IDX-OM-O004C

MAKER MADE IN i.3 HFC i 6 i i.4 / 1 1.5 () i 7 1. 1 1.1 () 1 1 1.

Precautions 1

Auto switch mounting Bore size (mm) 40 32 25 20 D-A9 D-M9 D-M9W Note 1) Note 1) Note 1) Note 1) 1 BM2-040 1 BM2-032 1 BM2-025 1 BM2-020 2 BJ3-1 2 BJ3-1 2 BJ3-1 2 BJ3-1 D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7NF BM2-040 BM2-032 BM2-025 BM2-020 D-B5/B64 D-B59W D-G5NTL D-G5NBL BA2-040 BA2-032 BA2-025 BA2-020 Note 1) Two kinds of auto switch mounting brackets are used as a set.

CLK1

Operating Environment Lubrication Piping Caution Caution Warning 1. Lubrication of cylinder The cylinder has been lubricated for life at the factory and can be used without any further lubrication. 1. Do not use in environments where there is a danger of corrosion. 1.

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

Low Friction Cylinders Series MQ

1 !

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Improved durability under a high pressure environment with a polyurethane elastomer poppet How to Order Valve type 1 D G VCH410 06 Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) Voltage 1 2 3 4 5 6 100 VAC 200 VAC Port size 110 VAC 04 06 10 1/2 1 220 VAC 3 3/4 24 VDC 1 1 2 12 VDC Consult with SMC for other voltages.

CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.

21

Foot 2 CM-L020B CM-L032B CM-L040B 2 foots, 1 mounting nut Flange 1 CM-F020B CM-F032B CM-F040B 1 flange Single clevis 1 CM-C020B CM-C032B CM-C040B 1 single clevis, 3 liners Double clevis (with pin) 1 double clevis, 3 liners, 1 clevis pin, 2 retaining rings 1 trunnion, 1 trunnion nut 1 CM-D020B CM-D032B CM-D040B Caution Trunnion (with nut) CM3-T020B CM3-T032B CM3-T040B 1 1.

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

Compact Cylinder

Load Switch 1 Load Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from switch is 1 mA. Power supply Residual Load voltage at ON = voltage voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Example: Power supply is 24 VDC.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

0.01

4, G 1/4 NPT 1/4 Rc 1/4, G 1/4 NPT 1/4 Female thread Rc 1/4, G 1/4, NPT 1/4 Resin Case material Resin Aluminum Stainless steel Air (Nitrogen) Fluid 0.01 m (filtration efficiency: 99.99%) Note) Nominal filtration rating Initial pressure drop 0.03 MPa (at inlet pressure 0.7 MPa, maximum flow) Maximum operating pressure (at 20C) 1.0 MPa (in case of nitrogen: 0.99 MPa) 5 to 45C Operating

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

Cylinder with Lock Series MNB

2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !1 $7 o $8 e $1 !2 Section B Section C 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Parts list Description Material Note Parts list No. No.

VCB

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult SMC regarding other voltages.

Common Supply Regulator

Standard Specifications AR40M-D AR20M-D AR30M-D Model IN OUT IN OUT IN OUT 1/8 1/8 1/8 1/4 1/4 1/4 1/4 Port size 1/4 3/8 1/4 3/8 3/8 1/4 1/2 3/8 Pressure gauge port size Note 1) 1/8 1.5 MPa -5 to 60C (No freezing) Air Fluid Ambient and fluid temperature Note 2) Proof pressure 1.0 MPa Max. operatin pressure Without backflow function 0.05 to 0.85 MPa Set pressure range With backflow function

PFxx-OMP0001CN

F99] <> [F99] [F99][ini] [ini][] [oFF] [on] 5 [F99] -53No.PF-OMP0001CN-F / ()() 1[Hi][] 1 1[Lo][] 1 1 () 1 // 1() -54No.PF-OMP0001CN-F [LoC][][LoC] 1[LoC]1 < -> 5[UnL] [F 0] [LoC] 5 [LoC] [UnL] -55No.PF-OMP0001CN-F < -> [F81] 5 [UnL] [F 0] [LoC] 5 [LoC] [UnL] ( ) [000] 1 [UnL] [FAL] 3 [LoC] /30 -56No.PF-OMP0001CN-F [000] <> [UnL] 5 ( ) 1 1 -57No.PF-OMP0001CN-F

ITV

ITV301l 0.005 to 0.1MPa ITV303l 0.005 to 0.5MPa 1.12-1 1/4, 3/8, 1/2 ITV305l 0.005 to 0.9MPa Series ITV209l Controls vacuum pressure steplessly in proportion to an electric signal.

Compact Cylinder with Lock Series CLQ

Unlocking port: Air supplied 1.

ATX-OM-F003E

#1 (1 pc.) 42047#1 (1 pc.) 42047#1 (1 pc.) 42047#1 (1 pc.) 42074#1 (1 pc.)