ISO Standard Hydraulic Cylinder 3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.
VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 22 Manifold Specification Sheet Series VQC1000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 1 1 08 FD1 B C6 F P T Kit / / 1 2 3 8 VV5QC 1 1 08 SDQ B C6 S Kit Fill out for I/O serial kit only.
65 + 30 (n 2) (n = 2, 4, 6, 8)*1 75 + 30 (n 2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)*1 95 + 100 (n 2) (n = 2, 4, 6, 8)*1 100 + 100 (n 2) (n = 2, 4, 6, 8)*1 105 + 100 (n 2) (n = 2, 4, 6, 8)*1 110 + 100 (n 2) (n = 2, 4, 6, 8)*1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same
VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 22 Manifold Specification Sheet Series VQC1000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 1 1 08 FD1 B C6 F P T Kit / / 1 2 3 8 VV5QC 1 1 08 SDQ B C6 S Kit Fill out for I/O serial kit only.
F F F F F Bore size 20 Bore size 25 800 8 3 7 6 5 4 8 3 7 1 6 4 1 5 500 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 0.05 0.1 0.5 1 2 Load (kN) Load (kN) Bore size 32 Bore size 40 800 6 8 6 4 8 3 7 5 3 7 4 5 1 500 1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 20 Series CHN Technical Data 3-1 Cylinder Cushion Selection Procedure Caution Use a cylinder cushion within
4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)
Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26
Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type 10 D L 6 60 R C J 2 M9BW C 21 D L 6 60 C J 2 R M9BW C Mounting Number of auto switches Nil S n B L F 2 pcs. 1 pc. n pcs. Basic Axial foot Rod flange Foot/Flange brackets are shipped together with the product, but not assembled.
((P_1)(H_2)),ON ONOFF H_2:5.0 kPa (OUT2) OFF ON (V) 17 - <> OUT1 (16 -) 1 [P_1] 1 1 1 1 [H_1] [H_2] OUT1 18 - 2[F 0] [F] 2 2 [F 0] 21 SI kPa [F 1] OUT1 22 HYS ONOFF -70 kPa(P_1) 10 kPa(H_1) [F 2] OUT2 24 ON ON 5 kPa(H_2) OFF OFF 0 kPa(H_3) ON 1 kPa(H_4) 19 - [F 3] 26 2.5 ms [F 4] 27 [F 6] 29 0% [F11] 30 1,000 [F80] 31 OFF [F81] 32 OFF [F90] 33 OFF [F96] 33 OFF [F98
(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.
(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.
Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40
due to Roll Moment Load Guide central axis (1 axis type) F F A F For the double axis type, this is the cylinders central axis.
ms [F 4] 28 [F 6] 30 0% [F11] 31 1000 [F80] 32 OFF [F81] 33 OFF [F90] 34 OFF [F96] 36 OFF [F98] 37 [F99] 39 OFF -21NO.ZK2-OM00801-B [F 0] (kPa/MPa) <> [F 0] [F 0] 2 bar psi InHg mmHg MPa kPa kgf/cm 0.001 0.1 0.001 0.001 0.02 0.1 1 -22NO.ZK2-OM00801-B [F 1] OUT1 OUT1 () (H_1) (H_1) -23NO.ZK2-OM00801-B <> [F 1] [F 1] OUT1 -24NO.ZK2-OM00801-B [F 2] OUT2 OUT2 ONOFF OUT2
Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 Shaft: 12d9 F Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27
Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube 1 m, 3 m, 5 m Test conditions G, H type: 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa ISA3-F ISA3-G Piping length: 1m, 3m, 5m Piping length: 1m, 3m, 5m : When the display value becomes 9 or lower, "0" is displayed. "0" and "10" are displayed near "10". This does not affect the performance.
*Adj ust i ng range: Ref er t o f i gures bel ow and not e 1 t o 4 Press key ( di spl ayed al t ernat el y) Set t he m axi m um pressure by usi ng t he and keys. Change t he val ue by usi ng and keys. *Adj ust i ng range: Ref er t o f i gures bel ow and not e 1 t o 4 G o t o no. f or m oni t or out put : anal ogue out put ( vol t age and current ) t ype.
l-en load,o f * t__i-r i l u i I I I l ; l 5 t 6 t i ] F ? {C $mies L)(P tleslric Actrfllor$ It|odd $slediru ltleiludl Operating conditions when LXP is used as lifter Working fange to linear bail bearing. Use within allowable thrust. Lateral load allowance zoo T---*J-rf I I T---r -tl l r ) = _ 1 ) , 4 \ t l 1 -;-) 50 to 100 stroke 75 | 2.47 1oo I zJt 125 1 5 0 ' , , e 1'rC ' "; ?