1

slide table Series MX 20-MXS Series MXS CS1 C76 20-MXQ Series MXQ C85 20-MXW Series MXW C95 20-MXF Series MXF CP95 20-MXP Series MXP NCM Series MXP: 6, 10, 12, 16 NCA Bore size (mm) Accessory DSeries Application -X 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 Series variations Standard Copper-free Floating joint Series JA 20JA Standard type Data JB For compact cylinders Shock absorber Series

JXCx-OMX0009

(0410)h to (041F)h Step data (No.1) 16 (0420)h to (042F)h Step data (No.2) 16 . . . . . . . . . . . . . . . (07F0)h to (07FF)h Step data (No.63) 16 Please refer to the example of the following in a detailed address of each step data.

c

160 180 200 220 240 260 Operating temperature (oC) Inch size 20 TILM01 N Max. operating pressure (MPa) 1.2 D 1.0 Tubing designation Length per roll Symbol 10 20 50 100 16 33 2S 0.8 Type Length 10 m 20 m 50 m 100 m 16 m (50 ft) 33 m (100 ft) 2 m 0.6 Color indication F Symbol N R BU B Color Translucent Red (Translucent) Blue (Translucent) Black (Opaque) 0.4 Roll G 0.2 Straight 0.0 20 0 20

EtherNet/IP TM Compatible Fieldbus System

: Input unit is connected. 16 Output: SI unit (16 output) is connected. 32 Output: SI unit (32 output) is connected.

P

(mm) ZX Pad diameter (mm) Lock ring 1 2 10 to 16 20 to 32 02 04 2 4 -X19 With lock ring Without lock ring (10 or larger) ZR 3 40, 50 06 6 08 8 ZM Material 10 10 N S NBR Silicon rubber 13 13 ZH 16 16 U Urethane rubber Pad style 20 20 ZU F Fluorine rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 GSConductive silicon rubber (2 to 16) 40 40 D Deep ZL 50 50 B Bellows 20

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

JXCx-OMY0008

External Connections 20 5.1 PWR: Power supply connector 20 5.2 MOT: Motor connector, ENC: Encoder connector 20 5.3 SI: Serial I/O Connector 20 (1) Connecting the teaching box 20 (2) Connection with a PC 21 5.4 IN, OUT: EtherCAT communication connector 21 6.

Compact Cylinder with Air Cushion and Lock Series RLQ

YA 03 YA-03 YA-05 18 20 6.8 9 16 20 6 8 42 50 6.5 6.5 10 12 Applicable air cylinder bore Bore size (mm) 32, 40 50, 63 03 05 32, 40 50, 63 U V W Mass (g) Part No.

Electric Actuator Triple Axis P&P Unit

cable are included. 2) Sensors must be procured by the customer. 3) For motor details, please refer to Applicable motors on page 23. 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 11 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31

Compact manifold regulator ARM5 Series

L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

E-P HYREG ® Series VY1 1

VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated) (

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

Dual Speed Controller with One-touch Fitting Series ASD

ASV Inch size M1 L3 L2 AK Applicable tubing O.D. d D1 ASS L6 D2 L1 ASR D4 L4 H ASF (Hexagon width across flats) (Hexagon width across flats) D4 D3 A1 L5 A2 L6 T Inch Size Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T d 1/8" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" ASD230F-U10/32-01T ASD230F-U10/32-03T ASD230F-U10/32-05T ASD230F-U10/32-07T

reduces flow setting time

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs).

Cylinder with Lock Series CLS

107 58 M14 x 1.5 to 1400 50 47 161 78 18 2 160 110 146 128 36 20 212 112 255 16 114 64 M14 x 1.5 to 1400 56 53 182 95 23 5 180 132 169 144 40 20 236 118 275 18.5 130 74 M16 x 1.5 to 1400 (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA M MM N P S W H ZZ 15 31 19 M30 x 1.5 35 1/2 98 110 337 to 1400 15 31 19 M30 x 1.5 35 1/2 98 8 110 337 to 1400 17 36 22 M36 x 1.5 39 3/4 106 9 120 380

EXxx-OMN0027CN

8 ) 1 0 8DI 10h EX600-DXC1 (8 ) () 1 0 8DI 10h EX600-DXD (16 ) 2 0 16DI 11h EX600-DXE (16 ) 2 0 16DI 11h EX600-DXF (16 ) 2 0 16DI 11h EX600-DYB (8 ) 0 1 8DO 20h EX600-DYE (16 ) 0 2 16DO 21h EX600-DYE1 (24 ) 0 3 24DO 22h EX600-DYF (16 ) 0 2 16DO 21h EX600-DME (8/8 ) 1 1 8DX 30h EX600-DMF (8/8 ) 1 1 8DX 30h EX600-AXA 4 (2 byte/1 ) 0 2AI 51h (2 ) (2 ) 0 4 EX600-AYA (2 byte/1 ) 2AO 61h

PFxx-OMX0002

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH) 14 Fixed output 0: Normal output 1: Fixed output (Setting of output check) 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

PFxx-OMY0005

to 31 Pressure measured value With sign: 16 bit 32 to 47 Temperature measured value With sign: 16 bit 48 to 63 Flow measured value With sign: 16 bit 64 to 79 Accumulated flow rate lower limit Without sign: 32 bit 80 to 95 Accumulated flow rate upper limit Without sign: 32 bit Bit offset 95 94 93 92 91 90 89 88 87 86 85 84 83 82 81 80 Item Accumulated flow rate upper limit (PD) Bit offset

Process Pump

25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10 15 20 25 20 30 40 50 Discharge rate (L/min) Discharge