ZMA

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-27 8 Series ZMA Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for vacuum pressure T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (P, E port) Release flow adjustment screw 3-Rc 1/8 SUP.

ZSE1/ISE1

, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

Series KG Stainless Steel One-touch Fittings

P. 128 Male connector: KGH Part No. H (Hex.) L M Effective orifice(mm 2) Nylon Urethane Connection thread R(PT) M5 Applicable tube O.D.

Digital Pressure Switch

2.00 to -5.00 to -10.00 to Pressure spec. 1.000 kPa 2.00 kPa 5.00 kPa 10.00 kPa Display/Set pressure range -525 to 525 Pa -1.050 to -2.10 to -5.25 to -10.50 to 1.050 kPa 2.10 kPa 5.25 kPa 10.50 kPa Display/Min. setting unit 1 Pa 0.001 kPa 0.01 kPa 0.01 kPa 0.01 kPa Proof pressure 2.5 kPa 5 kPa 10 kPa 25 kPa 50 kPa Electrical Power supply voltage 12 to 24 VDC (10%), and power supply ripple (p-p

Digital Pressure Switch

(See Figure on page 59) Switch output NPN or PNP open collector output: 1 output NPN or PNP open collector output: 2 outputs Max. load current 80 mA Max. applied voltage 28 V (NPN output) Residual voltage 1 V or less (at 80 mA load current) 4 ms or less (with anti-chatter function: 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms, 10 s, 30 s or 60 s selected) Delay time Short circuit protection Provided

Cylinder with Lock Double Acting, Single Rod Series CNS ø125, ø140, ø160 How to Order CNS L 100 125 D 100 M9BW D L 125 CDNS With auto switch With auto switch Number of auto switches (Built-in magnet) Nil 2 pcs. Mounting style S 1 pc. Basic style B Tubin

(mm) Basic style, Head side flange style, Single clevis style, Double clevis style, Center trunnion style Bore size (mm) Foot style, Rod side flange style 125, 140 160 Up to 1000 Up to 1400 Up to 1200 Up to 1400 Stopping Accuracy (mm) Piston speed (mm/s) Lock type 100 300 500 DSpring locking 0.5 1.0 2.0 -X Condition: Lateral, Supply pressure P = 0.5 MPa Load mass Upper limit of allowed value

CLS

flange type Bore size (mm) Conditions: Horizontal, Supply pressure P = 0.5 MPa Load mass .

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

(mm) Piston speed (mm/s) Lock type 100 300 500 1000 0.3 0.6 1.0 2.0 Spring locking Condition: Lateral, Supply pressure P = 73 psi Load weight Upper limit of allowed value Solenoid valve for locking mounted on the unlocking port Maximum value of stopping position dispersion from 100 measurements 4

MNB

Stopping Accuracy (mm) Piston speed (mm/s) Lock type 100 300 500 1000 0.3 0.6 1.0 2.0 Spring locking Condition: Lateral, Supply pressure P = 0.5 MPa Load weight Upper limit of allowed value Solenoid valve for locking mounted on the unlocking port Maximum value of stopping position dispersion from 100 measurements Holding Force of Spring Locking (Maximum static load) 552 32 882 40 1370 50

Air Operated Chemical Valve Series LVQ

Piping example A or more LVQ20 56.5 40.5 or more 70 49.5 or more 61.5 or more 104.5 64.5 73.5 Series LVQ s Series Series Series LVQ s LVQ LVQ s Guide ring Guide ring Guide ring Piston bumper Piston bumper Piston bumper Absorbs piston momentum to minimize Absorbs piston momentum to minimize Absorbs piston momentum to minimize impact-induced particle generation. impact-induced particle generation

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

If the power should not come back on, please contact P/A for an inspection.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Consult P/A.

reduces flow setting time

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 598 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Seal method Nil Without sealant S With sealant Type 2 Elbow 3 Universal Note) Face seal type is used for the G thread type. Select Nil/Without sealant.

Soft Start-up Valve AV2000/3000/4000/5000

A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

for 2 hrs. each (De-energized) 980 m/s 2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.

3 Port Solenoid Valve SYJ300/500/700 Series

Manifold Specifications For internal pilot Type 20 Type 41,S41 Type 42,S42 Type For external pilot Type 20R Type 42R,S42R Single base type /B mount Manifold type Common SUP, Common EXH P(SUP), R(EXH) type 2 to 20 stations Valve stations Valve Base Location A port specifications Top Side Direction M5 0.8 1/8 NPTF M5 0.8 1/8 NPTF P,R port M5 0.8 Port size M3 0.5 A port M3 0.5 N3T (5/32" one-touch

Digital Pressure Switch

Set pressure range 10.0 to -105.0 kPa -105.0 to 105.0 kPa -0.105 to 1.050 MPa Min. setting unit 0.1 kPa 0.001 MPa Proof pressure 500 kPa 1.5 MPa Power supply voltage 12 to 24 VDC10%, ripple max. 10% (p-p) Electric spec.