EX510-GPR1.eng Input unit 1 connector 2 inputs type 1 Communication socket (BUS) 10 ( ) 12 Supplying power for output instruments such as a solenoid valve with an accessory connector ( ). 11 2 Power supply socket (PWR(V)) Supplying power for controlling GW and for input devices such as a sensor with a power supply connector ( ). 11 3 Power supply socket (PWR) Input unit 1 connector 1 input type connecting
(page 16) 10 Vacuum port adapter assembly ZL112A-AD2-A Vacuum pressure sensor: Vacuum port adapter Pressure gauge assembly ZL112A-PG-A Vacuum pressure sensor: Vacuum pressure gauge : Units for pressure 1 = kPa, 2 = inHgpsi2 11 O-ring ZL112A-OR1-A 5 pcs.
10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40
Part Material Note 1 Body (A) Aluminum Alloy White 2 Body (B) Aluminum Alloy White 3 Vane Shaft Carbon Steel (NBR) 4 Stopper Resin For 270 5 Stopper Resin For 180 6 Bearing Bearing Steel 7 Back-up Ring Stainless Steel 8 Hexagon Socket Head Cap Screw Stainless Steel Special bolt 9 O-ring NBR 10 O-ring NBR 11 Stopper Packing NBR 12 Parallel Key Carbon Steel 3 2-2Double Vane Type No.
Replace pilot valve assembly. (10) Protect the valve so that water does not splash the coil. Replace pilot valve assembly. (11) To remove foreign matter, clean the pipe by air blow. Replace valve. (12) Repair or replace actuators.
(310) 4 70g 12 No.LFE*-OMY0008 M12 M12 M12 M12 4 4 4 4 M12 IN OUT ( ( ( (2 2 2 2 ) ) ) ) ( ( ( ( ) ) ) ) UP UP UP UP SET SET SET SET DOWN DOWN DOWN DOWN (2 ) () OUT1OUT2 ON : UP ON/OFF SET DOWN ON/OFF 13 No.LFE*-OMY0008 F F.S.( 15V F.S.=5[V]1[V]4[V](1F.S.4[V]10.04[V]) a 1-5V 1-5V 4-20mA (HYS) ON OFF 63% ka () sa 10 L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14
(Page 11) 7 1000 fR[N] 100 Lateral load applied to rod 100 80 63 10 50 40 1 0 500 1000 1500 Cylinder stroke [mm] Fig 1. Allowable lateral load applied to rod end C a u t i o n Be certain to align the rod axis with the load and direction of movement when connecting.
Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A
N 20 25 32 40 8 10 32 41 32 8 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 36 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 9 10 40 45 40 10 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 40 9 10 40 45 40 12 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 40 10 11 53 50 53 14 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 44.5 M14 x 1.5 Dimensions
Replacement Actuator (Cylinder) CY1F R B 10 Stroke Cylinder identification symbol Piping direction suffix R L Centralized piping on right Centralized piping on left Piping thread type Bore size (mm) Thread type M Rc NPT G Bore size (mm) 10, 15 10 15 25 10 15 25 Symbol Nil 25 TN TF 11 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F Construction A A CY1F15 Detailed
Electrical wiring 10 8. Maintenance 11 9. Mounting accessories (option) 12 10.
Replacement part/Grease pack part no.: GR-S-010 (10 g) 15 - 3-6. Construction / Parts list, seal list MHZAJ2-6 Double acting/ Finger open Single acting / Normal open Single acting / Normal closed Double acting/ Finger closed Components Components No. Description Material Remarks No.
6.15 The Schmitt Trigger .6-10 6.16 The Hour Meter .6-11 7.
level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400
24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 50 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD
160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)
Content 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 Unit diagnostic status 1 7 6 5 4 3 2 1 0 Byte 3 Bit No.
0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00
F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6