Vacuum Pad

P.49 Features 2 : Series ZP3 (: Series ZP2 C: Series ZP Vacuum Pads Series ZP3/ZP2/ZP Pad Diameter List New New Pad type Symbol 0.8 1.1 1.5 2 3 3.5 4 5 6 7 8 9 10 11 13 14 15 Note) C ( C U C C C C ( Note) Note) Note) Note) Note) Note) Note) Note) MU ( ( ( ( ( ( ( ( Flat Note) Note) Note) EU ( ( ( ( ( Note) AU ( ( ( ( ( Flat with rib C C C ( ( ( Flat with groove UM Thin flat UT C C ( (

Vacuum Pad

P.49 Features 2 : Series ZP3 (: Series ZP2 C: Series ZP Vacuum Pads Series ZP3/ZP2/ZP Pad Diameter List New New Pad type Symbol 0.8 1.1 1.5 2 3 3.5 4 5 6 7 8 9 10 11 13 14 15 Note) C ( C U C C C C ( Note) Note) Note) Note) Note) Note) Note) Note) MU ( ( ( ( ( ( ( ( Flat Note) Note) Note) EU ( ( ( ( ( Note) AU ( ( ( ( ( Flat with rib C C C ( ( ( Flat with groove UM Thin flat UT C C ( (

VFS

required for mounting (stations) 2 2 2 2 2 2 2 1 Porting specifications (A, B) Passage EA, EB P 10 10 stations Symbol Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations 1 Side 2 Bottom Common Common Please indicate manifold base type, corresponding valve, and option parts.

Mechanically Jointed Rodless Cylinder Series MY1

x G 2 x H E E F A B C D Side support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A 61 71.6 15 26 4.9 3 6.5 3.4 M4 x 0.7 B MY-S20A 67 79.6 25 38 6.4 4 8 4.5 M5 x 0.8 B MY-S25A 81 95 35 50 8 5 9.5 5.5 M6 x 1 B MY-S32A 100 118 45 64 11.7 6 11 6.6 M8 x 1.25 B 120 142 MY-S40A 55 80 14.8 8.5 14 9 M10 x 1.5 B 142

Table of Contents

Stopper ring Block C MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise 2-2> 2> MSQ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Valve Single Unit

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Air Cylinder

2 !7 !8 @2 !4 !5 CJ1 CJP CJ2 !9 @ B @ C JCM @1 @0 CM2 CM2 Rod section CM3 CG1 Boss-cut Integrated clevis CG3 JMB Spring extend !7 !2 !3 !8 @ A !5 !6 @2 q i u e o r y !0 !1 MB MB1 CA2 CS1 CS2 @ B @ C !9 @1 t @0 Rod section Boss-cut Integrated clevis Component Parts No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Stopper ring Block C MSU CRJ CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise 2-2> 2> MSQ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation q to end of rotation w.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Stopper ring Block C MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise 2-2> 2> MSQ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

Programless Controller Series LECP1

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) Cable length (L)[m] 1 3 5 8 A B C (17.7) (17.7) 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 15 (14.2) Connector C (Terminal no.) 1 2 5 6 20 (5.5) (6.3) Actuator side (14) (18) (Terminal

Thermo-chiller/Rack Mount Type

Density r: 1 [kg/dm3] (or, using conventional units, weight volume ratio c = 1 [kgf/L]) Specific heat C: 4.19 x 103 [J/(kgK)] (or, using conventional units, 1 x 103 [cal/(kgfC)]) 2. Values for density and specific heat change slightly according to temperature shown below. Use this as a reference.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Refer to page 100 for part numbers. 291 Made to Order Series LXF/LXP/LXS Short Stroke Type Low Particulate Generation Specification With Motor Brake/Without Motor Brake How to Order LXFH 5 B 1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type LXSH 2 B 1 B C 50 F9N X60 High Rigidity Slide Table Type Motor type Low particulate generation specification 2 phase

Multi-channel Digital Sensor Monitor

Conductor size (mm2) Overall diameter (mm) Colour of cover SMC product No. (1 pc.) 0.8 to 1.0 Red ZS-28-C 26-24 0.14-0.2 1.0 to 1.2 Yellow ZS-28-C-1 (28) (0.08) 1.2 to 1.6 Orange ZS-28-C-2 1.0 to 1.2 Green ZS-28-C-3 1.2 to 1.6 Blue ZS-28-C-4 22-20 0.3-0.5 1.6 to 2.0 Gray ZS-28-C-5 Do not cut the insulator.

Electric Actuator

Cable length (L) [m] (30.7) (16.6) (23.7) Connector A1 (10.5) 1 3 5 8 A B C (7.0) 1.5 3 5 8 (12.7) (10.2) (5.6) Connector C (14.2) (6.7) (5.7) Connector A2 3 2 1 (Terminal no.) 1 3 2 4 1 4 10 (13.5) AB 1 3 15 1 2 (18) 20 AB 15 16 Produced upon receipt of order (14.7) (30.7) (1 1) L (10) Connector B Connector D With lock and sensor Connector A1 terminal no. 1 2 3 Connector C terminal no. 1

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

0.4

N.O. 4-position dual 3-port valve Note) (C) 4 2 Note) Rubber seal only 1 5 3 N.C. N.O.