CNA

130 140 D-A44 (n-2) 25+55 2 n=2, 4, 6, 8, (n-4) 110+55 2 n=4, 8, 12, 16 (n-4) 120+55 2 n=4, 8, 12, 16 (n-4) 130+55 2 n=4, 8, 12, 16 (n-4) 140+55 2 n=4, 8, 12, 16 n (Same side) n=2, 4, 6, 8, 75+50(n-2) n=2, 4, 6, 8, 80+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 3, 4, 55+50(n-2) Same 15 75 90 90 100 100 110 110 10 75 80 90 Different With 1 With 2 With n D-B5 D-B6 D-G5l D-K59 D-G5lW D-K59W

Cylinder with Lock

(n 4) 2 (n = 4, 8, 12, 16) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) 15 + 55 n (Same surface) (n = 2, 4, 6, 8) 2 (Different surfaces, Same surface), 1 90 20 100 110 120 20 + 55 (n 2) 2 (n 4) 2 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) D-A59W 90 + 55

0.55

48 15 58 55 15 75 58 18 78 23 12 26 15 23 12 33 26 15 36 33 15 53 36 18 56 45 12 48 15 45 12 55 48 15 58 55 15 75 58 18 78 Standard VF1000 2-position High-pressure type 2-position Standard 3-position VF3000 Single Double 2-position High-pressure type 3-position Single Double 2-position Standard 3-position VF5000 Single Double 2-position High-pressure type 3-position Note) Based on dynamic

CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63

MY1

Vertical mounting x P. 8-11-55 z y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com x y z P. 8-11-82 MY1B32-500 For actual examples of calculation for each orientation, refer to the pages above. 2.

Table of Contents

Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000-55-1B SY5000-55-1B SY7000-55-1B Applicable series 10-SY3000 10-SY5000 10-SY7000 10-SY3000 10-SY5000 10-SY7000 One-touch fitting (Inch size) One-touch fitting (Inch size) Port size One-touch fitting for 5 / 16" One-touch fitting for 3 / 8" One-touch fitting for 3 / 8" Assembly part No.

CV/MVGQ

(n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 n = 4, 8, 12, 16 15 + 55 (n 2) 2 100 + 55 n = 4, 8, 12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2(Different sides, Same side) 100 110 120 20 90 90 + 55 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-A59W (n 2) 2 20 + 55 n = 2, 4, 6, 8 n = 4, 8, 12, 16 100 + 55 n = 4, 8, 12, 16 110 + 55 n = 4, 8, 12, 16 120 + 55 n =

Free Mount Cylinder

80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products For details, refer to the respective catalog.

AC

End plate ass'y 1 pc. 1.5-26 ARM2500/3000 Dimensions Dimensions B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Manifold stations Dimensions by Number of Stations 10 Model Symbol 9 8 7 6 5 4 3 2 454 412 370 328 286 244 202 160 118 L1 ARM2500 442 400 358 316 274 232

KJ

(mm) Model Effective area (mm2) Weight (g) 3-connection thread M L 8 6 4 DT04-00 32 DT06-00 36 10 10 10 12 5.7 14 15 16 23.5 23.5 DT08-00 47 12 14 16 25 24.5 DT10-00 10 12 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female Connector: DHF H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

KQ2

) (65) 55 78 21 16 25 39 32.3 26.5 KK Applicable tubing Reference dimensions after R thread installation.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L2 L3 With auto switch Without auto switch Standard stroke (mm) Bore (mm) 12 16 20 25 L L1 FD FT FV FX FZ Inch Inch Metric 24 25.5 28.5 32.5 Metric 14 15.5 18.5 22.5 A 44 44 55 59 B 27 27 36 39 A 39 39 45 49 B 22 22 26 29 11.5 11.5 12.5 14.5 21.5 21.5 22.5 24.5 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 3.5 3.5 4.5 5 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 5 to 30 5 to 30 5 to 50 5 to 50

Compact 5-Port Solenoid Valve

JJ5SY1-10L2 JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: Lead Wire, 17 cores p. 55 JJ5SY1-10L3 JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: Lead Wire, 9 cores p. 55 JJ5SY1-10P JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: Flat Ribbon Cable, Connector Entry Direction Adjustable (26 pins) p. 21 JJ5SY1-10PC JSY1000 Type 10/Side Ported

CL

CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41

C95

10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2 B3 L3 L1 TG1 T d1 FL d2 d3 CN XD 45 55 65 75 95 115 14 16 21 21 25 25 5 5 5 5 5 5 11.5 12 14 14 16 16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3

Basic type / Direct mount type Series CY3B/CY3R

Refer to front matters 54 and 55 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Operation Handling Caution Caution 1. The maximum operating pressure for the clean rodless cylinder is 0.3 MPa.

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

ZP

62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Clamp Cylinder with Lock

M12 x 1.5 M4 x 7 86 51.5 5 12.5 114 226 50 64 64 20 55 78.5 58 17 58 M16 x 1.5 M4 x 7 87.5 52.5 5.5 14 118.5 230.5 63 74 74 20 69 82 72 17 58 M16 x 1.5 M5 x 7 91 53.5 5.5 19 122 234 Note) Refer to page 14 and 15 for Accessories.