IR1000/2000/3000

In this way fine pressure variations are detected by the nozzle/flapper type pilot mechanism, and precise pressure adjustment is performed. q i o !4 !5 o SUP side passage OUT side passage SUP side passage !5 OUT side passage IN q IN q w y Bleed Bleed !1 !3 !2 e w r Exhaust SUP(1) OUT(2) SUP(1) OUT(2) u !0 !2 !

VCA

size (S) PB Port size G1/2 Compatible heavy-duty cord Cable O.D. 6 to 12 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B Model A C D E F K L M Grommet: G Conduit: C DIN terminal: D Conduit terminal: T S 68 71 74 74 U 81 91.5 101 103.5 S 51 54 57 57 Q 98 101 104 104 R 36 44 53 55.5 R 40 48 56 58.5 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42 51 53.5

Vacuum Equipment

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.

Series VQ Metal Seal/Rubber Seal Body Ported

Description Note q Material No.

80

Body material: Aluminum, PPS resin, Brass, Stainless steel Body material: PPS resin (One-touch fitting type) u y t r e w q u y t r e w q OUT 2 IN 1 OUT 2 IN 1 i Component Parts Component Parts No. Description Solenoid coil Fixed armature Tube Return spring Armature assembly Seal Body No.

KJ

(mm) 2 Effective area (mm2) Weight (g) D L Q Model D KJT02-00 6 10 4.9 8.8 0.9 1.7 Q Q 3.2 5.2 Q M Q L D D M M L L Male branch tee: KJY T H A Applicable tubing O.D.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 q e w t !2 !4 !3 e !0 q o Spring acting/Spring return/With auto switch (Built-in magnet) Single acting/Spring extend/With auto switch (Built-in magnet) 12, 16 !2 t w !4 y i !1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

Title not found

q Check that actuator label for model number.

Series AP3500

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

CV/MVGQ

CM-T020B 10-15-34 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVM3 Construction Spring return RE A B REC CX CY MQQ M Spring extend RHC MK(2) RS Q G Built-in One-touch fitting RS H A RZQ MI W S CEP1 CE1 CE2 DIN terminal ML2B Component Parts C J G5-S Note Material No. Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CNS

2 %5r CNA CNS Description Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

C95

9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

VM

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

Cylinder with Lock Series CNS

.: GR-S-010 (10 g), GR-S-020 (20 g) Individual -X 763 Series CNS Dimensions Basic style (B): CNSB 2 x MA Thread effective depth R Rc BQ plug with breathing hole BC element CL M GA T G G FA GB BP (Rc, NPT, G) Unlocking port 2 x P (Rc, NPT, G) Cylinder port GL GR Width across flats KA MM Q D EA E C B V C B AL A K F VA BN N N 4 x J M H S + Stroke ZZ + Stroke With rod boot 75 40 l h + l ZZ1 +

KR

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

RSH/RS1H

9 u #0 #6 t #8 q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !2 #7 #4 #7 @2 e #5 #3 @8 #7 #7 #1 @8 w 10-9-6 6 Heavy Duty Stopper Cylinder Series RSH/RS1H Construction Component Parts (For single acting) No.

KP/KPQ/KPG

-00 KPGU12-00 20.9 57.2 32.9 20.9 18.1 25 58 46 32 Q Note 1) D indicates the maximum diameter.

Soft Start-up Valve

The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. q r w Exhaust OFF t e 6 A AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

2/3 Port Valve for Various

Series VXP21/22/23 Dimensions (Orifice Size: 15 mm, 20 mm, 25 mm) Normally Closed:VXP2140/2150/2260 Normally Open:VXP2142/2152/2262 Grommet: G Conduit: C Port size Mounting hole Conduit terminal: T P Port size Rc VXP2140 Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A b 39 45.5 49.5 e 57 62 67 Q 39 39 41.5 Q 23 23 25.5