70pvpump

SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example: Find

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Clip Circuit with light PR plate qChanging the piping direction from in-line to perpendicular (port on the valve) is possible on the VQZ100 series. Follow the steps below to change piping direction: Remove the fitting clips that hold the fitting and port plug in place.

E-P HYREG

mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate

VQC

19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

PA3000/5000/PAX1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

FH99

(Nominal size) Port size Hydraulic fluid Material 04 06 08 10 12 16 20 24 28 32 04 06 08 10 12 16 20 24 28 32 AL-128H AL-129H AL-131H AL-132H AL-134H AL-135H AL-136H AL-137H KA00813 (V120) AL-128H-V AL-129H-V AL-131H-V AL-132H-V AL-134H-V AL-135H-V AL-136H-V AL-137H-V KA00728 (V120) KA00815 (V85) KA00812 (V100) KA00813 (V120) KA00814 (V150) KA01800 (V175) KA00731 (V85) KA00727 (V100) KA00728

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

AC20-A to AC40-A

Standard Specifications AC20-A AC25-A AC30-A AC40-A AC40-06-A Model AF40-06-A AR40-06-A AL40-06-A AF40-A AR40-A AL40-A AF30-A AR30-A AL30-A AF30-A AR25-A AL30-A AF20-A AR20-A AL20-A Air filter Regulator Lubricator Component Port size Pressure gauge port size Fluid 3/4 1/8, 1/4 1/4, 3/8 1/8 1/4, 3/8 1/4, 3/8, 1/2 Air 5 to 60C (with no freezing) 1.5 MPa 1.0 MPa 0.05 to 0.7 MPa 5 m Class 1

99

{Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (

Series KC Self-seal Fittings

Component module KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBV2-06 2 KBE2-06 2 KBN2 1 KBN2 KBV1-06 KBE2-06 KBV2-06 5 Bracket: KBX(Page 87) Component module KB X 6 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1 1 KBP1 KBR2-1 Applicable thread size KBH2-R2R KBV2-06 KBP1 Type Bracket: KBX KBV1-06 Part No.

Booster Regulator Series VBA1110 to 4200 1

AM550-06, 10 P. 14-20-16 Mist separator 35 dB or more of noise reduction AMC310-03 AMC510-06 AMC610-10 Exhaust cleaner VBA2200-03 Air operated type VBAT05 (5 l, Directly connected to booster regulator) VBAT20 (20 l, Directly connected to booster regulator) VBAT38 (38 l, Directly connected to booster regulator) JIS Symbol Air tank VBAT10 (10 l, Directly connected to booster regulator) Handle

IIIIIIIIII

PSI -8 to 5 PSI -8 to 20 PSI -13 to 20 PSI 0 to 10 PSI 0 to 20 PSI, 3:1 RATIO 0 to 20 PSI, 5:1 RATIO XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX BARB OPTIONS ADJUSTING OPTION W/K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH SHAFT P80 = 1/16" ID BARBS P85 = 1/8" ID BARBS NOTE: UNITS COME STANDARD WITH STRAIGHT CONNECTIONS FOR 1/16" ID TUBING Back to Top .

VCL

VXA 2 1 VCHm Thread type 1 Rc NPT G Nil N F VDW Voltage VQ 1 2 3 4 7 8 J 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 48 VAC 230 VAC Port size LVM Class 3 v v v Class 2 v v Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 v v v v Symbol 01 02 03 04 06 VCA VCB Please consult with SMC regarding other voltages.

VZ3000

fittings VZ3 20-DIN terminal (D) VZ3 20-D-M5 3 4 5 3 4 5 C4 C6 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 C4: T0425 C6: T0604 3-3-23 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Solenoid Valve Base Mounted Series VZ3000 How to Order VK Light/Surge

Exhaust Cleaner Series AMC

1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

VXF

Series VXF How to Order VXF 2150 06 1 G Solenoid type Normally closed VXFA 2150 06 Air operated type Option Nil S Standard With silencer Refer to the table (2) below for availability.

VZ5000

Refer to page 3-13-4.) 20 or less 50 or less 10 3 Refer to the table below.

Hand Valve Series VH

-02 to 06 VH430-02 to 06 (Refer to figures of porting direction in the right.) 3 (Exhaust center) VH421-02 to 06 VH431-02 to 06 Rc3/4: 58(3.2) 2 position 3 position 3 4 2 1 2 (Position) VH422-02 to 06 VH432-02 to 06 N Flow direction 2(A) Flow direction 4(B) Flow direction 2(A) Flow direction 4(B) 90 45 45 Rc3/4: 185(10.2) 1 2 9.7 VH6 VH600-06, 10 3 (Closed center) 3/4, 1 Rc1: 194(10.5) 3