KQ2

Note) D1: Max. diameter Applicable tubing Connection thread (with sealant) 66 Inch-size One-touch Fittings Series KQ2 Universal Female Elbow: KQ2VF H (Width across flats) 8.4 9.6 Applicable tubing O.D.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Dimension L 66 67 68 69 70 71 923 935.5 948 960.5 973 985.5 No.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads Rc/NPT L W E Y M H L E Model LQ3H1A-F LQ3H2A-F LQ3H2B-F LQ3H3A-F LQ3H3B-F LQ3H3C-F LQ3H4A-F LQ3H4B-F LQ3H4C-F LQ3H5A-F LQ3H5B-F LQ3H5C-F LQ3H6A-F LQ3H6B-F LQ3H6C-F 18.5 18.5 21.5 18.5 21.5 25 21.5 25 29.5 25 29.5 36 29.5 36 44.5 10 9 34 39 44 47.5 52 52.5 53 56 64 64.5 69.5 71 77.5 79 86.5 14 35 40 45 50.5 55 55.5 55.5 58 66 67 72 73.5 81.5 83 90.5 1/8" 10 11 1/8" 1/8"

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) 0.43[0.33] 0.32 10-SYJ3443 10-SYJ3543 0.42[0.33] 0.16[0.080] 37 55 36 53 41 63 10-SYJ3123 2 position 10-SYJ3223 5 port body ported 0.9 M3 x 0.5 M3 x 0.5 10-SYJ3323 3 position 58 56 66 10-SYJ3423 10-SYJ3523 37 55 36 53 41 63 10-SYJ3133 2 position 4 port base mounted (For manifold base only)Note 1) 10-SYJ3233 1/8 10-SYJ3 M5 x 0.8 3 position 58 56 66 10-SYJ3433 10-SYJ3533 Note 1) Dedicated

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

.: 8, 5/16" : 10, 3/8" G: Approx. 300 H: Approx. 600 100.1 [102.3] 77.9 (Lead wire length) 13.6 B A 101.8 [104] (For manifold mounting) 2 x 4.2 Manual override 19 42 (52) (66) (For mounting) 2 x 4.2 (Light/surge voltage suppressor) (5.5) 1.2 (5.5) 47.6 12.5 (42.5) (49.5) 16.1 47.6 31.5 [38.5] + 24.5 28 10-SY7120-02(-F2) G H Air Preparation Equipment Pressure Control Equipment Flow Control

Air Cylinder

Applicable bore size TX Rod trunnion Head trunnion CD LX LZ Z + Stroke Z + Stroke CS2 CM-B020 20 32 36 108 8 66 82 CM-B032 25 40 40 112 9 74 90 32 114 CM-B040 40 53 44.5 143.5 10 87 103 CM2U/CM2T (Rod/Head trunnion) Note) A pivot bracket pin and retaining rings are not included with the pivot bracket.

ZP

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

ZP

(58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K HS Plug G G Q + Stroke HR CR Z + Stroke CY3R25/32/40 CY3R15/20 (mm) A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66

CM2

Z H MM ND +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 9 10 14 18 25 66 41 M8 X 1.25 9 M10 X 1.25 9 10 14 22 25 69 45 9 M14 X 1.5 16 13 25 24 49.7 92 50 12 Double Knuckle Joint (mm) Applicable bore size A1 Applicable pin part No.

A

IS1000E-402 14 33 87 66 17.5 IS1000E-403 38 AC4000 IS1000E-404 12 IS1000E-406 34 50 87 66 17.5 H O W T O O R D E R P R E S S U R E S W I T C H *Without Yoke Clip.

VQZ1000/2000/3000

Pg.7 Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 35.5 M plug connector (M): VQZ3120 1(R)-M-C6/C8/C10/02 Cover diameter 1.5 Cross section 0.23 mm2 77 (Lead wire length) 300 102.5 66 114 Indicator light 37 <42> < >: AC 2-7-15 Body Ported 16 16 Series VQZ1000/2000/3000 Dimensions: VQZ3000 2 position double Grommet (G): VQZ3220 1(R)-G-C6/C8/C10/02 300

Vacuum Module Series ZX

(mm) Stations Symbol 7 180 192 197 8 5 138 150 155 6 159 171 176 3 96 108 113 4 117 129 134 1 54 66 71 2 75 87 92 L1 33 45 50 L2 L3 900 Ejector System Series ZX Vacuum Module: ZA Circuit diagram ZX ZR ZM ZMA ZQ ZH ZU ZL ZY ZF ZP SP ZCUK AMJ + + + + AMV AEP Vacuum port (V) M5 (or M6) HEP Related Equipment 10.7 V V 22.5 21 4.2 901 Vacuum Module: Vacuum Pump System Series ZX [Option] How

VQC

BF 9 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 S Kit (Serial Transmission Kit: EX250) (L3) (L4) L2 5.5 111 L1 21 63 P = 10.5 28 65 (12) 13 1.5 1.5 Indicator light Manual override (5.5) 93.5 (35) 66 75 37.5 Approx. 2 Approx. 4 Input block Mounting hole for 6-M4 SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-C8 3(R) port DIN rail clamp screw 0 BUS 62.5 1 60 (12) 40.5 2 PWR 25

NCG/CG1

50.5 75.5 41 66 100.5 91 16 25 25 116 116 25.5 50.5 75.5 41 66 50.5 75.5 41 66 30 30 100.5 91 16 125.5 125.5 D-G5NTL D-G59F D-G5NTL D-G59F 32 32 117 117 26.5 33.5 33.5 51.5 76.5 42 67 51.5 76.5 42 67 101.5 92 17 126.5 126.5 40 40 119 119 31 38 38 56 81 44 69 56 81 44 69 106 94 19 131 131 20 20 27 27.5 27.5 52 77 42.5 67.5 52 77 42.5 67.5 102 92.5 17.5 25 25 27 30 30 52 77 42.5 67.5 52 77

CG1

66 16 25.5 91 27.5 27.5 100.5 D-G5 D-G5 50.5 50.5 75.5 75.5 41 41 66 66 16 25.5 91 30 30 100.5 125.5 125.5 116 116 D-K5 D-K5 51.5 51.5 76.5 76.5 42 42 67 67 17 26.5 92 33.5 33.5 101.5 126.5 126.5 117 117 D-G5NT D-G5NT 56 56 81 81 44.5 44.5 69.5 69.5 19.5 31 94.5 38 38 106 131 131 119.5 119.5 52 52 77 77 42.5 42.5 67.5 67.5 17.5 27 92.5 27.5 27.5 102 52 52 77 77 42.5 42.5 67.5 67.5 17.5 27

Basic type / Direct mount type Series CY3B/CY3R

5.5 7.5 7.5 8 11 14 14 B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 H 13.5 12.5 13 20 20.5 22 29 33 33 CC 32 38 I 28 34 40 50 58 72 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 J 4.5 4.5 6 6 8 8 10 12 12 E 4 1.5 2 2 2 2 3 8 8 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V T C 8 14 14 26 32 32 41 F 8 9 10 13 13 16 16 2 2 L 35 38 57 66

Air Slide Table Series MXQ

90 100 150 205 230 I 16 16 16 16 16 31 20 18 18 NN 2 2 2 2 2 3 4 4 4 H 55 55 55 65 80 44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQ25L10 MXQ25L20 MXQ25L30 MXQ25L40 MXQ25L50 MXQ25L75 MXQ25L-100 MXQ25L-125 MXQ25L-150 Note) Note) Note) Refer to

LEC-OM02704CN

6.1.8 66 6.1.9 69 6.1.10 6-10 6.1.11 6-11 6.1.12 6-11 6.1.13 6-12 6.2 (PB) 6-14 6.2.1 6-14 6.2.2 6-15 6.3 (PC) 6-21 6.3.1 6-21 6.3.2 6-22 6.3.3 S 6-28 6.3.4 6-28 6.3.5 6-28 6.3.6 6-29 6.4 (PD) 6-30 6.4.1 6-30 6.4.2 6-31 6.4.3 (LSP)(LSN) 6-39 6.4.4 6-40 7 MR Configurator 717-27 7.1 72 7.2 73 7.3 75 7.4 76 7.5 78 7.6 7-10 7.7 7-14 7.7.1 JOG

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5