SMC Corporation of America
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ZH-OM00401 Contents Safety Instructions 2 How to Order 4 Operating Environment 6 Mounting 6 Piping 9 Air Supply 10 Model Selection 11 Ejector Characteristics 11 When Operating the Ejector 12 Identification 12 Construction 13 Specifications 13 Exhaust Characteristics / Flow Rate Characteristics (Representative Value) 14 Circuit Examples 16 Maintenance 18 Trouble shooting (Vacuum Adsorption

temperature (C) 1.0 MPa Precautions Burst pressure Refer to the burst pressure characteristics curve.

Note 2) Value of FEP tube. Union Elbow: KQG2L 2 x Applicable tube Note 2) Effective area (mm2) Applicable tube O.D.

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

Doc. no.CG1-OM0001G PRODUCT NAME STAINLESS STEEL CYLINDER MODEL / Series / Product Number C*G5*N**SR / V-* C*G5*A**SR / V-* Contents Safety Instructions P2 1. Specifications P6 1-1. Specifications 2. Installation and Handling P7 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Cushion 2-7. Control of direction 2-8. Auto switches 3.

P36201021 7 NBR Damper P36202026 P36202026 2.5 x 1 8 NBR O-ring 2 x 1.25 2 x 1.25 9 NBR O-ring 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 10 x 1.3 10 NBR O-ring 27.8 x 1.5 JISB2401 P11 JISB2401 P11 27.8 x 1.5 11 NBR O-ring JISB2401 P5 Note 2) JISB2401 P5 Note 2) 12 NBR O-ring JISB2401 P16 Note 2) JISB2401 P16 Note 2) 13 NBR Seal (A) P36203015 P36203015 14 NBR Seal (B) P36203016 P36203016

(IN OUT) 2 3 (OUT EXH) Flow characteristics Port size Valve model Grommet C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv 1 (IN), 2 (OUT) 3 (EXH) 3 8 1 2 3 4 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 21 0.39 5.8 28 0.36 7.6 26 0.35 7.0 VP3145 3 4 1.5 Weight (kg) Port size Effective area (mm2) Valve model Grommet 1 (IN), 2 (OUT) 3 (EXH) 1 2 (IN OUT) 230 280 310 570 650 650 2 3 (OUT EXH) 280 310

Refer to the Air servo cylinder operation manual (K35-OMW0030) for further details. 2 Contents Front cover.1 Contents . 3 Safety Instructions . 4 1. Installation / Piping / Wiring . 13 1-1. Installation . 13 1-2 Piping . 14 1-3. Wiring . 15 2. Movement Setting . 17 2-1. Piston Rod Movement Direction (DIP Switch No. 1) . 18 2-2. Bore size (DIP Switch No.2 to No.4) . 18 2-3.

Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.

(mm) Note) L P D Nylon Urethane 2-applicable tubing KGU04-01 KGU04-M5 4 11 20 12 11 21 34 M5 x 0.8 10.4 36 38 40 39.5 42 46 42.5 45.5 49 51 52.5 55.5 56.5 2.2 2.2 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 58.5 59 60.5 M5 x 0.8 13 1 8 1 4 3 8 1 8 17 12.8 12.8 6 13.4 10.6 14 17 25.6 17.7 15 23 35

voltage Valve size A: Non-locking extended type Nil Air operated Symbol Orifice size (mm) Symbol Port size Rc Valve size 1 1 2 4 1 2 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Symbol N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa B: Locking slotted type 3 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 4 7 1 5 6 24 VDC 12 VDC 7 240 VAC 50/60 Hz 15 (11) 2 Nil: Non-locking

No.D-S-OMJ0004-G PRODUCT NAME Solid State Auto Switch MODEL / Series / Product Number D-M9## D-M9#W# D-M9#E# Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 12 Installation 12 Maintenance 14 Troubleshooting 15 Specifications 23 Dimensions 25 -1No.D-S-OMJ0004-G Safety Instructions

F 8000 -32767 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -23No.EX-OMN0037CN-A -24No.EX-OMN0037CN-A EX600-AY A M12 (5 )2 2 M12 (4 ) No. 1 LED 2 () 3 4 5 () -25No.EX-OMN0037CN-A 1 24 V() 2 3 0 V() 4 0 V() 5 FE M12 (4 ) 1 24 V 2 D/A DC24 V 34 0 V 5 FE FE 1 k 600 IP67

" 3 16 " 1 4 " 3 8 " 1 2 0604 0805 0806 1065 1075 A07 A11 A13 B05 B07 B11 B13 Metric size G Green C Note) Clear Inch size Note) Polyurethane only. 13-10-6

10-/1121-/22Series CJ2 Air cylinder / 6, 10, 16 How to Order Cushion Clean Series 10 11 Relief type Vacuum suction type Rubber bumper (Standard) Air cushion (except 6) Nil A 10 D L 16 60 A R C J 2 H7B 21 D L 16 60 C J 2 H7B R Mounting style Head cover port location Basic style Axial foot style Rod side flange style Symbol Bore size (mm) B L F 6 10,16 Perpendicular to the cylinder axis Nil

S=5.0XC Q = [dm 3/min(ANR)] S [mm 2] P1 [MPa] P2 [MPa] t = [] ) ) ) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy 1) OFF DC 3% AC 8% 2) 3) 1 1-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 1-2) 1-3) 10 No.VQ1000V-OMV0001 2 2-1) 2-2) 2-3) 2-4) Assy 3R 1set 200cc (at 0.5MPa) 3-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3-2) 4 11 No.VQ1000V-OMV0001

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.

Phillips screwdriver Tightening torque: 0.6+/-0.05 N m O-ring Component "A" Mounting screws (2 pcs.) Product (15) Plug assembly -24- 11. Disassembly Drawing 11-1.

LVQ30 3/8 Brand X 12.7 3.0 -737mmHg~71psi 2~65C 0~40psi 103.1 11 1.8 73.2 Manufacturer Orifice Size Cv Factor Operating Press. Range Operating Temp.