CM2

50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size (mm) 20 17 36 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 17 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 17 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 149 162 174 187 212 237 262 40 19 46 41 77 90 102 115 140 165

Table of Contents

17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8

Micro Mechanical Valve Series VM1000

Thickness 5, Width across flats 17 12 10 O.T.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Insert bushing Tubing 17-5-131

CL

17 21 21 16 16 18.5 27 30 31 37 40 35 35 39 15 17 17 21 21 16 16 18.5 84 90 98 116 126 98 98 106 11 11 11 11 11 16 16 18.5 8 0 0 0 0 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 51 58 58 71 72 110 110 120 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 11 11 14 17 17 30 24 26 22 19 22 237 245 254 262 296 305 315 324 379.5 402.5 382 405 419

42

Valve + Release valve spacer (VVQ4000-24A1 5 D) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve Spacer Valve + SUP stop valve spacer (VVQ4000-37A1 5 ) q AXT632-17-10 (M3 x 62) 3 1 w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

Prevents Micro-Bubbles

Refer to page 17-6-3 for Safety Instructions and 17-5-41 to 17-5-42 for High Purity Chemical Valve Precautions. Piping Caution 1. Connect tubing with special tools. Refer to pages 17-5-35 through 17-5-37 regarding tubing connection and special tools. 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below.

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CV/MVGQ

0 0.039 154 88 M32 x 2 42.5 21.5 M14 x 1.5 50 14.2 16 46.5 29.8 24 84.5 21 16 Up to 300 22 41 8 10 32 With Rod Boot h Bore (mm) B3 e f 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 17 81 93 106 131 25 37.5 50 75 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 17 85 97 110 135 25 37.5 50 75 32 36 77 12.5

CV/MVGQ

0 0.039 154 88 M32 x 2 42.5 21.5 M14 x 1.5 50 14.2 16 46.5 29.8 24 84.5 21 16 Up to 300 22 41 8 10 32 With Rod Boot h Bore (mm) f B3 e 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 81 93 106 131 25 37.5 50 75 17 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 77 12.5

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

KN Series Nozzles for Blowing

Weight (g) KNK-10-400 KNK-10-600 KNK-12-400 KNK-12-600 KNK-16-400 KNK-16-600 KNK-20-400 KNK-20-600 44 44 44 44 64 64 77 77 17 17 17 17 17 17 17 17 41.7 41.7 41.2 41.2 41.8 41.8 43.8 43.8 17 17 19 19 24 24 27 27 17 17 17 17 17 17 17 17 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 35 D 8.5 H2 H1 L1 M Pivoting nozzle with male thread/KNK (mm) Model Nozzle size D Connection thread L1 A Width across

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

60 44 18 25 14 17.5 9.5 18 9 47 160 8 44 77 10 20 M14 x 1.5 30 22 50 9 19 50 25 73 73 53 20 28 17 17 13 M10 x 1.5 20 11 52 172 10 53 88.5 12 22 M16 x 1.5 30 26 63 8 21 55 28 80 80 60 22.4 30 17 17 13 M10 x 1.5 22 11 55 190 10 60 95 12 25 M18 x 1.5 30 26 80 8 26 65 32 100 100 75 28 32 22 20 15 M12 x 1.75 26 13 65 207 12 75 115 14 29 M22 x 1.5 35 30 100 6.5 34 80 38 118 118 90 35.5 35 27 19

Tamper Proof and Flat Head Screw

6 18.2 40.7 R 1/4 17 1.5 36.7 18.5 7 AS221F-N02-05ST AS221F-02-08ST 18.2 3/16" 11.4 24.9 34.2 17 15.2 18.5 27.2 8 36.4 AS221F-N02-07ST AS221F-02-10ST 18.5 7 33.9 20 40.7 1.5 36.7 NPT1/4 17.5 1/4" 13.2 25.2 34.5 18.5 18.5 10 43.2 21 AS221F-N02-09ST AS321F-02-06ST 17 5/16" 15.2 27.2 36.4 12.8 6 27.8 39.3 33.9 43.2 20 21 AS221F-N02-11ST AS321F-02-08ST 3/8" 17.9 15.2 8 18.5 29.5 41 55.3 49.3

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

ZP

2.5 ZPY10CT 10 11 0.8 ZPY13CT 13 14 1 ZPY16CT 16 17 Dimensions of D are the same.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

DKeyway dimensions l b D (g6) D (g6) DD (h9) Port size Rc Model Model A B C F H J K S U W BA BB G M N UU L CA CB 20M8 x 1.25 Depth 8 144 (177) CRA1BW50 CRA1BS50 1/8 62 48 46 15 2.5 36 5 98 17 17 8.5 8.5 13 15 11 20 15 118 14 25 5 0 0.030 25 M10 x 1.5 Depth 12 163 (201.5) CRA1BW63 CRA1BS63 1/8 76 60 57 17 2.5 41 5 117 19.5 20 10 10 14 17 13 22 17 139 16 30 6 0 0.030 30 M12 x 1.75 Depth 13

CM2

300 101 to 150 151 to 200 201 to 300 20 68 81 93 106 131 12.5 25 37.5 50 75 143 156 168 181 206 36 17 25 72 85 97 110 135 12.5 25 37.5 50 75 147 160 172 185 210 36 17 32 72 85 97 110 135 12.5 25 37.5 50 75 149 162 174 187 212 36 17 40 77 90 102 115 140 12.5 25 37.5 50 75 181 194 206 219 244 46 19 Boss-cut With air cushion Built-in One-touch fitting (mm) Bore WA G With gaiter ZZ Bore WB P

VM

VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-02S-02S 1 4 1 4 1 4 17 VHK-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHK-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

140 14.5 10 17 160 13 10 17 180 14 10 17 200 14.5 10 17 D-Z7/Z80 D-A3/A44/A5/A6 D-A59W D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W D-F5BAL/F5NTL/F59F D-G39/K39 12 13 7 7.5 8 6 6 7 7 7 6 6 5 5.5 5 11 11 10 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.