P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

phase to 100 5 phase to 30 2 phase to 30 5 phase to 80 2 phase to 80 Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Capacity LXFHABC LXFHABD to 50 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 Tamagawa Seiki Co., Ltd. to 100 Matsushita Electric Industrial Co., Ltd. to 50 Mitsubishi Electric Corporation Yaskawa Electric Corporation 30W

RQ

Basic style (Through-hole) Both ends tapped style: RQA/RDQA Both Ends Tapped Style OA threads RA RA Bore size (mm) OA RA 63 80 100 M10 x 1.5 18 M12 x 1.75 22 M12 x 1.75 22 H thread effective depth C 4-N through 2 x 4-OB depth of counter bore RB Approx.

MQQ

2 x 4-OB Counterbore depth RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 28 H thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5

Compact Cylinder with Air Cushion Series RQ

Basic style (Through-hole) Both ends tapped style: RQA/RDQA RA RA OA threads Both Ends Tapped Style mm Bore size (mm) RA OA 63 80 100 M10 x 1.5 18 M12 x 1.75 22 M12 x 1.75 22 Auto switch Minimum bending radius for lead wire 10 H thread effective depth C 4 x N through F Q 2 x 4 x OB depth of counter bore RB 2 x P (Rc, NPT, G) (Port size) 2 x cushion needle I D Z M E L B + Stroke A + Stroke

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 Model MHS2-16D MHS2-20D MHS2-25D +0.025 0 +0.025 0 +0.025 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.025 0 17H9 21H9 26H9 549 Series MHS2 Dimensions MHS2-32D/40D 2 x SA through RA AA SB counterbore 9 (Mounting hole) 6.4 AB 35 3 35 RA 5 VA depth VB 8 NA RB B RB XA depth XB 8h9 0 -0.036 2 x UA thread depth UB (Mounting thread) Q 4.5 20 20

Rotary Table/Rack & Pinion Style Series MSQ

c oc ra o t cl cl en nt er er e tm m nt nt e is 0 u us t 0 u C w us o o k lo c o C dj C l 19 C 19 dj se c Cl A k A A wi w oc e e dj A ck is ng ng k dj o u wi e Cl st us se ro ra ra m ta ro t m ta ti d e ti n o on e n n e n nt nt en tio tio d ra ra 5 n n g ta e ta 9 g e 5 9 ro ro m m u u im im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

MQQ

0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54

MQQ

2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W E K L B + Stroke M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) OA A B C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40

Electro-Pneumatic Positioner

Main shaft Double action actuator OUT2 Main shaft Single action actuator X OUT1 OUT2 OUT1 X SUP The cam of the positioner should be set on the RA surface. SUP SUP The cam of the positioner should be set on the RA surface. The cam of the positioner should be set on the RA surface. IN + IN + IN + OUT1 is plugged.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

LX Series Compact Electric Actuators

mberwhenoldenngduetoSpecia|prodlct' Nole 2i AC seruo rnotor equ pped modeldoes not have molorcover AC servo motor model external view x12 100vAc 20OVAC 100vAc 30w 200v 30w 200vAc -x19 30w 100vAc x l 5 a f Sefies tJ( tlBcfll'icAcumm $tm!

CQS

L1 14 15.5 18.5 22.5 Bore size (mm) 12 16 20 25 H1 C1 X L1 24 25.5 28.5 32.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 9 10 12 15 10.5 12 14 17.5 Basic Style Long stroke range (mm) 35 to 100 35 to 100 75 to 200 75 to 300 Standard stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Long stroke Standard stroke Without auto switch With auto switch A 20.5 20.5 24 27.5 Bore size (mm) E C OA D OB Q RA

VEX1

(RA: Non releif regulator) Construction VEX AN AMC Component Parts Description No. q w e r t y u i o !0 !

Escapements Series MIW/MIS

(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

OA B C DA FA Standard stroke (mm) 63 80 100 77 96.5 116 20 25 30 10 12 15 39 45.5 55.5 103 121.5 145 M10 M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA

E,R.L.

ra! -/ Flltr u I Regdeto.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Driver Servo amplifier Servo amplifier Driver 24VDC 24VDC DOCOM DOCOM DICOM DICOM Control Control output output signal RA signal RA When the cable is not tightened enough to the terminal block (connector), the cable or terminal block (connector) may generate heat because of the poor contact.

Rotary Table/

of bottom positioning pin hole Position of bottom positioning pin hole Symmetric type For 180 For 90 Positioning pin hole Positioning pin hole 3 Counter-clockwise 3 B port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s u 3 i ni w n k im C c ra l o Mi 6 3 8 n ax o 1 ti ta M ro e m g u m ni n Mi e ra 180 C s l i o

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10 12 15 25.5 10.5 12 14 17.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 45.5 13.5 20.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 5.4 5.4 7 10 25.5 34 45.5 13.5 20.5 24 29.5 55.5 59 14.5 15 19.5 37.5 32.5 27.5 22.5 Inch Long stroke L1 21.5 21.5 22.5 24.5 Standard H OA Bore (mm) Bore (mm) OB Q RA

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5