Vacuum Unit

Length symbol Tension bolt assembly (2 pcs. per set) [L = 12.5 x M + 10.5] M: Length symbol 1 to 40 to 1 L = 23 40 L = 510.5 Exploded View e ZK2 TB1 A 05 to Applicable stations L 01 For 1 station manifold 1.25 P = 12.5 5.25 7.5 10 For 10 stations manifold 35 25 Port plug assembly Port plug assembly Exploded View t Exploded View r 5.5 (Purchasing order is available in units of 1 piece

NCA1

No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04 : 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05

70astamb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A 0.51 D C 1/4-28 UNF B 0.16 JM-025 0.44 3/4", 7/8" JM-03 0.50 0.19 5/16-24 UNF 0.50 1 1/16" JM-045 0.69 0.79 0.26 7/16-20 UNF 1 1/4", 1 1/2" JM-04 0.56 3/8-24 UNF 0.65 0.23 1 1/4", 1 1/2" (Non-rotating) JM-05 0.75 1/2-20 UNF 0.32 0.87 2" 6-14-20 21 Series NCM Mounting Bracket Accessory Material: Rolled steel P dia.

MU

Part no. 25 32 40 50, 63 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 CD-MU02 CD-MU03 CD-MU04 CD-MU05 25 32 40 50, 63 8 10 10 14 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 17 19 22 27 18.2 22.2 26.2 32.2 6 7 8 11 19.6 21.9 25.4 31.2 16.5 18 21 26 23 27 31 38 7.6 9.6 9.6 13.4 NT-03 NT-MU03 NT-04 NT-05 A nut is attached with rod end male thread as standard. (Double rod type: 2 pcs.)

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 8 10 10 14 NT-03 NT-MU03 NT-04 NT-05 One piece is included with the rod end male thread as standard. t 0.9 1.15 1.15 1.15 m 1.5 1.25 1.25 1.75 Snap ring C8 type for pivot C10 type for pivot C10 type for pivot C14 type for pivot Part no.

SS5V 05 Station Manifold, Cassette Base. 0.58000 lb. VVM.

SS5V 05 Station Manifold, Tie-Rod Base. 0.52 lb.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Ionizer

How to Order IZS31 CP X13 L (Tolerance 1%) Cable length 60 L: Cable length Symbol 7 01 02 04 05 06 07 08 09 11 12 13 14 15 16 17 18 19 20 1000 mm 2000 mm 4000 mm 5000 mm 6000 mm 7000 mm 8000 mm 9000 mm 11000 mm 12000 mm 13000 mm 14000 mm 15000 mm 16000 mm 17000 mm 18000 mm 19000 mm 20 mm (Red) 1 12 (6.2) 3 Cable Specifications No. of cable wire 12 0.14 mm2 (AWG26) 0.48 mm Nominal cross section

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

2.4 *1 Excluding the 20/20B(F)-L B A C B A C Pressure Pressure IO-Link: Process Data Relationship between the process data and pressure value ZSE20B-L (For vacuum pressure) ISE20B-L (For positive pressure) ZSE20BF-L (For compound pressure) Process data 5200 Process data Process data 5100 5200 5000 5000 5000 3000 1000 1000 Pressure [kPa] 1000 Pressure [kPa] Pressure [MPa] 600 580 900 10 1 .05

Air Cylinder

Bore size d H B C D NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40/45 M14 x 1.5 8 22 25.4 21 NT-05 50/56/63/67 M18 x 1.5 11 27 31.2 26 NT-08 80/85 M22 x 1.5 13 32 37.0 31 NT-10 100 M26 x 1.5 16 41 47.3 39 5 JMB Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV Hs A Ht B [mm] Auto

Series KV2 Fittings

Tube Size Packaging Table 01 03 05 07 09 11 13 15 19 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 Tube Size Type A (Monowall) Type B (Reinforced) TIV01 TIV03 TIV05 TIV07 TIV09 TIV11 TIV13 TIV15 TIV19 3/4 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 Length (Meters) S S S S S S S S

Silencer Metal Case Type Series 25

Silencer Metal Case Type Series 25 How to Order Exhaust in only one direction Prevents scattering of mist and noise. 25 10 002 Port size Thread type Body size 002 003 004 006 010 1/4 3/8 1/2 3/4 1 R NPT Nil N 04 05 06 07 08 10 11 Specifications Max. operating pressure (1) Fluid Compressed air 1.0 MPa 19 dB (A) JIS Symbol Noise reduction Ambient and fluid temperature 5 to 60C (2) Note 1) It

Micro-Mist Separator with Prefilter Series AMH

(ANR) c V -~ AM~4S0 E V ;;2 1 -E t~ AM~350 ~ ~ 2 ~05 -tV 'ct! AM~2S0 1. Select the point of contact A of inlet pressure and max. air flow capacity in the graph. V j.--v v V AMl,so 0.2 Ij.--~ V I 2.Select the type whose max. air flow capacity is over that point; AMH650. 0.2 0.4 0.6 0.8 1.0 tnlet air pressure MPa SeriesAMH How to Order .

Compact Manifold Regulator

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

Manifold Regulator Modular Type ARM2500/3000 Series

ARM 2500 05 A 02 G1 Made to Order Optimal for central pressure control. Nil None With backflow function Regulator for manifold X216 Easily set up using the new knob. Also has a One-touch lock system.

Compact manifold regulator ARM5 Series

Unit Representation Metric size Inch size Symbol Description Display unit for product name plate and pressure gauge: MPa Display unit for product name plate and pressure gauge: psi 4 6 4 6 Straight Elbow Straight Elbow Symbol Symbol Nil 5/32 1/4 5/32 1/4 Note) Z 04 05 16 17 54 55 66 67 Note) This option is available for use outside Japan only. (The SI units must be used in Japan.) 3.