Piping: 41 (Base Mounted), Stations: 4 Stations, A, B Port: N3T (5/32" One-touch Fitting)

Piping: 41 (Base Mounted), Stations: 4 Stations, A, B Port: N7T (1/4" One-touch Fitting)

Piping: 41 (Base Mounted), Stations: 4 Stations, A, B Port: 01N (NPT1/8)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 4 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Made to Order

series GB Stroke B Stroke A (mm) Bore size GB Q S ZZ 40 29 53 168 230 50 33 59 180 249 63 33 61 196 268 80 41 73 232 320 100 41 79 252 341 Q S + Stroke (A + B) ZZ + Stroke (A + B) CNA2 series Stroke A Stroke B GE (mm) Bore size GE S ZZ 40 29 237 299 50 33 258 327 63 33 280 352 80 41 334 422 100 41 372 461 ZZ + Stroke (A + B) S + Stroke (A + B) -X -X 1789 Made to Order Common Specifications

1

43.5 [17.5] 29.5 (41.5) 26.5 (38.5) 33.5 (45.5) 41 [15] 48 [22] 29 (41) 42 48 44.5 47.5 43.5 44 [18] Data R 63 48 43.5 [17.5] 29.5 (41.5) 26.5 (38.5) 33.5 (45.5) 41 [15] 48 [22] 29 (41) 49 55 51.5 54.5 50.5 44 [18] Y + Stroke [ ]: Denotes the locations for CDG1R. ( ): Denotes the value of long strokes.

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

SMC Pneumatic Clean Series

32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5 32-0.039 0 21 82 36 10 8 M32 x 2 21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

25

IZS 41 IZS 42 IZF Sensor not connected Offset voltage (V) 30 Total number of ionizers that may be connected IZS41: Max. 8 units. IZS42: Max. 5 units.

IZx-OMT0049

Y Transistor Input/Output IZTP 41 L Y IO-Link Model Model Symbol Model Symbol Model Standard type 40 41 AC type 42 Dual AC type DIN rail bracket Symbol Type Nil None Y Include Controller IZTC 40 3 W IZTC 41 3 W Transistor InputOutput IZTC 41 L J G W IO-Link Model Input/Output specifications Model Symbol Input/Output Model Symbol Model Symbol Nil NPN 41 AC type, Dual AC type 40 Standard

Table of Contents

MHT 41 mm x 20 mm x 10 mm 19 g Port MHY With 4 hose nipple MHW MRHQ Misc. Port MHCM2-7S Smallest size and lightest weight in MHC series.

Floating Joint

41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32 41 41 41 55 0.09 0.18 0.18 0.36 0.36 0.36 0.61 0.61 1.09 2.03 2.03 4.1 10 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 1148 JA Series Made to Order: Individual Specifications Please contact SMC

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

JA/JAH/JB/JS

-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07

Vacuum Module Series ZX

(VJ324M) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] Solenoid valve N.C. (VJ114) K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Solenoid valve Release valve N.C. (VJ314) External release (ZX1A) Air operated N.C. (VJA314) None [ ]: Mass (g) How to Order /Refer to page 866 for details.

Air Slide Table

41 82 Double-ported type (MXQA) 6 20 34 32 230 29 10 10 18 8 23 42 40 330 51 10 10 19 12 30 52 50 580 113 16 16 33 16 37 70 60 920 201 21 21 49 20 46 80 70 1,600 314 41 41 82 Low thrust with high rigidity type (MXQB) For applications which require more guide rigidity than thrust Single sideported type (MXQC) When a lower height is required When two indicator LEDs need to be observed on one

3 Port Air Operated Valve Series SYJA300

M5 x 0.8 Type 41 Applicable solenoid valve SYJ314SYJ314MSYJ324SYJ324MHow to Order SS3YJ3 41 05 M3 Type 41 Type S41 Pilot valve is on the A port side. ( ) Valve mounting direction Stations 02 2 stations Pilot valve is opposite the A port side. Applicable blanking plate assembly SYJ300-10-2A Nil R port : : A A M5 x 0.8 R port 20 20 stations Pilot valve is on the A port side.