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System Error If the error can not be reset after the above measures are taken, then please contact SMC. -54NO.TQ1050188-OM002 Specification Specifications Rated pressure range 100 to -100 kPa Set pressure range 105 to -105 kPa Proof pressure 500 kPa Smallest settable increment 0.1 kPa Applicable fluid Air Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (Protected against reverse

Note 2: For guidance on the Fluorocarbon Emission Control Law, please visit our website below. https://www.smcworld.com/products/ja/freon/ 7.2 Refrigerant and GWP value IDF60/70/80/90 Series 7-2 J N M L O K H IDX-OM-V022 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Unit: mm Model Port Size A B C D

Address in the unit Example: byte 0, bit 4 Content of diagnostic Unit status * Content of diagnostics N: Normal Error is not detected O: Bit Open Load is not connected (disabled at initial status) S: Bit Short Short circuit of the load output is detected L: Limit Over Contact operation exceeded the limit (disabled at initial status) P: Power Short Short circuit of the load power supply is

Air Slide Table Series MXS How to Order AS FR M9BW MXS 12 50 Air slide table Number of auto switches Port thread type 2 pcs. 1 pc. n pcs. Nil S n 6 to 16 M thread Rc NPT G Made to order For details refer to page 55. Nii TN TF 20, 25 Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch models, refer to the table below.

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max. ON-flow 0.01 /2B, 6 11/2B, 21 0 0 0.2 0.4 0.6 0.8 1.0 Pressure (MPa) 1 2 3 4 5 Flow speed (m/s) Precautions Be sure to read before handling.

For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

port type Nil Rc Valve stations N NPT 1 Common EXH Bottom Side P Side Side A E T NPTF Side Side 1 0 G F Option 05 5 stations 10 10 stations Dimensions 65 (89.5) [68] 2-7 91 (115.5) [94] Mounting hole n-Rc 1 4 4-Rc 3 8 ( ): DC [ ]: AC, with indicator light n L L1 L2 2 87 100 3 125 138 4 163 176 5 201 214 6 239 252 7 277 290 8 315 328 9 353 366 10 391 404 L1 = 38n + 11, L2 = 38n + 24 n

L-bracket (Brackets on both sides) L L x n pcs. + J x 2 L x n pcs. + K x 2 Long clamping screw set which is required for assembly needs to be ordered separately. Refer to page 224.

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display

Valve; Stop Valve: None), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

M N M N M M N Q L K J H F E D C B A P Applicable thread Pc Normally open Normally closed VXP2270 VXP2380 VXP2390 VXP2272 1 43.5 46.5 52 51.5 54.5 59 53 60 71 67.5 72 81 48 50 50 95 97 97 62 64 64 125 132 150 128 (145) 144 (159) 160 (175) 26.5 30 35.5 57.5 60 69 23 25.5 25.5 35 40 40 92 (102) 103 (113) 114 (124) 25.5 28 28 84 (94 ) 95 (105) 106 (117 ) 41.5 84 (94) 95(105) 106(117) 60 62 62

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

Plug (Prepared by customer) L N E [Accessory] Power supply connector N Earth leakage breaker (Secondary side) E L Cable Crimped terminal (Prepared by customer) N E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-R016 Chapter 3 Transport and Setting Up Wiring 1.

pcs. (2 or more) switches (Horizontal) 1 pc. 24 or more 31 0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 0.4 31 0 0.4 4 x R2 or less 4 x R2 or less Secure mounting of n pcs. (2 or more) switches (Vertical) 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) PFM PFMV PF2A PF2W PF2D IF 4 x R2 or less Note) If a bend (R) is used, limit it to R2 or less.