CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

Aluminum High Vacuum Angle Valve

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m.

MNB

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG

MNB

m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG

ZP

N A B C D E M Y E N Y A B C D M Model Model ZPY20B--A10 ZPY40B-6-A14 51.5 12.4 25 23.5 33.5 20 22 16 62 24.4 48 40 43 34 44 10.5 ZPY25B--A10 ZPY50B-6-A14 50 53 38 48 66 32.4 57 19 52 15.6 28 24 34 25 27 ZPY32B--A10 32 34 29 39 57 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20

Plug-in Unit

Black White @4 5 or less Insulation resistance, M/km, 20C White None @5 Note) The minimum inside bending radius for each cable is 20 mm.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A Bore size (mm) 32 40 50 63 80 100 125 H 0.5 0 0.1 C DH7 FH11 L M N P 15 32.5 10.5 22 10 14 30 6.6 45 10.5 5.5 5 38 12 25 12 16 18 35 6.6 55 11 5.5 5 51 15 21 20 46.5 27 16 40 9 65 15 6.5 5 56.5 15 32 16 21 23 45 9 75 15 6.5 5 70 27 72 18 36 20 25 45 11 95 18 10 5 89 18 41 20 25 30 55 11 115 18 10 5 40 110 25 50 30 37 60 13.5 140 20 10 7 100 Black color 81 Series CP96/C96 Dimensions

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

plug connector (M) 0.45 0.6 (Option) 100V AC 200V AC 110V AC 220V AC (A) 2 VQ M plug connector (M) VQZ 1 (P) 3 (R) N.O.

17

MY2 H/HT m MY3A MY3B 60 MY3M (1550) MY1B40 50 L (1350) 40 MY1B32 Mass m (kg) (1100) 30 MY1B25 m L 20 m 10 0 5000 4500 4000 3500 3000 2500 2000 1500 1000 500 0 Support spacing L (mm) L L Caution D1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting it.

Compact Cylinder

Lead wire length symbols: 0.5 m Nil (Example) M9NW Solid state auto switches marked with v are produced upon receipt of order. 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ For details about auto switches with pre-wired connector, refer to the WEB catalog or Best Pneumatics.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B m (800) MY3M 50 L (600) 40 m L 30 MY1H40 (550) Mass m (kg) m MY1H32 20 L L MY1H25 10 Caution 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting it.

3 Port Solenoid Valve Series SYJ300/500/700

Applicable tubing O.D.: 4, 5/32" 20 5 A A (Pitch) P=10.5 15.5 M5 x 0.8 (A port) L plug connector (L) M plug connector (M) M8 connector (W0) Approx. 300 (Lead wire length) 48.5 [55.5] 33.1 53 35.5 59.6 [66.6] Approx. 300 (Lead wire length) 62.8 [65] 53 [55.2] 61.9 54.5 48 Refer to the page 68 for dimensions with connector cable.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

MRQ 1 3 7 20 MSUA1 MSUA3 MSUA7 MSUA20 Electrical entry/Lead wire length DNil L C CL CN Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m Connector/Lead wire: 0.5 m Connector/Lead wire: 3 m Connector/Without lead wire 20Rotating angle Symbol Applicable Rotating angle Available only with R73, R80 and T79 type connectors. Lead wire with connector part nos.

JA/JAH/JB/JS

-20-250 JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 24.5 26.5 33 38 51 62.5 80.5 101 129 149 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 7 7 8 9 13 15 18 24 38 42 3 4.5 5 6 8.5 10 16 21 18 20 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 0.02 0.02 0.04 0.07 0.15

JA/JAH/JB/JS

Up to 3.5 MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5

CRBB-OM00004

How to Order With vertical auto switch unit Shaft Type Lead wire length Size Nil Grommet / Lead wire: 0.5 m Double shaft with single flat (Sizes: 10 to 30) Long shaft end key, Short shaft with single flat (Size: 40) 10 15 20 30 40 M Grommet / Lead wire: 1 m W L Grommet / Lead wire: 3 m CN Connector / Without lead wire C Connector / Lead wire: 0.5 m Rotation angele Number of auto switches

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS32 LEKFS40 1000 1000 1000 800 800 800 L7 [mm] L8 [mm] L7 [mm] L8 [mm] L7 [mm] L8 [mm] 600 600 600 Y 400 400 400 200 200 Mey m 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work

Non-contact Gripper

C 16.5 L H L H 4 x M depth ML 4 x M depth ML L L 16.5 (mm) Part no.

Microspeed Cylinder

/single rod Double acting Action CY1B: 6 10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to