SMC Corporation of America
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(50/60 Hz) [W] 1700/1900 2500/2900 Heating capacity3 (50/60 Hz) [W] 430/540 430/540 Temperature stability5 [C] 0.1 Circulating fluid system Rated flow6, 7 (50/60 Hz) [L/min] 7 (0.13 MPa)/7 (0.18 MPa) Maximum flow rate (50/60 Hz) [L/min] 27/29 Maximum pump head (50/60 Hz) [m] 14/19 Output [W] 200 Tank capacity [L] Approx. 5 Port size Rc1/2 Pump Fluid contact material Stainless steel, Copper

D E F G H J K L M N P Q R S T U V W 65A 5 100 VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A 6 Flange body I type 24 VDC Flange body II type 24 VDC DIN terminal with surge voltage suppressor 100 VAC 7 8 90A B Flange type 110 VAC 100A 200 VAC 230 VAC 24 VDC Conduit terminal 100 VAC with surge voltage suppressor 110 VAC

Energy-saving, large flow rate, 3 stage diffuser construction ZA Suction flow rate increased 250% and air consumption reduced 20% with 3 stage diffuser construction (Versus 1.3, one stage model) ZX 1 stage performance Vacuum pressure ZR Q1 Q2 Q3 ZM Q1 Q2 Q3 Suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) 2 stage performance 3 stage performance ZMA Suction flow rate ZL112 100 200

ATX-OM-F003E-C PRODUCT NAME Water Cooled Aftercooler MODEL / SERIES HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 This manual is intended to explain the installation and operation of the product.

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate

300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure

U~ 01 ,-"" 1/6 7 (09 2(12.7 150 ,,, 12 to 14 17 17.5) 200 31B 221024 19 200 2. Grasp Ihe tube and push it in slowly, inserting it securely all the way into (he filling. 1/2 281030 2423.8) 200 Note} Numbers Inside ( ) are NPT Ihread dlmensJ()ns IN m_ l0 2kgf em 3.Aher fully inserting the tube, pull on il lightly to confirm that it WIll nol come out.

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] 3 wires x14AWG HRS018-A-20-R HRS030-A-20-R 1-phase 10 30 (3 wires x 2.0mm2) 200, (including ground) Cable diameter: 8.5 to 11.5 mm 200-230V AC 230 HRS0-A-20-T-R (50/60Hz) (High pressure pump 15 30 [Optional]) HRS-R Series 3.3 Installation 3-9 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.3.3 Preparation

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

[June 2018] C: Contents are added. [May 2021] D: Contents revised in several places.

The proof pressure is double the operating pressure range. -28No.LFE*-OMZ0012 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -29No.LFE*-OMZ0012 Dimensions 2XPort size Note) The electrical

100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line) Ball screw + Belt (parallel) Guide type Linear

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be as follows.

How to Order Standard B 20 30 D C CQSY B 20 30 D C F9BW S CDQSY With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Note 1) 1 1/4B 90 1 1/2B 120 Note 2) 2B 200 2 1/2B 315 3B 450 Description Part no.

(C) (Atm.temp.) 0.5 MPa SOL.2 AMF 0.7 MPa Fixed filter ZFC Silencer EXH.

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.