2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

(Piping specifications A2(L) and B2(L) are excluded.) ZSP PS Specifications ISA Model 500 kPa ZSE80(F) 1.5 MPa ISE80 PSE Withstand pressure Applicable fluid Fluids do not corrode stainless steel 316L IS Models other than above are the same specifications as standard.

AS-FG/ASD-FG

A1 D1 L5 D1 A2 T T Inch size L4 L5 A1 A2 M1 Max.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Parallel l/O Connector 6.1 Parallel I/O specifications Input specifications Output specifications No. Item Specification No.

Air Slide Table Series MXJ

Body tapped l l Maximum screw-in depth l (mm) Maximum tightening torque (Nm) Model Bolt MXJ4 MXJ6 MXJ8 1.14 2.7 2.7 5 6 6 M3 x 0.5 M4 x 0.7 M4 x 0.7 2. Through-hole Mounting Maximum tightening torque (Nm) Caution l (mm) Model Bolt MXJ4 MXJ6 MXJ8 1. Do not scratch or dent on the mounting side of body, table and end plate.

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

High performance type Step Motor Controller (Servo/24 VDC)

Parallel l/O Connector 6.1 Parallel I/O specifications Input specifications Output specifications No. Item Specification No.

F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)]

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)]

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)

ZSE20C: ZSE20C, Rated Vaccum Range: F (-100 to 100 kPa), Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C01 (Rc1/8), Piping Direction: L (Bottom Ported)

ZSE20C: ZSE20C, Rated Vaccum Range: -100 to 100 kPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -

ZSE20C: ZSE20C, Rated Vaccum Range: -100 to 100 kPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: -, Lead Wire: -, Bracket: -

ZSE20C: ZSE20C, Rated Vaccum Range: -100 to 100 kPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -

ZSE20C: ZSE20C, Rated Vaccum Range: -100 to 100 kPa, Output Specification: IO-Link/Switch: 1 Output (PNP or NPN), Switching Type for Switch Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Rc1/8, Piping Direction: Bottom Ported, Lead Wire: -, Bracket: -

Rotary Cylinder Series MRQ Size: 32, 40 1

A = 0.06 x 40.2 x {(0.5 + 0.1)/0.1}/0.5 = 28.6 l/min B = 0.06 x 4.88 x {(0.5 + 0.1)/0.1}/0.5 = 3.5 l/min C = B = 3.5 l/min D = 0.06 x 33.7 x {(0.5 + 0.1)/0.1}/0.5 = 24.3 l/min Since operation is simultaneous at C and D, total the respective amounts of air requirement.

Dual Speed Controller with One-touch Fitting Series ASD 1

L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

ASD

D1 D1 A2 T T Inch L4 L5 A1 A2 M MAX.

Step Motor Controller (Servo / 24 VDC)

Lock B-1 Red 4 Lock A-1 Black 5 Sensor B-3 Brown 1 Sensor A-3 Blue 2 Electric Actuator side Controller side 10 - (5) I/O Cable -Pin No. # of wire Color of Dot Dot Pin No. # of wire Color of Dot Dot insulation mark color insulation mark color B1 7 Yellow Red A1 1 Light brown Black Cable length (L) B2 8 Light green Black A2 Light brown Red B3 Light green Red A3 2 Yellow Black B4 9