Table of Contents

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

CL

Applicable bore size (mm) B C D d H Dd9 L d Part no. 0.040 0.076 0.040 0.076 0.050 0.093 14 0.050 0.093 0.040 0.076 0.040 0.076 0.040 0.076 CD-G02 CD-G25 CD-G03 CD-G04 NT-02 NT-03 NT-G04 20 25 32 40 20 25, 32 40 21 25.6 41.6 7.6 9.6 9.6 IY-G02 IY-G03 IY-G04 M8 x 1.25 5 6 8 20 25, 32 40 13 17 19 15.0 19.6 21.9 12.5 16.5 18 8 10 12 8 10 10 43.4 48 59.4 71.4 7.6 9.6 11.5 13.4 M10 x 1.25 M14

CM2

20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500 500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 95 (n 4) 2 15 + 40 (n 2) 2 80 + 40 (n 4) 2 85 + 40 (n 4) 2 (n 4) 2 (n 4) 2 D-M9/M9W 80 + 40 95 + 40 90 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

HRX-OM-Q026

/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40. 8-13 8.4.3 HRSH200-A-20/40. 8-14 8.4.4 HRSH250-A-20/40. 8-14 8.4.5 HRSH300-A-20/40. 8-15 8.4.6 HRSH100-W-20/40. 8-16 8.4.7 HRSH150-W-20/40. 8-16 8.4.8 HRSH200-W-20/40. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity

21

20 25 32 40 6.8 15 30 30 37 3.2 18.4 59 139 9 15 40 40 50 4 28 75 161 9 15 40 40 50 4 28 75 174 Use a thin wrench when tightening the piston rod.

mb1

with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5

70astamb1

with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5

Square Tube Type Air Cylinder Series MB1

Note) Pin, cotter pin and flat washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

CNG

32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg)

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20

Precautions 1

Retaining rings (cotter pins for 40) are included. Rod End Nut (mm) Trunnion Nut (mm) Mounting Nut (mm) H Material: Carbon steel Material: Carbon steel Material: Carbon steel d d B D D C C C D H B H B d Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 Applicable bore size 20 25, 32 40 B C D d H D d H C B d H B C D Part no. NT-02 NT-03 NT-04 Part no.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

150 stroke 20 20 10 10 2 3 4 5 3 4 5 40 40 32 32 Mass W (kg) Mass W (kg) 2 1 1 25 25 20 0.5 0.4 0.3 0.5 0.4 0.3 20 0.2 0.2 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 20 20 10 10 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) 40 2 2 32 D32 1 1 0.5 0.4 0.3

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

Sine Cylinder Series REC

MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width

MTS

180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

Vacuum Ejector Series ZM

40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure