VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Recommended flow rate Note) (l/min (ANR)) IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" Internal capacity (cm3) 1.7 Mass (g) ZA Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 4.3 1.7 ZR Metric size Easy installation

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

SQ1000/2000

P = 11.5 1 2 3 4 5 6 7 8 ... n: Stations 40.5 Silencer cover L Blanking plug (for One-touch fitting) Dimensions Applicable fitting size d 3.2 4 6 8 A 23 04 06 08 Model A L D KQ2PKQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 This is inserted into cylinder ports and SUP and EXH ports that are not used.

Table of Contents - Tubing

(Metric) How to Order TU 04 25 BU 20 Length per roll Tube O.D.

Table of Contents

MY3B25 Standard -X416 -X417 MY Stroke adjusting unit 0 to 16 32 to 48 16 to 32 L unit H unit MY3B40 Refer to the table below for applicable symbols.

CV/MVGQ

40 8 8 10 32 41 32 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 C J G5-S 10 9 10 40 45 40 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 9 10 40 45 40 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 CV 14 10 11 53 50 53 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 Dimensions by Stroke

CV/MVGQ

0 0.033 45 5.5 33.5 M26 x 1.5 13 30 70.5 15 6 M10 x 1.25 19.5 10 22 Up to 300 17 32 26 RS Q G 45 5.5 37.5 M26 x 1.5 13 34.5 76.5 15 6 M10 x 1.25 19.5 12 22 Up to 300 17 32 26 0 0.033 50 7 46.5 M32 x 2 16 42.5 84.5 21.5 8 M14 x 1.5 21 14 24 Up to 300 22 41 32 0 0.039 RS H A Z TZ TY TX TT TD S QY Q ZZ Bore size (mm) 20 25 32 40 RZQ 52 32 32 10 8 62 14 19.8 118 108 60 40 40 10 9 62 14 22 122

CA2

XC6 CA2 CA2W MK ML+ Adjustment CA2 Piston rod and rod end nut made of stainless steel Stroke MH + Stroke + Adjustment length CS1 ZZ + 2 strokes + Adjustment length (A: 25, B: 50) Specifications Action Cushion Double acting, Single/Double rod Air cushion C76 Bore size (mm) ZZ 180 197 205 253 267 MA 27 32 32 36 46 MK 12 15 15 20 20 MI 32 38 38 45 55 MH 45 49 49 66 69 ML 20 21 21 32 32 MM 14

Check Valve Series AK

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

13

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

0.4

P=17.5 1 2 3 4 5 6 7 8 n: Stations 53 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 04 06 08 10 Applicable fittings size d 4 6 8 10 A A L D Model KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 It is inserted into an unused cylinder port and SUP/EXH ports.

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

VQ7-6/7-8

03 04 Enter only when using for 2 position single or double.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

CC-Link Protocol Applicable system Volume 1(Edition 3.5) Volume 3(Edition 1.5) DP-V0 Ver.1.10 Version Note 1) GSD file EDS file Configuration file Note 3) SMJ1: 32/32 SMJ3: 32/32 (1 station, remote I/O stations) SMJ2: 32/32 SMJ4: 32/32 (1 station, remote I/O stations) I/O occupation area (Inputs/Outputs) SPR1: 0/32 SPR3: 0/16 SPR2: 0/32 SPR4: 0/16 SPR5: 0/32 SPR7: 0/16 SPR6: 0/32 SPR8:

KP/KPQ/KPG

T 04 06 08 10 12 4 6 8 10 12 VMG Construction Description Material Component Parts No. q w e r t y u i o !0 !

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Fluoropolymer Piping Equipment

" 1" x 7/8" 1/2" x 3/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 1" x 7/8" 3/4" x 5/8" 3/4" x 5/8" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 1/2" x 3/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/4" x 5/32" 3/8" x 1/4" 1/8" x 0.086" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/

Air Cylinder Series CA2

MQ Bore size (mm) A AL B B1 C CD CX CZ D E F G H1 J K KA L MM RHC 40 +0.3 +0.1 +0.058 0 30 27 60 22 44 29.5 16 32 10 15 8 M8 x 1.25 6 14 30 M14 x 1.5 15.0 10 50 +0.3 +0.1 +0.070 0 35 32 70 27 52 38 20 40 10 17 11 M8 x 1.25 7 18 35 M18 x 1.5 18.0 12 RZQ 63 +0.3 +0.1 +0.070 0 35 32 85 27 64 49 20 40 10 17 11 M10 x 1.25 7 18 40 M18 x 1.5 25.0 16 80 +0.3 +0.1 +0.084 0 40 37 102 32 78 61 25 52