5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

MXF

MXF12 16 33.1 17.1 23.1 17.1 7.1 7.1 MXF16 21.2 50.8 29.8 40.8 19.8 19.8 9.8 MXF20 23.4 74.7 50.2 64.7 26.7 40.2 24.7 16.7 14.7 Solid State Switch: D-M9BV, D-M9NV, D-M9PV, D-F9WV (mm) B E B Stroke Model Stroke A 100 75 50 30 20 10 100 75 50 30 20 10 MXF8 13.5 6 1 6 14 9 14 MXF12 16 25.1 9.1 9.1 33.1 17.1 17.1 MXF16 21.2 42.3 21.8 11.8 50.8 29.8 19.8 MXF20 23.4 66.7 42.2

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

IP8001 Series

position = 100.0% ( ) 100% 100 Quick opening 50 Linear Stroke (Y) User Equal percentage 50 0 0 100 100% 0% Input current (X) Fig. 30 7: Be sure to set all 11 date items.

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

FQ1

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 0.01 0.01 0.005 0.005 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

Digital Flow Monitor

Bracket A (Part No.: ZS-46-A1) Bracket B (Part No.: ZS-46-A2) -12No.PF-OMU0007-D Mounting with panel mount adapter Mount part (a) to the front of the body and fix it. Then insert the body with (a) into the panel until (a) comes into contact with the panel front surface. Next, mount part (b) to the body from the rear and insert it until (b) comes into contact with the panel for fixing.

Low Profile Slide Table Series MXF

MXS (mm) B E MXQ Stroke Stroke Model A 75 20 50 10 20 10 30 100 30 50 75 100 MXF MXF8 13.5 9 14 14 1 4 4 MXF12 16 17.1 33.1 17.1 7.1 7.1 23.1 MXW MXF16 21.2 29.8 19.8 50.8 9.8 19.8 40.8 MXF20 23.4 MXJ 26.7 24.7 74.7 50.2 14.7 16.7 40.2 64.7 Solid State Auto Switch: D-M9BV, D-M9NV, D-M9PV, D-M9BWV, D-M9NWV, D-M9PWV MXP (mm) B B E MXY Stroke Stroke Model A 20 20 10 30 50 75 100 10

MONOSASHI-KUN WITH BRAKE CONTROLLER

NO 100 200 200 YES Whether cylinder speed is within speed level as shown in allowable kinetic energy graph. 100 Load(kgf) Load(kgf) 80 NO 100 100 80 63 63 50 YES 50 0 0 Whether loading is under specific load as shown in graph.

CL

Additional weight with air cushion 0.01 0.01 0.02 0.02 Additional weight for long stroke 0.01 0.01 0.02 0.03 No. of auto switches mounted Auto switch model Calculation: (Example) CLG1LA20-100 (Foot, 20, 100 st) Basic weight Additional weight Air cylinder stroke Additional weight of air cushion 0.72 + 0.05 x 100/50 + 0.01 = 0.83 kg 1 2 D-B5/B64 D-C7/C80 D-H7 D-G5/K5 0.72 0.05/50 st 100

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

High Power Cylinder:

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

MLGC

A B B A B A B 18 (26) A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 6 9 3 8 10 6.5 4.5 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 6 9 3 8 10 6.5 4.5 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 7 10 4 9 11 7.5 5.5 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30)

Speed Controller: Standard Type Series AS In-line Type

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ O-ring NBR u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 O-ring NBR ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

CV/MVGQ

DC specifications AC specifications (50/60 Hz) Magnet installed even without auto switch 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Auto switch mounting Rail mounting style Band mounting style Symbol A B Example Rail mounting style Band mounting style CDVJ5B15-60-A CDVJ5B10-45-B For the applicable auto switch model, refer to the

180

Calculate the moment of inertia for A and B separately as shown in the figures on the right. A part B part Procedure Calculation Calculation example 1. Check the operating conditions, dimensions of attachment, etc. Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Precision Regulator

Flow Rate Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge