10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?
10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?
High Vacuum Angle Valve -10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.
-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.
8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting
Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)
Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
type LEPY Series Page 374 25 to 50 6.0 1.5 200 5 24 to 40 4.0 1.5 200 10 12.5 to 25 3.0 1.0 350 10 12 to 20 2.0 1.0 350 14 to 20 1.0 0.5 150 4 6 Slide table type LEPS Series 7 to 10 0.75 0.25 300 8 25 50 Page 383 25 to 50 2.0 1.5 200 5 24 to 40 2.0 1.5 200 10 12.5 to 25 1.5 1.0 350 10 12 to 20 1.5 1.0 350 370 LEPY/LEPS Series Mounting Variations Mounting from various directions Side mounting
Weight calculation m2 = d x e x f x Relative density m2 = 4 x 5 + 6 x 2.7 x 10-6 = 3.24 x 10-4 (kg) Inertial moment around Z2 axis IZ2 = {m2 (d2 x e2) / 12} x 10-6 IZ2 = {3.24 x 10-4 x (42 + 52) / 12} x 10-6 = 1.11 x 10-9 (kg.m2) = 1.11 x 10-9 + 3.24 x 10-4 x 23.52 x 10-6 = 0.18 x 10-6 (kg.m2) Inertial moment around Z axis IB = IZ2 x m2r22 x 10-6 IB Thus, the total inertial moment is I
Weight calculation m2 = d x e x f x Relative density m2 = 4 x 5 + 6 x 2.7 x 10-6 = 3.24 x 10-4 (kg) Inertial moment around Z2 axis IZ2 = {m2 (d2 x e2) / 12} x 10-6 IZ2 = {3.24 x 10-4 x (42 + 52) / 12} x 10-6 = 1.11 x 10-9 (kg.m2) = 1.11 x 10-9 + 3.24 x 10-4 x 23.52 x 10-6 = 0.18 x 10-6 (kg.m2) Inertial moment around Z axis IB = IZ2 x m2r22 x 10-6 IB Thus, the total inertial moment is I
10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17
15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference
10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17
-11 Pam3/sec 1 x 10-10 Pam3/sec 4 x 10-9 Pam3/sec Ra 10 in. (0.25 m) Face seal, Tube weld 7 psig (0.048 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 2.2 in3 (36 cm3) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume 42 Series AZ9200
capacity [W] Facility water temperature 35C Facility water temperature 20C 1500 1500 1000 1000 Facility water temperature 20C Facility water temperature 10C 500 500 Facility water flow rate: 10 L/min Facility water flow rate: 10 L/min 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR012-W Circulating fluid: Tap water
COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42 SON 15 Servo ON CN6 Note 4) RES 19 Reset 3 MO1 PC 17 Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit
EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series
Holding Force MHK2-12D MHK2-12D 25 20 Pressure 0.6MPa Pressure 0.6MPa 20 Holding force N Holding force N 15 0.5MPa 0.5MPa 15 0.4MPa 10 0.4MPa 10 0.3MPa F F 0.3MPa 5 5 0.2MPa 0.2MPa 0 0 1N = 0.2248 lbf = 0.102 kgf 1MPa = 145 psi = 10.2 kgf/cm2 10 20 30 40 10 20 30 40 50 50 Holding point L mm Holding point L mm O. D. holding MHK2 series I.
ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit
Weight calculation m2 = d x e x f x Relative density m2 = 4 x 5 + 6 x 2.7 x 10-6 = 3.24 x 10-4 (kg) Inertial moment around Z2 axis IZ2 = {m2 (d2 x e2) / 12} x 10-6 IZ2 = {3.24 x 10-4 x (42 + 52) / 12} x 10-6 = 1.11 x 10-9 (kg.m2) = 1.11 x 10-9 + 3.24 x 10-4 x 23.52 x 10-6 = 0.18 x 10-6 (kg.m2) Inertial moment around Z axis IB = IZ2 x m2r22 x 10-6 IB Thus, the total inertial moment is I