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Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Model C [dm3/(sbar)] Av x 106(m2) Cv converted b Cv N.C. 0.04 0.40 0.14 0.96 1 0.04 VDW10 M5 0.07 0.25 0.30 1.7 1.6 0.07 0.09 0.45 0.31 1.9 1.6 0.08 M5 1/8 (6A) VDW20 0.18 0.45 0.58 4.3 2.3 0.18 0.33 0.38 1.2 7.2 3.2 0.30 0.16 0.52 0.52 3.8 2 0.16 1/8 (6A) 1/4 (8A) VDW30 0.30 0.52 1.0 6.7 3 0.28 0.46 0.49 1.5 11 4 0.44 17-2-65 6 Series VDW10/20/30 Construction VDW11 VDW21 i i w w e e r r

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.

Metal bowl PPA Applicable model Metal bowl with level gauge Metal bowl AL Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S (mm) With bracket Accessory specifications With auto-drain Port size Standard specifications Model M 2.3 2.3 2.3 2.3 B 115 170 204 208 L 40 53 70 70 H 22

Applicable model Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 10 One-touch fitting O S 1/4 Width across flats 17 (mm) With bracket Accessory specifications Port size Standard specifications With auto-drain Model L 40 53 70 70 M 2.3 2.3 2.3 2.3 B 115 170 204 208 K 8.4 8 10.5

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

Use an electric circuit for control and solenoid valve with high response. b. Keep the lock release solenoid valve and lock release port as close as possible. c. If b is difficult, install a rapid exhaust valve between the lock release solenoid valve and lock release port. Piston speed is the most significant factor in stopping accuracy.

C B A A B A B A B ML1C25 ML1C32 ML1C40 MY-S25 MY-S32 MY-S40 5.5 9.5 5 8 M6 X 1 50 35 117 103 6.6 11 6 11.7 M8 X 1.25 64 45 146 128 9 14 5 14.8 M10 X 1.5 80 55 170 148 4.7-9 Series ML1 Construction Component Parts Component Parts Description Note Material No Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Material No Aluminum alloy Aluminum alloy Aluminum

HRX-OM-M090-f Operation Manual InstallationOperation Original Instructions Thermo chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRS012-A-10HRS012-W-10HRS018-A-10HRS018-W-10HRS012-A-20HRS012-W-20HRS018-A-20HRS018-W-20HRS024-A-20HRS024-W-20Keep this manual available whenever necessary 2021 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs

When the controller and high voltage power supply module are directly connected Install the directly connected controller and high voltage power supply module at location B using M4 screws. Refer to 6. Dimensions for details. B : M4screw B : M4screw B : M4screw B : M4screw When IZTC41(-L) and IZTP42(-L) are When IZTC41(-L) and IZTP41(-L) are directly connected. directly connected. .

Transfer direction 270 Port 180 Port Transfer direction Flange Transfer direction Axial direction Option With cancel cap With lever detection switch With lock mechanism V m/min Work W Work W Work W ON OFF Work W Work W Cancel cap Lever detection switch Bracket The cancel cap holds the lever horizontally allowing a pallet to pass.

51 45 17 (5.3) 11 (2.9) 5.5 50 Hz 60 Hz 50 Hz 60 Hz Inrush Apparent power (VA) (Power consumption (W)) VP AC Holding S070 Power consumption (W) DC Bracket (AXT338-11)/For body ported type VQ Accessory (Option) Indicator light Body ported Manual override VKF Note 1) Based on JIS B 8375-1981.