LC6D/LC6C

12 Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

C76

5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting Band mounting A B Built-in magnet MB None Built-in magnet Nil D Applicable auto switches and bands are shown on pages 6-10-45

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

12 Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.

Flow Sensor Series PFMV

(mm) Type Port size Model 4 M5 x 0.8 M-5AN-4 Barb fitting for nylon tube 6 M-5AN-6 Internal Construction Component Parts q w e r t y e w q Material No.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

C D E F Dimensions Part no.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

Compact Cylinder

Without auto switch Auto switch (mm) E Size Elliptic retaining ring (PAT.) 22 20 24 25 28 32 32 40 Note 1) Cylinder tube width tolerance: 0.2 Note 2) Minimum mounting pitch of auto switch is specified. Refer to back page 3.

Manifold Specifications

Control unit type Nil None 100 VAC, 50/60 Hz 1 Base type/Electrical entry 200 VAC, 50/60 Hz 2 5 9 Plug-in type: Stacking type manifold base with D-sub connector 24 VDC Other 51F Option Plug-in type: Stacking type manifold base with attachment plug lead wire 51G Control equipment Symbol Nil A AP M MP F G C E Non plug-in type: Stacking type manifold base 51 Air filter regulator with auto-drain

Manifold Specifications

Control unit types Nil None 100 VAC, 50/60 Hz 1 Base type/Electrical entry 200 VAC, 50/60 Hz 2 5 9 Plug-in type: Stacking type manifold base with D-sub connector 24 VDC Other 51F Option Plug-in type: Stacking type manifold base with attachment plug lead wire 51G Control equipment Symbol Nil A AP M MP F G C E Non plug-in type: Stacking type manifold base 51 Air filter regulator with auto-drain

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 90 L/min) below 180 L/min) 100 to 1050 L/min 200 to 2100 L/min 10.0 0 to 10%F.S. (Displays 0 when the value is (Displays 0 when the value is below 100 L/min) below 200 L/min) : The zero-cut range of the accumulated value and accumulated pulse value should be 1% F.S. or more.

Digital Flow Switch (Remote type sensor unit)

PF2A551 E 50 500 Analogue output A B Voltage output 1 V 5 V Current output 4 mA 20 mA Rated flow range [L/min] Model Min.

MIST SEPARATOR

AD27-A I.D. 2.5 (3/32") at min., Length 5m (200") at max. AD37, 47(N)-A I.D. 4 (3/16") at min., Length 5m (200") at max. AD38, 48(N)-A: I.D. 6.5 (1/4") at min., Length 5m (200") at max. Air Source WARNING Use clean air. Compressed air containing chemicals, organic solvent, synthetic oil or corrosive gas may lead to cause breakage of parts or malfunction.

Compact Guide Cylinder

1.65 2.24 2.46 2.87 3.28 3.69 4.10 4.51 50 MGQM50 2.54 3.09 3.65 4.21 4.77 5.33 5.89 6.5 63 MGQM63 3.01 3.63 4.23 4.85 5.47 6.09 6.71 7.3 80 MGQM80 5.66 6.59 7.49 8.41 9.33 10.3 11.2 12.1 100 MGQM100 8.96 10.3 11.6 12.9 14.2 15.6 16.9 18.2 Ball Bushing MGQL12 to 100 (kg) (mm) Model Standard stroke (mm) Bore size 10 20 25 30 40 50 75 100 125 150 175 200 12 MGQL12 0.23 0.26 0.29 0.35 0.38

ARJ310

ARJF310F-01 y e !

Microspeed Cylinder

Bore size (mm) Standard strokes (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Precautions Caution Mounting and Accessories 1. When mounting, hold the rod cover and apply an appropriate tightening force to the mounting nut, or fasten by applying the appropriate tightening force to the rod cover body.

Clean Regulator

300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

Safety Speed Control Valve (SSC Valve) Series ASS

It can cause damage or air leakage. 100 8 7 to 9 150 1/8 14 12 to 14 200 1/4 17 22 to 24 200 3/8 21 28 to 30 200 1/2 24 Lock Nut Tightening Torque Caution 1. Suitable screw torque for a hexagon lock nut is shown in the table below. For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

V 200 V or less 24 V or less IC circuit Grommet Relay, PLC 12 V Connector 2-wire 24 V IC circuit PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with