AMP

OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2,

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

IDX-OM-W026

T 100 2 () 100 IDF Series 4-1 4 1 IDX-OM-W026 4 4-2-3 0 OFF 50 1015 ( 1 INOUT IDF Series 4-2 4 2 IDX-OM-W026 4 30 30 (2) IDF Series 4-2 4 3 IDX-OM-W026 4 AD48-A 1 C42FP-260S 1 111692 1 1 20193 20192 SERIAL No.XP AD48 SMC WEB IDF Series 4-2 4 4 IDX-OM-W026 5 5 5-1 3 ON OFF () 3 2 R T 5-2 600mm 1 5-2 5-2 10% 5-2 () ( 60cm 1 ) 10% 3 IDF Series 5-1 5 1

Low Profile

SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model

5 Port Air Operated Valve

3/8 10.0 [8.7] 0.48 [0.46] 3.0 [2.4] 8.3 0.40 2.2 Exhaust center 3 position 354 9.2 [3.0] 0.50 [0.49] 2.6 [0.85] 6.1 0.35 1.6 Pressure center Note 1) [ ]: Normal position Note 2) Values without bracket 1500 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Construction: Body Ported 2 position single VFA1000 VFA3000, 5000 Symbol 2 position single VFA1000 t qe r q e

AP10PA

(Top view) r r e Pressure gauge unit 2) Code Unit psig/bar MPa w q w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.

IS1000

0 IS1000 No. q w e r t y u i o !

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 25.71600 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 26.87600 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 27.34000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 28.03600 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 29.19600 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 14.00000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 14.29000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 14.58000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 15.16000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 15.74000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 16.32000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 16.90000 lb