, refer to the Web Catalog,) Note 4) Order auto switches separately. (For details, refer to the Web Catalog.)

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Rubber bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500

Heatless Air Dryer Series ID

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

Heatless Air Dryer Series ID 1

Maintenance Caution Model A B C D E Mounting dimension J H L K G F Port size Nominal size (B) ID200 240 240 320 320 1.

The CNA2 series cylinder with lock?is?suitable for mid-stroke stops, emergency stops, and drop prevention. An equal holding force in extending and retracting directions make it possible to lock at either end of the stroke. High reliability and stable holding force are maintained by using a substantially lengthened brake shoe with superior wear resistance. The locking mechanism is isolated

Digital Flow Switch (Remote type sensor unit)

20 200 PF2A551 E 50 500 Analogue output A B Voltage output 1 V 5 V Current output 4 mA 20 mA Rated flow range [L/min] Model Min.

ARJ310

Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) This catalog is printed on recycled paper with concern for the global environment.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Membrane Air Dryer

Remove water droplets from the inlet air Water droplets in the air can lower performance and cause malfunction. d. Large quantities of dust (solid foreign matter) are contained in the supply air. When there are large quantities of dust (solid foreign matter), install an air filter or main line filter to the inlet side of the mist separator. e.

PSxx-OMR0001CN

kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] -18No.PS-OMR0001CN-J 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5

PSxx-OMT0001CN

kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3

•

U~ 01 ,-"" 1/6 7 (09 2(12.7 150 ,,, 12 to 14 17 17.5) 200 31B 221024 19 200 2. Grasp Ihe tube and push it in slowly, inserting it securely all the way into (he filling. 1/2 281030 2423.8) 200 Note} Numbers Inside ( ) are NPT Ihread dlmensJ()ns IN m_ l0 2kgf em 3.Aher fully inserting the tube, pull on il lightly to confirm that it WIll nol come out.

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)