JIS Standard Compact Hydraulic Cylinder

-wire (PNP) 2-wire 12 V 3-wire (NPN) Diagnostic indication (2-color indicator) 5 V, 12 V IC circuit Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 12 V 3-wire (NPN) 5 V, 12 V 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 A96V A96 5 V 3-wire (NPN) 100 V IC circuit 24 V Yes A93V 2 A90V A93 Grommet Relay PLC 2-wire 12 V A90 No IC circuit

PSxx-OMV0003CN

(Er1,2) () ( ) (Er1,2) (Er0,4,6,7,8,9) DC1230 V DC1230 V (Er0,4,6,7,8,9 ) 6 "HHH" (HHH) "LLL" (Er3) (LLL) (Er3) 7 F.S.(3.5F.S.) DC1230 V DC1230 V DC(+) DC(-) 7 -76No.PS-OMV0003CN-G No.

CL

Lead wire (m) Load voltage Indicator light Pre-wire connector Wiring (Output) Special function Type Electrical entry Data Applicable load Auto switch model 3 (L) 5 (Z) None (N) 0.5 (Nil) AC DC 3-wire (NPN equivalent) IC circuit C76 5 V Reed switch Solid state switch Grommet B54 C73 C73C B59W H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA H7NF 100 V, 200 V 100 V 12 V Yes Yes Relay, PLC 24 V 2-

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

A96V IC circuit Reed switch 5 V A96 Yes Grommet 2-wire IC circuit Relay, PLC A90V A93V A90 A93 100 V 5 V, 12 V 12 V 24 V No Yes *Solid state switches marked with a symbol are produced upon receipt of order. *39 in (1 m: M): Available in the D-M9W(V) only. *Lead wire length symbols: 20in (0.5 m) Nil (Example) M9NW 39in (1 m) M M9NWM 118in (3 m) L M9NWL 197in (5 m) Z M9NWZ 1

AC Servo Motor Driver (CC-Link Type)

power supply input terminal (U, V, W) to the driver power terminal (U, V, W) Connect the motor ground terminal to the driver ground terminal.

Multi-channel Digital Sensor Monitor ( compatible)

PSE202A-(M)# IO-Link/NPN open collector 1 output + NPN open collector 4 output specification When used as an IO-Link device Max. 30 V, 80 mA Residual voltage 1.5 V or less When used as a switch output device Max. 80 mA Residual voltage 1.5 V or less -18No.PS-OMW0012-C PSE203A-(M)# IO-Link/PNP open collector 1 output + PNP open collector 4 output specification Used as IO-Link device Max. 30

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M M9NWM 3 m L M9NWL 5 m Z M9NWZ 1

SI unit for DeviceNet ®

Bus cable type Baud rate Total main line length Branch line length Total main and branch line length 500 kbps 100 m max. 39 m max. Thick 250 kbps 250 m max. 78 m max. 6 m max. 125 kbps 500 m max. 156 m max. Thin Common 100 m max.

Pin Cylinder: Double Acting, Single Rod Series CJP2 ø4, ø6, ø10, ø16

Yes A93 A93V 100 V 12 V Grommet Relay, PLC 24 V 2-wire A90 A90V No 5 V, 12 V IC circuit 100 V or less The D-A9(V) switch is not attachable to 4. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M M9NWM 3 m L M9NWL 5 m Z M9NWZ Auto switches marked with are made to order specification. For details about auto switches with pre-wired connector, refer to pages 1328 to 1329.

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

) 5 V IC circuit A76H A96 A72 A73 A80 A73C A80C A79W A93 A90 C73C C80C A72H A73H A80H 200 V Yes Grommet 100 V 100 V or less 24 V or less Relay, PLC 2-wire 12 V IC circuit Yes No 24V Connector IC circuit No Yes Diagnostic indication (2-color indication) Grommet (Example) M9NW (Example) M9NWM (Example) M9NWL (Example) M9NWZ (Example) H7CN Nil M L Z N Since there are other applicable

CEx-OMG0106

Dynamic Load Impact Loading, We=1.4x10xVaxW=1.4x10x0.25x15=52.5N C M3max=3.5Nm (Checked with V=1.4xVa) M 3=WexL2x 1 =52.5x0.05x 1 =0.88Nm 3 3 M 3 0.88 Load Rate a3= = =0.25 M 3max 3.5 D M1max=12Nm (Checked with V=1.4xVa) 1 1 M 1=WexL1x =52.5x0.05x =0.88Nm 3 3 M 1 0.88 Load Rate a4= = =0.073 M 1max 12 4.

SZ3000

Solenoid Specifications L type (for plug-in), M type plug connector (M) Electrical entry Rated coil voltage V Note) 24, 12, 6, 5, 3DC 10% of rated voltage Allowable voltage fluctuation 0.6 (with light: 0.65) Power consumption W Diode Surge voltage suppressor LED Indicator light Note) Only 24V and 12VDC are available for plug-in use.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Symbol (B) 2 (A) 4 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Valve model Port size Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 3 (L) Applicable load AC DC 12 V In-line A93 Reed auto switch 2-wire Grommet Yes Relay, PLC 100 V 24 V M9N 3-wire (NPN) 12 V Solid state auto switch Grommet Yes Relay, PLC 24 V M9B 2-wire 12 V Lead wire length symbols 0.5 mNil

Series VQ Base Mounted Metal Seal/Rubber Seal

LO: L plug connector G: Grommet 2 position double 2 SX With lead wire Without connector 3 position closed center VK 3 VZ M: M plug connector MO: M plug connector With lead wire 3 position exhaust center VF Without connector 4 1 set (F kit 7 station manifold base No.) 3 set (Single solenoid No.) 2 set (Double solenoid No.) 2 set (3 position solenoid No.)

AIR COMBINATION

(Switch body only)] Note 3 NPN output Wiring top entry ISE35-R-25-MLAISE35-R-25-M (Switch body only)] Note 3 Digital pressure switch PNP output Wiring bottom entry ISE35-N-65-MLAISE35-N-65-M (Switch body only)] Note 3 PNP output Wiring top entry ISE35-R-65-MLAISE35-R-65-M (Switch body only)] Note 3 N.C.

13

ejector and switch valve to pad (m) V : Piping capacity from ejector and switching valve to pad (l) Q2: Max. flow from ejector and switching valve to pad by piping system Q2 = S x 11.1 l/min (ANR) Q : Smaller one between the Q1 and Q2 l/min (ANR) S : Effective area of piping (mm 2) Tubing length (m) How to read the graph Example: Tubing size 8/6, 1 m Calculation of average adsorption flow

Digital Flow Switch (Integrated display type)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

Micro-Mist Separator with Prefilter Series AMH

(ANR) c V -~ AM~4S0 E V ;;2 1 -E t~ AM~350 ~ ~ 2 ~05 -tV 'ct! AM~2S0 1. Select the point of contact A of inlet pressure and max. air flow capacity in the graph. V j.--v v V AMl,so 0.2 Ij.--~ V I 2.Select the type whose max. air flow capacity is over that point; AMH650. 0.2 0.4 0.6 0.8 1.0 tnlet air pressure MPa SeriesAMH How to Order .

Digital Flow Switch (Integrated display type) ( compatible)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H A function to store the accumulated flow value in the products internal memory. The flow value will be stored at a set time interval of either 2 or 5 minutes.