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101 kPa1 to 10% of the set pressure (Changeable)?1% full span or less?3% full span or less12 to 24 VDC (Ripple ?10% or less )NPN open collector 30 V, Max. 80 mA1 pointLights up when ON3 rotations17 mA or less (When 24 VDC is ON)--0.2 MPa

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

Turn off the power supply and turn on again to make the written parameter effective. 30 No.SFOD-OMT0012-A (2) Change of controller and actuator settings a) Parameter window From the View (V) menu in the main window, select the Parameter window.

SFOD-OMT0011 2015 7 2016 3 A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0011CN-A

Event 30 8. Specification 31 8.1. Dimensions 31 8.2. Specifications 32 9. Accessories 33 10. Troubleshooting 38 -2No.EX-OMZ0018 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

&WEB -14- 3. 5mm B B B A A () A B 0 A B A mm B Nm A B MHM-16D1 2 10 6 1.5 5 MHM-25D1 3 14 8 5.2 5 MHM-32D1 3 14 8 5.2 5 MHM-50D1 5 24 17 42 5 -15- D(mm) L(mm) MHM-16D1 14 25 MHM-25D1 19 37 MHM-32D1 19 43 MHM-50D1 30 63 4. 2 1 n /WEB Best Pneumatics m () 0.5 ( ) 3 (NPN) 3 (PNP) IC 2 3 (NPN) IC 3 (PNP) 2 PLC 2 3 (PNP) 3 (NPN) IC (2 ) 2 1 0.5mM9NW 1m M M9NWM 3m L M9NWL 5m

D: Added example of wiring to robot controller 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved 43 -

Turn to 30 8) Hold the bowl assembly lightly and pull down the lock button (right or left) with thumb. Then, turn the bowl assembly to the left (or right) to 30o to align the marks. 9) Release your thumb from the lock button and slowly pull down the bowl assembly (vertically) to remove it. 10) Pour solution of neutral detergent into the bowl assembly and shake it well to clean.

Directive Machinery Directive 2006/42/EC EMC Directive 2004/30/EU RoHS Directive 2011/65/EU Air Dryer Table of Contents Table of Contents Foreword Chapter i Safety Instructions i . 1 Warning: Before using this product . i 1 i .1. 1 Danger, Warning and Caution . i 1 i . 2 Hazard classification and locations of hazard labels . i 2 i . 2. 1 Hazards . i 3 i . 2. 2 Warning related to electricity

. *2) JIS B 8370 URLhttps://www.smcworld.com/ Machinery Directive 2006/42/EC EMC Directive 2004/30/EU RoHS Directive 2011/65/EU i i.1 . i-1 i.1.1 . i-1 i.2 . i-2 i.2.1 . i-3 i.2.2 . i-3 i.2.3 . i-3 i.2.4 . i-3 i.2.5 . i-4 i.2.6 . i-4 i.2.7 . i-4 i.2.8 . i-5 i.2.9 . i-6 i.3 . i-7 i.4 / . i-7 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 R . 1-2 1.2.5

Turn to 30 body 8) Hold the bowl assembly lightly and pull down the lock button with (right or left) thumb. Then, turn the bowl assembly to the left (or right) to 30to align the marks. 9) Release your thumb from the lock button and slowly pull down the bowl assembly (vertically) to remove it. 10) Pour solution of neutral detergent into the bowl assembly and shake it well to clean.

Standard dew point -40oC : about 30 min.* Standard dew point -60oC : about 60 min.* * This time can be shortened as described below. 1) Provide a valve on the outlet side of the membrane air dryer. 2) Supply air with the valve closed so that only purge air flows through the membrane air dryer. 3) After 15 minutes or more, open the valve and let air flow to the outlet side equipment.

Standard dew point -40oC : about 30 min.* Standard dew point -60oC : about 60 min.* * This time can be shortened as described below. 1) Provide a valve on the outlet side of the membrane air dryer. 2) Supply air with the valve closed so that only purge air flows through the membrane air dryer. 3) After 15 minutes or more, open the valve and let air flow to the outlet side equipment.

June 2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved -23-

Specifications 2-1 How to Order SFB 02 Port size Model type Port size Symbol Symbol Type 02 RcTSJURJ 1/4 Disposable (Narrow size) 30 Disposable (Long size) 31 Connection Symbol Connection (IN, OUT) 0 Rc 2 TSJ 5 URJ note) SFB31: Only 5 is selectable. 2-2 Specifications Specifications Remarks Fluid Air, Nitrogen This product cannot be used in an environment exposed to chemicals.

Recommended tightening torque [N-m] Piping Warnin Warnin Warnin Warning g g g Thread 1/4 3/8 1/2 IN OUT port 12 to 14 22 to 24 28 to 30 EXH port 8 to 10 Do not apply any additional twisting, or bending moments except for the weight of the filter regulator itself. Provide separate support for external piping, as damage may otherwise occur.

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

Recommended tightening torque (Nm) Thread size 1/4 3/8 1/2 Torque 12 to 14 22 to 24 28 to 30 -9- (2) Do not apply torsion or bending moment other than the weight of the product itself.

O-ring Stand (4) Register the product and related documents with the Special Equipment Safety Supervision Department before using the device or within 30 days after starting to use the device. Spare port (2) Operating pressure Use this air tank at maximum operating pressure of 1.5 MPa or less.

VBA-0M-P018-A VBAT10A1-U-X104 VBAT-M35C 2 / VBAT05A1-U-X104 VBA1 4 / VBA1 4 /VBAT10A-Y-3 VBA2 4 VBAT05A1-U-X104 VBAT10A1-U-X104 VBA1 1 O /VBAT5A-Y-3 O VBA1 1 VBA2 1 1 1 / VBAT-U 1 1 1 / VBAT-U 1 1 1 / VBAT-M35 / VBAT-M35C () () 1 1 / VBAT-M35 / VBAT-M35C () () 1 1 1 1 SMC ( 3 ) VBA2 VBA1 () 30 IN 1.5MPa VBA1A 2MPa, O 1.5MPa OUT VBATA1--X104 VBAT-V1 OUT