Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 (mm) R A B C D E (g6) F (h9) G K L M N P Q S 90 100 241 Y Model 301 CDRB2BW15-D CDRB2BW20-D CDRB2BW30-D 5 6 8 12 14 16 34 42 50 20

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

CRB2/CRBU2/CRB1

The angle is 69 when any of the following auto switches are used: D-S99(V), D-T99(V), and D-S9P(V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 R E (g6) A B C D F (h9) G K L M N

Proposals for Energy Saving

H2 H1 L2 L1 Nozzle with male thread/KN (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 1 1.5 2 2.5 6 4 6 4 6 6 8 8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 R 3/4 R 3/4 R 1 10 10 14 14 14 14 14 17 17 22 22 27 27 36 21.4 21 31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1 49.6 47.8 62.8 17.4 17 25.4 25 24.5 24.1 21.1

Electric Actuator/Slider Type

0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

SYJ3000/5000/7000

port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 1-5-17.

Aluminum High Vacuum Angle Valve

Symbol Nil Auto switch model r Auto switch type t Number of auto switches/Mounting position Mounting position Valve open/closed Valve open Valve closed Quantity Remarks Without auto switch (without built-in magnet) Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

Battery-less

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

VS 8-2/VS 8-4

VS 8S R 2 4 IP40 compliant Using our D-sub connector greatly reduces labor, while it also minimizes wiring and saves space.

1

R C85 D-A7H/A80H D-A73C/A80C/F7 D-A7H, D-J79W D-A80H, D-F7BA D-F7, D-F79F D-J79, D-F7NT D-F7W Y + Stroke Please contact SMC for Series MGC.

AC

Note 2) Without valve mechanism Option Combinations Combinable Impossible Depends on the model Applicable Filter Regulator Option Auto drain Symbol AW4000 Description AW1000 D D C 1 2 6 8 C J N R W AW2000 AW3000 D D C 1 2 6 8 C J N R W Auto drain pressure differential style Auto drain float style (N.O.)

SZ3000

A 4 (B) 2 (A) 4 B 2 Manual override A SOL.b SOL.a 3 (R) 5 (R) Nil: Non-locking push type D: Push-turn locking slotted type 1 (P) 4 position dual 3 port valve: N.O./N.O. (B) 2 (A) 4 B SOL.b SOL.a 5 (R) 3 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

CXWM/CXWL

(mm) Hs Ht Hw 23 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C Hw 23 Ht Hv D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C D-F7LF 12.5 10.5 15 15 23 12.5 10 23 15 15 22 23 23 24 30 12.5 15 12.5 15 12.5

VFR

3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

A 4 (B) 2 (A) 4 Manual override B 2 A SOL.b SOL.a 3 (R) Nil: Non-locking push type D: Slotted locking type Screw driver operated 5 (R) 1 (P) 4 position dual 3 port valve: N.O./N.O. (B) 2 (A) 4 B SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Rotary Actuator/Vane Type

3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

SYJ300/500/700

terminal (D) M8 connector (WO) 63.5 63.5 63.5 63.5 X X X X P P P P 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 R R R R 90.2 Max. 10 91.1 Pg7 78.1 [85.1] Approx. 300 (Lead wire length) 54 71.5 M8 x 1 81.7 51.6 Approx. 300 (Lead wire length) 93 67 [74] 100.5 Refer to page 4-4-61 for dimensions with connector cable.

VFS

3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !