Valve Mounting Direction: Solenoid on Same Side as A Port, Piping: Base Mounted, Stations: 12 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: Base Mounted, Stations: 12 Stations, A Port Size: M3X0.5 Type 41, S41, P R Port Thread: -

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

Digital Pressure Switch ( compatible)

Apply a tightening torque of 8 to 12 Nm.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper

CV/MVGQ

2-wire Connector RB Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) J IC circuit 5 V, 12 V Grommet 12 V 2-wire DConnector Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) -X Grommet 2-wire 12 V With diagnostic output (2-color indication) IC circuit 5 V, 12 V 4-wire (NPN) 20Lead wire length symbols

Rotary Gripper Series MRHQ

Confirm that this value is less than 1/20 of the effective torque. 20 x 9.8 x (m1 + m2) x H/1000 20 x 9.8 x (0.07 + 0.05) x 10/1000 = 0.24 Graph 3 12 x 10) IR = 2 x (20 + 30 + 12 x 10) x (0.07 + 0.05)/(12 x 10) (K = 2: Safety factor) =

Rotary Gripper Series MRHQ

Confirm that this value is less than 1/20 of the effective torque. 20 x 9.8 x (m1 + m2) x H/1000 20 x 9.8 x (0.07 + 0.05) x 10/1000 = 0.24 < Effective torque (Nm) Graph (3) 0.24 Nm < Effective torque OK Find the moment of inertia, "IR" for the load + attachments (2 pcs.) 7 IR = K x (a2 + b2 + 12h2) x (m1 + m2)/(12 x 106) IR = 2 x (202 + 302 + 12 x 102) x (0.07 + 0.05)/(12 x 106) = 0.05 kgm2

Digital Pressure Switch

Apply a tightening torque of 8 to 12 Nm.

HRX-OM-W032

Checking: Circulating fluid flow rate 12. Press the [SEL] key once. Display of the circulating fluid flow rate appears on the digital display. PV SV Circulating fluid flow rate of this product is displayed as a guide. Unit: L/min.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other

Modular F.R.L. Unit

Note 12) Consult P/A for detailed dimensions and available attachments and options. 21

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 +0.025 0 +0.025 0 +0.025 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.025

Wireless System

B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no.) * SY3200-5U1 2 sets (2-position double part no.) * EX600-DXPD 1 set I/O unit part no.

1

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

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(mm) 3.2 4 6 8 10 12 16 One-touch In/Out connection Possible to use in vacuum to 100kPa M3 Nylon One-touch Mini Series KJ M5 Soft nylon 1 8 Polyurethane Unions Applicable tube Metric size M5 One-touch In/Out connection Possible to use in vacuum to 100kPa M6 Nylon One-touch Fittings Series KQ2 1 8 Soft nylon 1 4 3 8 1 2 General purpose fitting Series Polyurethane Applicable tube Metric size

Process Pump

A PAF3410S-1S13 PAF3410S-1S19 4 5 10 x 8, 12 x 10, 3/8" x 1/4", 1/2" x 3/8" 12 x 10, 19 x 16, 1/2" x 3/8", 3/4" x 5/8" 115 118 Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

VCW

Port size VCW2 VCW20-12-01 1/8, 1/4 VCW30-12-02 1/4, 3/8 VCW3 VCW30-12-04 1/2 VCW40-12-02 Series 1/4, 3/8 VCW4 VCW30-12-04 1/2 2 3 4 Class 2 Class 3 Class 4 VCW40-12-06 3/4 Bracket material: Stainless steel Valve type Material and insulation type N.C.

Digital Flow Switch Series PFA For Air Series PFW For Water

to 24VDC + PFA30-(-M) 3 x 7.2 (= 21.6) Panel fitting dimensions 6.4 8-M3 36 +0.5 0 Sensor Blue Brown Black N.C. 1 2 3 4 1 2 3 4 36 +0.5 0 5 6 7 8 OUT1 OUT2 Load Load 12 to 24VDC + 5 6 7 8 PFA31-(-M) The applicable panel thickness is 1 to 3.2mm.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 D2 L2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM