ZP ) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06
(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine
Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.
) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06
Vacuum Inlet Direction Lateral Y Type/ZPY Connection Male thread Female thread Pad diameter 2 to 16 20 to 32 40, 50 2 to 81 10 to 16 20 to 32 40, 50 M5 x 0.8 M6 x 1 M8 x 1.25 Connection thread M5 x 0.8 M6 x 1 M6 x 1 M8 x 1 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 Vacuum inlet Barb fitting2 4, 6 6 4, 6 6 1 Refer to 2 to 8 for the thin flat type and thin flat type with ribs. 2 Applicable
Flat/Flat with Ribs Applicable Tubing G: M5 x 0.8 Y G: M6 x 1 G: M8 x 1.25 G: M4 x 0.7 G: M5 x 0.8 D ZPY02U 2 4 6 8 Applicable tube O.
(Example) For M4: L2 = 8mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 Shaft type Shaft type L1 = S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Symbol
GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x
Y-J010B Applicable bore size Applicable bore size d C C B d H B H Part no. Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 8.1 11 12.7 M8 x 1.0 4 7 M4 x 0.7 3.2 SNJ-016B NTJ-015A 9.2 14 16.2 M10 x 1.0 4 8 M5 x 0.8 4 NDd9 NDH10 R1 NX U1 Part no.
B port size: M5, C4, C6, N3, N7.
Model Port size H Male connecter M5 M5 x 0.8 01 01 05 07 Straight union 1 8 Male elbow 1 8 3 16 02 1 4 1 4 Plug-in elbow L Union elbow 03 3 8 09 5 16 04 1 2 11 Reducer elbow 3 8 1 2 W Extended male elbow Same dia. rod Same dia. tubing 00 99 13 Union tee T Male branch tee Y Male run tee Union Y U Plug-in Y Branch Y R Plug-in reducer Bulkhead connector E Bulkhead union mark: With seal
NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7
Q1 = M Applicable shaft type: W Applicable shaft type: W Q2 = M L1 = Y = X = L2 = [mm] Size CRB2, CRBU2 Y L2 max Q2 10 7 to 8 Y-3 M4 15 8.5 to 9 Y-3.5 M5 20 10 Y-4 M6 30 13 Y-5 M8 40 15 Y-6 M10 [mm] Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 9 to 14 X-5 M4 7 to 14 X-3 M4 15 11 to 18 X-6 M5 8.5 to 18 X-3.5 M5 20 13 to 20 X-7 M6 10 to 20 X-4 M6 30 16 to 22 X-8 M8 13 to 22 X-5 M8 Symbol: A5
Flat/Flat with Ribs Applicable Tubing G: M5 x 0.8 Y G: M6 x 1 G: M8 x 1.25 G: M4 x 0.7 G: M5 x 0.8 D ZPY02U 2 4 6 8 Applicable tube O.
Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.
0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5
2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !