E-P HYREG ® Series VY1

(MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA

C85

Yes A72H A72 Grommet 200 V Reed switch Solid state switch A73H C73 A73 100 V 12 V A80H C80 A80 IC circuit No 100 V 5 V, 12 V Relay, PLC C73C A73C 2-wire Yes 12 V 24 V Connector C80C A80C IC circuit No 24 V 5 V, 12 V Diagnostic indication (2-color) A79W Grommet Yes F79 H7A1 F7NV 3-wire (NPN) IC circuit 5 V, 12 V F7P H7A2 F7PV Grommet 3-wire (PNP) J79 H7B F7BV 12 V 2-wire

Rotary Actuator/Vane Style Series CRB1

Load voltage Lead wire length (m) No Yes Yes Indicator light Wiring (Output) Auto switch model Type Electrical entry Applicable load DC AC 0.5 (Nil) 3 (L) None (N) 5 (Z) Grommet T79 2-wire 12 V Connector Relay, T79C Solid state switch 24 V PLC S79 3-wire (NPN) IC circuit Grommet 5 V, 12 V S7P 3-wire (PNP) Grommet 100 V R73 Relay, Connector R73C Reed switch 2-wire 24 V PLC 100 V or less Grommet

Digital Pressure Switch

1 V or less -19No.PS-OMX1005 -C NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 1 V or less Analog voltage output Output impedance approx. 1 k -D NPN open collector 1 output Max. 28 V, 80 mA Residual voltage 1 V or less Analog current output Max. load impedance 300 at 12 V power supply voltage 600 at 24 V power supply voltage Min. load impedance 50 -E PNP open collector

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

Rotary Actuator/Vane Style Series CRB2

The length is 24 when any of the following auto switches are used: D-90/90A/S99(V)/ T99(V)/S9P(V). The length is 30 when any of the following auto switches are used: D-97/93A. 2. The angle is 60 when any of the following auto switches are used: D-90/90A/97/93A. The angle is 69 when any of the following auto switches are used: D-S99(V)/T99(V)/ S9P(V).

C85

Yes A72H A72 Grommet 200 V Reed switch Solid state switch A73H C73 A73 100 V 12 V A80H C80 A80 IC circuit No 100 V 5 V, 12 V Relay, PLC C73C A73C 2-wire Yes 12 V 24 V Connector C80C A80C IC circuit No 24 V 5 V, 12 V Diagnostic indication (2-color) A79W Grommet Yes F79 H7A1 F7NV 3-wire (NPN) IC circuit 5 V, 12 V F7P H7A2 F7PV 3-wire (PNP) Grommet J79 H7B F7BV 12 V 2-wire

IZx-OMR0035

No.: IZ-OMR0035 2) Static neutralization area (Air flow setting: 10, Discharge time from 1000 V to 100 V) IZF21 IZF31 300 mm 300 mm 3) Static neutralization area (Air flow setting: 1, Discharge time from 1000 V to 100 V) IZF21 IZF31 5-2.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

FQ1

, as the position of the V-band can be changed.

ALF400 to 900, ALT-5/-9

4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A e g a t l o V V 0 5 2 C D , V 0 0 1 C A e r u s s e r P f o o r P ) a

E-P HYREG ® Series VY1 1

A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15

PSE550/300

1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PSE303 PNP open collector output (2 outputs), Max. 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k DC (+) DC (+) (Brown) (Brown) Analog output Load Analog output (Gray) (Gray) + + Main circuit Main circuit Main circuit Main circuit Main circuit Load OUT1 OUT1 12 to 24 VDC 12 to 24

Rotary Table/

, D-A93(V), D-A96(V) Auto Switch Specifications Grommet Electrical entry: In-line D-A90, D-A90V (without indicator light) Auto switch part no.

CV/MVGQ

B59W G59 G5P K59 G39 K39 G59W Relay, PLC 100 V MVGQ Reed switch Solid state switch PLC Yes 100 V, 200 V Relay, PLC 12 V CC 24 V 2-wire PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet RB Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) J 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V D2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal

2-Color Display High Precision

) 0.6 to 5 V 2.5% F.S. 1 to 5 V 2.5% F.S.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

V 2.5% F.S.

2-Color Display

FUNC Blue DC () Blue DC () Max. 80 mA Residual voltage 1 V or less Max. 28 V, 80 mA Residual voltage 1 V or less Analog current output Max. load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance: 50 Analog current output Max. load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance: 50 The FUNC terminal

MNB

, PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 24 V 2-wire Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 24 V Grommet 100 V, 200 V 2-wire 12 V 3-wire (NPN) 2-wire IC circuit Terminal conduit 5 V, 12 V 12 V Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication