Digital Flow Switch (Integrated display type)

to 20 mA) output type PFM7--DMax. 28 V, 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Max. load impedance: 600 Min. load impedance: 50 NPN (1 output) + External input type PFM7--GMax. 28 V, 80 mA Internal voltage drop: 1 V or less External input: No voltage input (reed switch or solid state), 30 ms or more -18No.PF-OMJ0006

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

Vacuum

l xDiinensiom:With Sp*r 2 Nllt $enies I Indluifrnl Unll/ llalu (Dimensions in millimeters Valve: Applicable valve / NVJ300 (N.O. type) Nzxi-v@K38@@@ Spacer 2 Gor side Srf,f,r,r 2,/ZX1-s,2 Ak supply passur port Exterml vacuum rreestxe aoat Valve: Appllcable valve /Air operatd Nar-v@K6 Ak opEted EXrA) GXr A) M3XO,5 r ^ T ul . oi : l f r l | t M5xO.8 c (PV pdt) Air supply Exthal v Nol6) XDi.nensidrstFo

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

ZL3-OM00601

6 600L/min(ANR) P Port exhaust *2 *2: Port thread type is the same as the thread type selected for 3). 3) Supply (P), vacuum (V) port / one-touch fitting port size Vacuum (V) port Supply (P) port 5) Combination of the supply valve and the release valve 06 Rc3/4 K1 Supply valve (N.C.) + Release valve (N.C.) 04 2xRc1/2 K2 Supply valve (N.C.) 8() F06 G3/4*1 B1 Supply valve (N.O.) + Release

Pressure Sensor

(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analog output of 5 V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance R The pressure range in which the Pressure switch satisfies the specifications.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Common Supply Regulator

NPT AR24P-320AS-01 Rc (14) Plug assembly Including part (13)) AR24P-320AS-N01 NPT AR24P-320AS-F01 G The numbers in the table and structural drawings are consistent with the numbers in sections [10.

Pneumatic Positioner IP300/IP3100

'1l8 NPT G43-P10-N01 or KSl OB-AD1 1 (St.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.

1% F.S. or lessMaximum load impedance: 300 (Power supply voltage 12 V)600 (Power supply voltage 24 V)Minimum load impedance: 50 Non-voltage input (Reed or Solid state), Low level: 0.4 V or less, 5 ms or longer input3 1/2-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 77 ?5F)Lights up when output is turned ON.